Efficient submicron processing of metals with femtosecond UV pulses View Full Text


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Article Info

DATE

2003-03

AUTHORS

J. Békési, J.-H. Klein-Wiele, P. Simon

ABSTRACT

The generation of submicron-sized holes on metal surfaces by applying femtosecond UV laser pulses was investigated. Different optical schemes based on a Schwarzschild-type reflective objective were used to reach optimized ablation quality and efficiency in different applications (hole ablation, through-hole drilling, generation of surface patterns consisting of holes, etc.). Submicron-sized holes and hole patterns were ablated onto metal surfaces and drilled through ∼5-μm-thick steel foils with 600-nm diameter on the output side. Using a special optical interferometric method, large-area surface processing of high-conductivity materials in the submicron regime was performed. Combining these techniques with the application of high-repetition-rate ultra-short UV laser sources, large-area sub-μm processing of all kinds of materials in industrial environments is possible. More... »

PAGES

355-357

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s00339-002-1820-y

DOI

http://dx.doi.org/10.1007/s00339-002-1820-y

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1021119019


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0306", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Chemistry (incl. Structural)", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/03", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Chemical Sciences", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Laser-Laboratorium G\u00f6ttingen", 
          "id": "https://www.grid.ac/institutes/grid.461771.2", 
          "name": [
            "Laser Laboratorium G\u00f6ttingen e.V., Hans-Adolf-Krebs Weg 1, 37 077 G\u00f6ttingen, Germany, DE"
          ], 
          "type": "Organization"
        }, 
        "familyName": "B\u00e9k\u00e9si", 
        "givenName": "J.", 
        "id": "sg:person.016652521242.01", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016652521242.01"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Laser-Laboratorium G\u00f6ttingen", 
          "id": "https://www.grid.ac/institutes/grid.461771.2", 
          "name": [
            "Laser Laboratorium G\u00f6ttingen e.V., Hans-Adolf-Krebs Weg 1, 37 077 G\u00f6ttingen, Germany, DE"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Klein-Wiele", 
        "givenName": "J.-H.", 
        "id": "sg:person.07522336617.98", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07522336617.98"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Laser-Laboratorium G\u00f6ttingen", 
          "id": "https://www.grid.ac/institutes/grid.461771.2", 
          "name": [
            "Laser Laboratorium G\u00f6ttingen e.V., Hans-Adolf-Krebs Weg 1, 37 077 G\u00f6ttingen, Germany, DE"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Simon", 
        "givenName": "P.", 
        "id": "sg:person.01341511210.94", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01341511210.94"
        ], 
        "type": "Person"
      }
    ], 
    "datePublished": "2003-03", 
    "datePublishedReg": "2003-03-01", 
    "description": "The generation of submicron-sized holes on metal surfaces by applying femtosecond UV laser pulses was investigated. Different optical schemes based on a Schwarzschild-type reflective objective were used to reach optimized ablation quality and efficiency in different applications (hole ablation, through-hole drilling, generation of surface patterns consisting of holes, etc.). Submicron-sized holes and hole patterns were ablated onto metal surfaces and drilled through \u223c5-\u03bcm-thick steel foils with 600-nm diameter on the output side. Using a special optical interferometric method, large-area surface processing of high-conductivity materials in the submicron regime was performed. Combining these techniques with the application of high-repetition-rate ultra-short UV laser sources, large-area sub-\u03bcm processing of all kinds of materials in industrial environments is possible.", 
    "genre": "non_research_article", 
    "id": "sg:pub.10.1007/s00339-002-1820-y", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1022207", 
        "issn": [
          "0947-8396", 
          "1432-0630"
        ], 
        "name": "Applied Physics A", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "3", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "76"
      }
    ], 
    "name": "Efficient submicron processing of metals with femtosecond UV pulses", 
    "pagination": "355-357", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "649f0dbb85307d72c74aa5ae917d7bc29edd9cb0b0bd419f38b3e3b3c14dedb5"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/s00339-002-1820-y"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1021119019"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1007/s00339-002-1820-y", 
      "https://app.dimensions.ai/details/publication/pub.1021119019"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-10T15:43", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8664_00000481.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://link.springer.com/10.1007/s00339-002-1820-y"
  }
]
 

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This table displays all metadata directly associated to this object as RDF triples.

