Electron energy distribution functions and rate and transport coefficients of H2/H/CH4 reactive plasmas for diamond film deposition View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

1996-06

AUTHORS

M. Capitelli, G. Colonna, K. Hassouni, A. Gicquel

ABSTRACT

Electron energy distribution functions (eedf) and rate and transport coefficients for H2/H/CH4 mixtures have been calculated by solving a stationary Boltzmann equation as a function of reduced electric field E/N, of molar fraction, and of different concentrations of electronically excited states. Superelastic electronic collisions superimpose structures to eedf especially for E/N values < 40 Td. More... »

PAGES

153-171

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/bf01570175

DOI

http://dx.doi.org/10.1007/bf01570175

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1027000309


Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
Incoming Citations Browse incoming citations for this publication using opencitations.net

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0202", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Atomic, Molecular, Nuclear, Particle and Plasma Physics", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/02", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Sciences", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "name": [
            "Centro di Studio per la Chimica dei Plasmi del CNR and Dipartimento di Chimica dell'Universit\u00e0 di Bari, Italy"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Capitelli", 
        "givenName": "M.", 
        "id": "sg:person.015010215053.70", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015010215053.70"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "name": [
            "Centro di Studio per la Chimica dei Plasmi del CNR and Dipartimento di Chimica dell'Universit\u00e0 di Bari, Italy"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Colonna", 
        "givenName": "G.", 
        "id": "sg:person.0717103476.46", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0717103476.46"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "name": [
            "ZLIMHP, Universit\u00e9 de Paris Nord-Villetaneuse, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Hassouni", 
        "givenName": "K.", 
        "id": "sg:person.0612236636.81", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0612236636.81"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "name": [
            "ZLIMHP, Universit\u00e9 de Paris Nord-Villetaneuse, France"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Gicquel", 
        "givenName": "A.", 
        "id": "sg:person.016367617542.14", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016367617542.14"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "sg:pub.10.1007/bf01447024", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1006286451", 
          "https://doi.org/10.1007/bf01447024"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf01447024", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1006286451", 
          "https://doi.org/10.1007/bf01447024"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0009-2614(93)85410-p", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1011013513"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0301-0104(92)80188-2", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1011681000"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1029/92je02811", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1014188324"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1088/0022-3727/22/11/017", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1016741222"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0009-2614(94)00990-2", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1017929491"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://app.dimensions.ai/details/publication/pub.1020902317", 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/978-3-642-71935-6", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1020902317", 
          "https://doi.org/10.1007/978-3-642-71935-6"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/978-3-642-71935-6", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1020902317", 
          "https://doi.org/10.1007/978-3-642-71935-6"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0301-0104(78)80035-4", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1020911009"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0925-9635(93)90138-r", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1040423444"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1016/0925-9635(93)90138-r", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1040423444"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf01447255", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1043688807", 
          "https://doi.org/10.1007/bf01447255"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "sg:pub.10.1007/bf01447255", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1043688807", 
          "https://doi.org/10.1007/bf01447255"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.342642", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057949999"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "1996-06", 
    "datePublishedReg": "1996-06-01", 
    "description": "Electron energy distribution functions (eedf) and rate and transport coefficients for H2/H/CH4 mixtures have been calculated by solving a stationary Boltzmann equation as a function of reduced electric field E/N, of molar fraction, and of different concentrations of electronically excited states. Superelastic electronic collisions superimpose structures to eedf especially for E/N values < 40 Td.", 
    "genre": "research_article", 
    "id": "sg:pub.10.1007/bf01570175", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1124016", 
        "issn": [
          "0272-4324", 
          "1572-8986"
        ], 
        "name": "Plasma Chemistry and Plasma Processing", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "2", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "16"
      }
    ], 
    "name": "Electron energy distribution functions and rate and transport coefficients of H2/H/CH4 reactive plasmas for diamond film deposition", 
    "pagination": "153-171", 
    "productId": [
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "809fb9342367caca509baf023de566eec69ac6e44f4eb049e84bb9a321717434"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/bf01570175"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1027000309"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1007/bf01570175", 
      "https://app.dimensions.ai/details/publication/pub.1027000309"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2019-04-11T13:33", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000370_0000000370/records_46766_00000001.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "http://link.springer.com/10.1007/BF01570175"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1007/bf01570175'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1007/bf01570175'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1007/bf01570175'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1007/bf01570175'


 

This table displays all metadata directly associated to this object as RDF triples.

