Emission infrared spectroscopy for in situ analysis of the OMVPE growth surface View Full Text


Ontology type: schema:ScholarlyArticle      Open Access: True


Article Info

DATE

1992-03

AUTHORS

D. Mazzarese, K. A. Jones, W. C. Conner

ABSTRACT

Fourier transform infrared (FTIR) spectroscopy has proven to be an effective tool for the analysis of OMVPE growth. Both transmission and attenuated total reflection (ATR) provide information including identification and the relative concentrations of both reactants and products. Until recently we have only been able to apply transmission to the gas phase and ATR to in situ surface analysis. OMVPE is a heterogeneous process and ATR using a GaAs element is limited to temperatures where the sample is transparent,i.e. <400° C. Surface reactions are important to the overall process. We have recently developed a technique which effectively monitors the surface species in situ. All materials emit infrared radiation proportional toT4. Under OMVPE growth conditions (400-70° C) this emission is considerable, particularly from the surface of the emitting sample. Emission spectra correspond directly to that of absorption spectra and can easily be collected with an FTIR spectrometer. The spectra yield the same information as transmission FTIR primarily for surface species. We have used this system to monitor the adsorption and reaction of TMGa and ammonia. We have identified adsorbed ammonia and TMGa on the surface and have been able to see how these molecules change as they decompose on the surface. More... »

PAGES

329-333

References to SciGraph publications

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/bf02660462

DOI

http://dx.doi.org/10.1007/bf02660462

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1010368353


Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
Incoming Citations Browse incoming citations for this publication using opencitations.net

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0306", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Chemistry (incl. Structural)", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/03", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Chemical Sciences", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "University of Massachusetts Amherst", 
          "id": "https://www.grid.ac/institutes/grid.266683.f", 
          "name": [
            "Department of Chemical Engineering, University of Massachusetts, Amherst, MA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Mazzarese", 
        "givenName": "D.", 
        "id": "sg:person.010251334051.86", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010251334051.86"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "University of Massachusetts Amherst", 
          "id": "https://www.grid.ac/institutes/grid.266683.f", 
          "name": [
            "Department of Chemical Engineering, University of Massachusetts, Amherst, MA", 
            "Electronics Technology and Devices Laboratory, Fort Monmouth, NJ"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Jones", 
        "givenName": "K. A.", 
        "id": "sg:person.013162465751.05", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013162465751.05"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "University of Massachusetts Amherst", 
          "id": "https://www.grid.ac/institutes/grid.266683.f", 
          "name": [
            "Department of Chemical Engineering, University of Massachusetts, Amherst, MA"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Conner", 
        "givenName": "W. C.", 
        "id": "sg:person.010117635303.19", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010117635303.19"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "sg:pub.10.1007/bf01201683", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1003118506", 
          "https://doi.org/10.1007/bf01201683"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf01201683", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1003118506", 
          "https://doi.org/10.1007/bf01201683"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0022-0248(89)90090-0", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1010385859"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0022-0248(89)90090-0", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1010385859"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0022-0248(86)90287-3", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1016365795"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0022-0248(86)90287-3", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1016365795"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0146-3535(86)90029-8", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1022891984"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0146-3535(86)90029-8", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1022891984"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/s0360-0564(08)60403-4", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1027414391"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf02657985", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1030658352", 
          "https://doi.org/10.1007/bf02657985"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf02657985", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1030658352", 
