Sodium superionic conductor sputter-deposited coatings View Full Text


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Article Info

DATE

2005-01

AUTHORS

D. Horwat, A. Billard

ABSTRACT

Thin sodium superionic conductor (Nasicon) coatings are deposited on rotating substrates by co-sputtering in the reactive mode of a Zr-Si and a Na3PO4 target. The influence of the discharge current and of the target-to-substrate distance is investigated owing to the targeted Na3Zr2Si2PO12 stoichiometry. A thermo-structural analysis shows that the amorphous as-deposited coating of convenient composition crystallises around 700 °C in the monoclinic structure. Electrical measurements performed at room temperature after various annealing treatments indicate a ionic conductivity of about 2·10−3 S·cm−1, consistent with that of bulk Nasicon. More... »

PAGES

120-125

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/bf02430410

DOI

http://dx.doi.org/10.1007/bf02430410

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1031985649


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