125 TRIPLES      21 PREDICATES      39 URIs      19 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/bf01570175 schema:about anzsrc-for:02
2 anzsrc-for:0202
3 schema:author N56f3a339de834299b3dda462121118cd
4 schema:citation sg:pub.10.1007/978-3-642-71935-6
5 sg:pub.10.1007/bf01447024
6 sg:pub.10.1007/bf01447255
7 https://app.dimensions.ai/details/publication/pub.1020902317
8 https://doi.org/10.1016/0009-2614(93)85410-p
9 https://doi.org/10.1016/0009-2614(94)00990-2
10 https://doi.org/10.1016/0301-0104(78)80035-4
11 https://doi.org/10.1016/0301-0104(92)80188-2
12 https://doi.org/10.1016/0925-9635(93)90138-r
13 https://doi.org/10.1029/92je02811
14 https://doi.org/10.1063/1.342642
15 https://doi.org/10.1088/0022-3727/22/11/017
16 schema:datePublished 1996-06
17 schema:datePublishedReg 1996-06-01
18 schema:description Electron energy distribution functions (eedf) and rate and transport coefficients for H2/H/CH4 mixtures have been calculated by solving a stationary Boltzmann equation as a function of reduced electric field E/N, of molar fraction, and of different concentrations of electronically excited states. Superelastic electronic collisions superimpose structures to eedf especially for E/N values < 40 Td.
19 schema:genre research_article
20 schema:inLanguage en
21 schema:isAccessibleForFree false
22 schema:isPartOf N52a8f8224aaa4033a15ff3406eb8b960
23 N638771b286cc420d91b08108614cac87
24 sg:journal.1124016
25 schema:name Electron energy distribution functions and rate and transport coefficients of H2/H/CH4 reactive plasmas for diamond film deposition
26 schema:pagination 153-171
27 schema:productId N19528466e9f74d2284847d699e668b21
28 N464f202672574435866d5d4a813e139a
29 Ne98aacaa4ebb4cf0932c273fce66003b
30 schema:sameAs https://app.dimensions.ai/details/publication/pub.1027000309
31 https://doi.org/10.1007/bf01570175
32 schema:sdDatePublished 2019-04-11T13:33
33 schema:sdLicense https://scigraph.springernature.com/explorer/license/
34 schema:sdPublisher N7dfdaa6211914c11bc0c8eaac000a87c
35 schema:url http://link.springer.com/10.1007/BF01570175
36 sgo:license sg:explorer/license/
37 sgo:sdDataset articles
38 rdf:type schema:ScholarlyArticle
39 N01fff60141114df5b63104e894cd48e5 rdf:first sg:person.016367617542.14
40 rdf:rest rdf:nil
41 N0f9011744cbd46f7bd8dd7704b0dc0eb rdf:first sg:person.0612236636.81
42 rdf:rest N01fff60141114df5b63104e894cd48e5
43 N19528466e9f74d2284847d699e668b21 schema:name dimensions_id
44 schema:value pub.1027000309
45 rdf:type schema:PropertyValue
46 N464f202672574435866d5d4a813e139a schema:name doi
47 schema:value 10.1007/bf01570175
48 rdf:type schema:PropertyValue
49 N52a8f8224aaa4033a15ff3406eb8b960 schema:volumeNumber 16
50 rdf:type schema:PublicationVolume
51 N56f3a339de834299b3dda462121118cd rdf:first sg:person.015010215053.70
52 rdf:rest N5dad47b016a443ae904edaa00947614a
53 N5dad47b016a443ae904edaa00947614a rdf:first sg:person.0717103476.46
54 rdf:rest N0f9011744cbd46f7bd8dd7704b0dc0eb
55 N638771b286cc420d91b08108614cac87 schema:issueNumber 2
56 rdf:type schema:PublicationIssue
57 N63e052854afb4c89b4409472854098f0 schema:name Centro di Studio per la Chimica dei Plasmi del CNR and Dipartimento di Chimica dell'Università di Bari, Italy
58 rdf:type schema:Organization
59 N68f86e3c08d841289663f770a69cced8 schema:name ZLIMHP, Université de Paris Nord-Villetaneuse, France
60 rdf:type schema:Organization
61 N7dfdaa6211914c11bc0c8eaac000a87c schema:name Springer Nature - SN SciGraph project
62 rdf:type schema:Organization
63 N898493f2ebc0471bbf3c562b511036c5 schema:name ZLIMHP, Université de Paris Nord-Villetaneuse, France