          "https://doi.org/10.1007/bf02657985"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf02655343", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1034624459", 
          "https://doi.org/10.1007/bf02655343"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf02655343", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1034624459", 
          "https://doi.org/10.1007/bf02655343"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0022-0248(86)90034-5", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1035944066"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0022-0248(86)90034-5", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1035944066"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf02657995", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1037403866", 
          "https://doi.org/10.1007/bf02657995"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf02657995", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1037403866", 
          "https://doi.org/10.1007/bf02657995"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0022-2860(82)85027-8", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1047943825"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0022-0248(89)90195-4", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1051474272"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0022-0248(89)90195-4", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1051474272"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/ic00134a040", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1055544118"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/j100325a025", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1055664788"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1021/j100405a029", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1055669358"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.102675", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057650251"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1109/3.28000", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1061147519"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1366/000370272774352650", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1065259868"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1366/000370272774352650", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1065259868"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "1992-03", 
    "datePublishedReg": "1992-03-01", 
    "description": "Fourier transform infrared (FTIR) spectroscopy has proven to be an effective tool for the analysis of OMVPE growth. Both transmission and attenuated total reflection (ATR) provide information including identification and the relative concentrations of both reactants and products. Until recently we have only been able to apply transmission to the gas phase and ATR to in situ surface analysis. OMVPE is a heterogeneous process and ATR using a GaAs element is limited to temperatures where the sample is transparent,i.e. <400\u00b0 C. Surface reactions are important to the overall process. We have recently developed a technique which effectively monitors the surface species in situ. All materials emit infrared radiation proportional toT4. Under OMVPE growth conditions (400-70\u00b0 C) this emission is considerable, particularly from the surface of the emitting sample. Emission spectra correspond directly to that of absorption spectra and can easily be collected with an FTIR spectrometer. The spectra yield the same information as transmission FTIR primarily for surface species. We have used this system to monitor the adsorption and reaction of TMGa and ammonia. We have identified adsorbed ammonia and TMGa on the surface and have been able to see how these molecules change as they decompose on the surface.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1007/bf02660462", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": true, 
    "isPartOf": [
      {
        "id": "sg:journal.1136213", 
        "issn": [
          "0361-5235", 
          "1543-186X"
        ], 
        "name": "Journal of Electronic Materials", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "3", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "21"
      }
    ], 
    "name": "Emission infrared spectroscopy for in situ analysis of the OMVPE growth surface", 
    "pagination": "329-333", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "3165381046e01b4cf3370445464e98e498a33c737bf65941ae98f08fb9ead993"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/bf02660462"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1010368353"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1007/bf02660462", 
      "https://app.dimensions.ai/details/publication/pub.1010368353"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-11T13:30", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000370_0000000370/records_46754_00000000.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://link.springer.com/10.1007%2FBF02660462"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1007/bf02660462'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1007/bf02660462'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1007/bf02660462'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1007/bf02660462'


