Exploration of the ultimate patterning potential achievable with high resolution focused ion beams View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

2005-01

AUTHORS

J. Gierak, D. Mailly, P. Hawkes, R. Jede, L. Bruchhaus, L. Bardotti, B. Prével, P. Mélinon, A. Perez, R. Hyndman, J.-P. Jamet, J. Ferré, A. Mougin, C. Chappert, V. Mathet, P. Warin, J. Chapman

ABSTRACT

Controlled and reproducible fabrication of nano-structured materials will be one of the main industrial challenges in the next few years. We have recently proposed exploitation of the nano-structuring potential of a high resolution Focused Ion Beam Tool, to overcome basic limitations of current nano-fabrication techniques. The aim of this article is to present some new routes for material patterning, which benefit from ion-induced local property modifications or damage. In the experiments we describe hereafter an ultra-sharp pencil of 30 keV gallium ions is used to tailor the characteristics of several materials at a scale of a few nanometres. The experimental results are then compared to simulations. First, we simulate the control of collisional defects generated in a thin magnetic layer under FIB irradiation. The results explain the stable magnetic structures we have obtained experimentally. This was achieved with a low surface ion dose (1012 to 1014 ions/cm2). In addition we have explored the promising direction of “Bottom-up” or “self-organization” processes using a FIB instrument. We have defined artificial surface defects. These defects created by the impact of an 8-nm FWHM probe were used to pin the diffusion and to organize nanometre-sized gold clusters on a graphite surface. More... »

PAGES

187-194

References to SciGraph publications

  • 1999-12. Magnetic nanostructures of mixed cobalt–samarium clusters in THE EUROPEAN PHYSICAL JOURNAL D
  • Identifiers

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    http://scigraph.springernature.com/pub.10.1007/s00339-004-2551-z

    DOI

    http://dx.doi.org/10.1007/s00339-004-2551-z

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