Efficient submicron processing of metals with femtosecond UV pulses View Full Text


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Article Info

DATE

2003-03

AUTHORS

J. Békési, J.-H. Klein-Wiele, P. Simon

ABSTRACT

The generation of submicron-sized holes on metal surfaces by applying femtosecond UV laser pulses was investigated. Different optical schemes based on a Schwarzschild-type reflective objective were used to reach optimized ablation quality and efficiency in different applications (hole ablation, through-hole drilling, generation of surface patterns consisting of holes, etc.). Submicron-sized holes and hole patterns were ablated onto metal surfaces and drilled through ∼5-μm-thick steel foils with 600-nm diameter on the output side. Using a special optical interferometric method, large-area surface processing of high-conductivity materials in the submicron regime was performed. Combining these techniques with the application of high-repetition-rate ultra-short UV laser sources, large-area sub-μm processing of all kinds of materials in industrial environments is possible. More... »

PAGES

355-357

Journal

TITLE

Applied Physics A

ISSUE

3

VOLUME

76

Author Affiliations

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/s00339-002-1820-y

DOI

http://dx.doi.org/10.1007/s00339-002-1820-y

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1021119019


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