Ultrafine aluminum oxide powder prepared by chemical vapor deposition of trimethylaluminum View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

1991-09

AUTHORS

Kwang Ho Kim, C. H. Ho, Tae-Gyo Suh, S. Prakash, R. F. Bunshah

ABSTRACT

Ultrafine aluminum oxide powder in the size range 5–150 nm has been successfully synthesized by metal-organic chemical vapor deposition (CVD) using the reaction between trimethyl aluminum (TMAl) and oxygen. With increase in growth temperature, the rate of particle formation increased and particle size decreased. As-synthesized powders were amorphous with hydrocarbon impurity from partially reacted TMAl. Some γ phase was also present in as-synthesized powder grown at higher temperatures. On annealing, the amorphous phase transformed to γ phase above 1000° C and then to a phase via the θ phase above 1200° C. The a phase was associated with particle coalescence and was sized at 50–200 nm. More... »

PAGES

199-205

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/bf02834178

DOI

http://dx.doi.org/10.1007/bf02834178

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1031028409


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