64 rdf:type schema:Organization
65 N97ea71203c054a2c8fd7fa7a2db856e2 schema:name Centro di Studio per la Chimica dei Plasmi del CNR and Dipartimento di Chimica dell'Università di Bari, Italy
66 rdf:type schema:Organization
67 Ne98aacaa4ebb4cf0932c273fce66003b schema:name readcube_id
68 schema:value 809fb9342367caca509baf023de566eec69ac6e44f4eb049e84bb9a321717434
69 rdf:type schema:PropertyValue
70 anzsrc-for:02 schema:inDefinedTermSet anzsrc-for:
71 schema:name Physical Sciences
72 rdf:type schema:DefinedTerm
73 anzsrc-for:0202 schema:inDefinedTermSet anzsrc-for:
74 schema:name Atomic, Molecular, Nuclear, Particle and Plasma Physics
75 rdf:type schema:DefinedTerm
76 sg:journal.1124016 schema:issn 0272-4324
77 1572-8986
78 schema:name Plasma Chemistry and Plasma Processing
79 rdf:type schema:Periodical
80 sg:person.015010215053.70 schema:affiliation N63e052854afb4c89b4409472854098f0
81 schema:familyName Capitelli
82 schema:givenName M.
83 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015010215053.70
84 rdf:type schema:Person
85 sg:person.016367617542.14 schema:affiliation N898493f2ebc0471bbf3c562b511036c5
86 schema:familyName Gicquel
87 schema:givenName A.
88 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016367617542.14
89 rdf:type schema:Person
90 sg:person.0612236636.81 schema:affiliation N68f86e3c08d841289663f770a69cced8
91 schema:familyName Hassouni
92 schema:givenName K.
93 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0612236636.81
94 rdf:type schema:Person
95 sg:person.0717103476.46 schema:affiliation N97ea71203c054a2c8fd7fa7a2db856e2
96 schema:familyName Colonna
97 schema:givenName G.
98 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0717103476.46
99 rdf:type schema:Person
100 sg:pub.10.1007/978-3-642-71935-6 schema:sameAs https://app.dimensions.ai/details/publication/pub.1020902317
101 https://doi.org/10.1007/978-3-642-71935-6
102 rdf:type schema:CreativeWork
103 sg:pub.10.1007/bf01447024 schema:sameAs https://app.dimensions.ai/details/publication/pub.1006286451
104 https://doi.org/10.1007/bf01447024
105 rdf:type schema:CreativeWork
106 sg:pub.10.1007/bf01447255 schema:sameAs https://app.dimensions.ai/details/publication/pub.1043688807
107 https://doi.org/10.1007/bf01447255
108 rdf:type schema:CreativeWork
109 https://app.dimensions.ai/details/publication/pub.1020902317 schema:CreativeWork
110 https://doi.org/10.1016/0009-2614(93)85410-p schema:sameAs https://app.dimensions.ai/details/publication/pub.1011013513
111 rdf:type schema:CreativeWork
112 https://doi.org/10.1016/0009-2614(94)00990-2 schema:sameAs https://app.dimensions.ai/details/publication/pub.1017929491
113 rdf:type schema:CreativeWork
114 https://doi.org/10.1016/0301-0104(78)80035-4 schema:sameAs https://app.dimensions.ai/details/publication/pub.1020911009
115 rdf:type schema:CreativeWork
116 https://doi.org/10.1016/0301-0104(92)80188-2 schema:sameAs https://app.dimensions.ai/details/publication/pub.1011681000
117 rdf:type schema:CreativeWork
118 https://doi.org/10.1016/0925-9635(93)90138-r schema:sameAs https://app.dimensions.ai/details/publication/pub.1040423444
119 rdf:type schema:CreativeWork
120 https://doi.org/10.1029/92je02811 schema:sameAs https://app.dimensions.ai/details/publication/pub.1014188324
121 rdf:type schema:CreativeWork
122 https://doi.org/10.1063/1.342642 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057949999
123 rdf:type schema:CreativeWork
124 https://doi.org/10.1088/0022-3727/22/11/017 schema:sameAs https://app.dimensions.ai/details/publication/pub.1016741222
125 rdf:type schema:CreativeWork
 




Preview window. Press ESC to close (or click here)


...