 

This table displays all metadata directly associated to this object as RDF triples.

131 TRIPLES      21 PREDICATES      44 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/bf02660462 schema:about anzsrc-for:03
2 anzsrc-for:0306
3 schema:author Nd216f3e38e324a35b009e459c9d103ba
4 schema:citation sg:pub.10.1007/bf01201683
5 sg:pub.10.1007/bf02655343
6 sg:pub.10.1007/bf02657985
7 sg:pub.10.1007/bf02657995
8 https://doi.org/10.1016/0022-0248(86)90034-5
9 https://doi.org/10.1016/0022-0248(86)90287-3
10 https://doi.org/10.1016/0022-0248(89)90090-0
11 https://doi.org/10.1016/0022-0248(89)90195-4
12 https://doi.org/10.1016/0022-2860(82)85027-8
13 https://doi.org/10.1016/0146-3535(86)90029-8
14 https://doi.org/10.1016/s0360-0564(08)60403-4
15 https://doi.org/10.1021/ic00134a040
16 https://doi.org/10.1021/j100325a025
17 https://doi.org/10.1021/j100405a029
18 https://doi.org/10.1063/1.102675
19 https://doi.org/10.1109/3.28000
20 https://doi.org/10.1366/000370272774352650
21 schema:datePublished 1992-03
22 schema:datePublishedReg 1992-03-01
23 schema:description Fourier transform infrared (FTIR) spectroscopy has proven to be an effective tool for the analysis of OMVPE growth. Both transmission and attenuated total reflection (ATR) provide information including identification and the relative concentrations of both reactants and products. Until recently we have only been able to apply transmission to the gas phase and ATR to in situ surface analysis. OMVPE is a heterogeneous process and ATR using a GaAs element is limited to temperatures where the sample is transparent,i.e. <400° C. Surface reactions are important to the overall process. We have recently developed a technique which effectively monitors the surface species in situ. All materials emit infrared radiation proportional toT4. Under OMVPE growth conditions (400-70° C) this emission is considerable, particularly from the surface of the emitting sample. Emission spectra correspond directly to that of absorption spectra and can easily be collected with an FTIR spectrometer. The spectra yield the same information as transmission FTIR primarily for surface species. We have used this system to monitor the adsorption and reaction of TMGa and ammonia. We have identified adsorbed ammonia and TMGa on the surface and have been able to see how these molecules change as they decompose on the surface.
24 schema:genre research_article
25 schema:inLanguage en
26 schema:isAccessibleForFree true
27 schema:isPartOf N44475676b8f94cd8aa2a3248e0256950
28 Nac59fe5bd3df4292b3975e26bf9d29b9
29 sg:journal.1136213
30 schema:name Emission infrared spectroscopy for in situ analysis of the OMVPE growth surface
31 schema:pagination 329-333
32 schema:productId N243b32eea15e4080b2c72b7896d3a368
33 N9d4076622c3b43f584cf2e05e6307d3a
34 Nc74b2ef77c464e1abba03e1709ba0f86
35 schema:sameAs https://app.dimensions.ai/details/publication/pub.1010368353
36 https://doi.org/10.1007/bf02660462
37 schema:sdDatePublished 2019-04-11T13:30
38 schema:sdLicense https://scigraph.springernature.com/explorer/license/
39 schema:sdPublisher N348cd62d9314420b869f1b4a69a1809f
40 schema:url http://link.springer.com/10.1007%2FBF02660462
41 sgo:license sg:explorer/license/
42 sgo:sdDataset articles
43 rdf:type schema:ScholarlyArticle
44 N140a032df6b24776913ad7067052644c rdf:first sg:person.013162465751.05
45 rdf:rest Naee733fb0ec34595afe8d5cb070b077b
46 N243b32eea15e4080b2c72b7896d3a368 schema:name readcube_id
47 schema:value 3165381046e01b4cf3370445464e98e498a33c737bf65941ae98f08fb9ead993
48 rdf:type schema:PropertyValue
49 N348cd62d9314420b869f1b4a69a1809f schema:name Springer Nature - SN SciGraph project
50 rdf:type schema:Organization
51 N44475676b8f94cd8aa2a3248e0256950 schema:volumeNumber 21
52 rdf:type schema:PublicationVolume
53 N9d4076622c3b43f584cf2e05e6307d3a schema:name dimensions_id
54 schema:value pub.1010368353
55 rdf:type schema:PropertyValue
56 Nac59fe5bd3df4292b3975e26bf9d29b9 schema:issueNumber 3
57 rdf:type schema:PublicationIssue
58 Naee733fb0ec34595afe8d5cb070b077b rdf:first sg:person.010117635303.19
59 rdf:rest rdf:nil
60 Nc74b2ef77c464e1abba03e1709ba0f86 schema:name doi
61 schema:value 10.1007/bf02660462
62 rdf:type schema:PropertyValue