75 TRIPLES      20 PREDICATES      27 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/s00339-002-1820-y schema:about anzsrc-for:03
2 anzsrc-for:0306
3 schema:author N4074312df03440a8bf108465697351cf
4 schema:datePublished 2003-03
5 schema:datePublishedReg 2003-03-01
6 schema:description The generation of submicron-sized holes on metal surfaces by applying femtosecond UV laser pulses was investigated. Different optical schemes based on a Schwarzschild-type reflective objective were used to reach optimized ablation quality and efficiency in different applications (hole ablation, through-hole drilling, generation of surface patterns consisting of holes, etc.). Submicron-sized holes and hole patterns were ablated onto metal surfaces and drilled through ∼5-μm-thick steel foils with 600-nm diameter on the output side. Using a special optical interferometric method, large-area surface processing of high-conductivity materials in the submicron regime was performed. Combining these techniques with the application of high-repetition-rate ultra-short UV laser sources, large-area sub-μm processing of all kinds of materials in industrial environments is possible.
7 schema:genre non_research_article
8 schema:inLanguage en
9 schema:isAccessibleForFree false
10 schema:isPartOf N17e8f6edfb9140af84f711cd8085ef76
11 N1ee17d52ddf84067a170001b071f5463
12 sg:journal.1022207
13 schema:name Efficient submicron processing of metals with femtosecond UV pulses
14 schema:pagination 355-357
15 schema:productId N402d5269bc6f4df28393b6e6a5323dd1
16 N44067a919b8a4f8fad9642c07eb4ba25
17 N7399a521d8774430936078fa579ed671
18 schema:sameAs https://app.dimensions.ai/details/publication/pub.1021119019
19 https://doi.org/10.1007/s00339-002-1820-y
20 schema:sdDatePublished 2019-04-10T15:43
21 schema:sdLicense https://scigraph.springernature.com/explorer/license/
22 schema:sdPublisher N39a9fd6d47334198b96541b025447706
23 schema:url http://link.springer.com/10.1007/s00339-002-1820-y
24 sgo:license sg:explorer/license/
25 sgo:sdDataset articles
26 rdf:type schema:ScholarlyArticle
27 N17e8f6edfb9140af84f711cd8085ef76 schema:issueNumber 3
28 rdf:type schema:PublicationIssue
29 N1ee17d52ddf84067a170001b071f5463 schema:volumeNumber 76
30 rdf:type schema:PublicationVolume
31 N39a9fd6d47334198b96541b025447706 schema:name Springer Nature - SN SciGraph project
32 rdf:type schema:Organization
33 N402d5269bc6f4df28393b6e6a5323dd1 schema:name readcube_id
34 schema:value 649f0dbb85307d72c74aa5ae917d7bc29edd9cb0b0bd419f38b3e3b3c14dedb5
35 rdf:type schema:PropertyValue
36 N4074312df03440a8bf108465697351cf rdf:first sg:person.016652521242.01
37 rdf:rest Nec4fa32e374a4e9eb710acd366b4f53b
38 N44067a919b8a4f8fad9642c07eb4ba25 schema:name doi
39 schema:value 10.1007/s00339-002-1820-y
40 rdf:type schema:PropertyValue
41 N7399a521d8774430936078fa579ed671 schema:name dimensions_id
42 schema:value pub.1021119019
43 rdf:type schema:PropertyValue
44 Nb9254d14dda641e39e86f83a07a64295 rdf:first sg:person.01341511210.94
45 rdf:rest rdf:nil
46 Nec4fa32e374a4e9eb710acd366b4f53b rdf:first sg:person.07522336617.98
47 rdf:rest Nb9254d14dda641e39e86f83a07a64295
48 anzsrc-for:03 schema:inDefinedTermSet anzsrc-for:
49 schema:name Chemical Sciences
50 rdf:type schema:DefinedTerm
51 anzsrc-for:0306 schema:inDefinedTermSet anzsrc-for:
52 schema:name Physical Chemistry (incl. Structural)
53 rdf:type schema:DefinedTerm
54 sg:journal.1022207 schema:issn 0947-8396
55 1432-0630
56 schema:name Applied Physics A
57 rdf:type schema:Periodical
58 sg:person.01341511210.94 schema:affiliation https://www.grid.ac/institutes/grid.461771.2
59 schema:familyName Simon
60 schema:givenName P.
61 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01341511210.94
62 rdf:type schema:Person
63 sg:person.016652521242.01 schema:affiliation https://www.grid.ac/institutes/grid.461771.2
64 schema:familyName Békési
65 schema:givenName J.
66 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016652521242.01
67 rdf:type schema:Person
68 sg:person.07522336617.98 schema:affiliation https://www.grid.ac/institutes/grid.461771.2
69 schema:familyName Klein-Wiele
70 schema:givenName J.-H.
71 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07522336617.98
72 rdf:type schema:Person
73 https://www.grid.ac/institutes/grid.461771.2 schema:alternateName Laser-Laboratorium Göttingen
74 schema:name Laser Laboratorium Göttingen e.V., Hans-Adolf-Krebs Weg 1, 37 077 Göttingen, Germany, DE
75 rdf:type schema:Organization
 




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