Deposition of C60 polymer films under various plasma conditions View Full Text


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Article Info

DATE

2000-06

AUTHORS

M. Ramm, M. Ata

ABSTRACT

We studied the deposition of C60 polymer films under different Ar plasma conditions. The films were deposited at a pressure range between 1.3 and 40 Pa, and the input power was varied from 10 to 70 W. The films were investigated by Raman spectroscopy to confirm the C-C valence states of the polymeric phases. C60 polymers were formed under various experimental conditions. However, the depositions resulted in non-uniform films consisting of unpolymerized C60, dimers, linear chains and polymeric planes. Amorphous carbon was found in the films deposited at 13 and 20 Pa (50 W input power) and 13 Pa (70 W). More... »

PAGES

641-645

Journal

TITLE

Applied Physics A

ISSUE

6

VOLUME

70

Author Affiliations

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/pl00021074

DOI

http://dx.doi.org/10.1007/pl00021074

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1085142357


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