63 Nd216f3e38e324a35b009e459c9d103ba rdf:first sg:person.010251334051.86
64 rdf:rest N140a032df6b24776913ad7067052644c
65 anzsrc-for:03 schema:inDefinedTermSet anzsrc-for:
66 schema:name Chemical Sciences
67 rdf:type schema:DefinedTerm
68 anzsrc-for:0306 schema:inDefinedTermSet anzsrc-for:
69 schema:name Physical Chemistry (incl. Structural)
70 rdf:type schema:DefinedTerm
71 sg:journal.1136213 schema:issn 0361-5235
72 1543-186X
73 schema:name Journal of Electronic Materials
74 rdf:type schema:Periodical
75 sg:person.010117635303.19 schema:affiliation https://www.grid.ac/institutes/grid.266683.f
76 schema:familyName Conner
77 schema:givenName W. C.
78 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010117635303.19
79 rdf:type schema:Person
80 sg:person.010251334051.86 schema:affiliation https://www.grid.ac/institutes/grid.266683.f
81 schema:familyName Mazzarese
82 schema:givenName D.
83 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010251334051.86
84 rdf:type schema:Person
85 sg:person.013162465751.05 schema:affiliation https://www.grid.ac/institutes/grid.266683.f
86 schema:familyName Jones
87 schema:givenName K. A.
88 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013162465751.05
89 rdf:type schema:Person
90 sg:pub.10.1007/bf01201683 schema:sameAs https://app.dimensions.ai/details/publication/pub.1003118506
91 https://doi.org/10.1007/bf01201683
92 rdf:type schema:CreativeWork
93 sg:pub.10.1007/bf02655343 schema:sameAs https://app.dimensions.ai/details/publication/pub.1034624459
94 https://doi.org/10.1007/bf02655343
95 rdf:type schema:CreativeWork
96 sg:pub.10.1007/bf02657985 schema:sameAs https://app.dimensions.ai/details/publication/pub.1030658352
97 https://doi.org/10.1007/bf02657985
98 rdf:type schema:CreativeWork
99 sg:pub.10.1007/bf02657995 schema:sameAs https://app.dimensions.ai/details/publication/pub.1037403866
100 https://doi.org/10.1007/bf02657995
101 rdf:type schema:CreativeWork
102 https://doi.org/10.1016/0022-0248(86)90034-5 schema:sameAs https://app.dimensions.ai/details/publication/pub.1035944066
103 rdf:type schema:CreativeWork
104 https://doi.org/10.1016/0022-0248(86)90287-3 schema:sameAs https://app.dimensions.ai/details/publication/pub.1016365795
105 rdf:type schema:CreativeWork
106 https://doi.org/10.1016/0022-0248(89)90090-0 schema:sameAs https://app.dimensions.ai/details/publication/pub.1010385859
107 rdf:type schema:CreativeWork
108 https://doi.org/10.1016/0022-0248(89)90195-4 schema:sameAs https://app.dimensions.ai/details/publication/pub.1051474272
109 rdf:type schema:CreativeWork
110 https://doi.org/10.1016/0022-2860(82)85027-8 schema:sameAs https://app.dimensions.ai/details/publication/pub.1047943825
111 rdf:type schema:CreativeWork
112 https://doi.org/10.1016/0146-3535(86)90029-8 schema:sameAs https://app.dimensions.ai/details/publication/pub.1022891984
113 rdf:type schema:CreativeWork
114 https://doi.org/10.1016/s0360-0564(08)60403-4 schema:sameAs https://app.dimensions.ai/details/publication/pub.1027414391
115 rdf:type schema:CreativeWork
116 https://doi.org/10.1021/ic00134a040 schema:sameAs https://app.dimensions.ai/details/publication/pub.1055544118
117 rdf:type schema:CreativeWork
118 https://doi.org/10.1021/j100325a025 schema:sameAs https://app.dimensions.ai/details/publication/pub.1055664788
119 rdf:type schema:CreativeWork
120 https://doi.org/10.1021/j100405a029 schema:sameAs https://app.dimensions.ai/details/publication/pub.1055669358
121 rdf:type schema:CreativeWork
122 https://doi.org/10.1063/1.102675 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057650251
123 rdf:type schema:CreativeWork
124 https://doi.org/10.1109/3.28000 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061147519
125 rdf:type schema:CreativeWork
126 https://doi.org/10.1366/000370272774352650 schema:sameAs https://app.dimensions.ai/details/publication/pub.1065259868
127 rdf:type schema:CreativeWork
128 https://www.grid.ac/institutes/grid.266683.f schema:alternateName University of Massachusetts Amherst
129 schema:name Department of Chemical Engineering, University of Massachusetts, Amherst, MA
130 Electronics Technology and Devices Laboratory, Fort Monmouth, NJ
131 rdf:type schema:Organization
 




Preview window. Press ESC to close (or click here)


...