Transition metal carbides, nitrides, and borides for electronic applications View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

1997-03

AUTHORS

Wendell S. Williams

ABSTRACT

Compounds of transition metals from Groups IV and V with carbon, nitrogen, or boron (e.g., NbC, TiN, and ZrB2) are electronically conductive but are also very hard and have high melting points. These materials resist electromigration and prevent diffusion because their strong interatomic bonding makes the activation energy for diffusion very high. Carbides and nitrides form the NaCl crystal structure, but are nonstoichiometric with nonmetal atom vacancies that scatter electrons. This defect-controlled resistivity can be eliminated with an order-disorder transformation at a specific nonmetal/metal ratio. The diborides are essentially sentially stoichiometric and have low resistivities. These metallic ceramics can be deposited as thin films to form interconnects and diffusion barriers in ultralarge-scale integrated circuits. More... »

PAGES

38-42

Journal

TITLE

JOM

ISSUE

3

VOLUME

49

Related Patents

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/bf02914655

DOI

http://dx.doi.org/10.1007/bf02914655

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1025258853


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