Films of controlled nano size grains deposited by low-energy cluster beam View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

1993-03

AUTHORS

G. Fuchs, P. Mélinon, Y. Yan, B. Cabaud, A. Hoareau, M. Treilleux, V. Paillard

ABSTRACT

Effects of low-energy cluster beam deposition (LECBD) on the growth of thin films are presented. According to TEM results, LECBD antimony films are the result of random packing of the incident clusters. We show that the “pavement of the surface substrate” previously observed in the first stage of film growth is still a valid model for thick films. With low compactness and the high roughness which characterize LECBD films, specific applications are suggested. More... »

PAGES

249-251

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/bf01425680

DOI

http://dx.doi.org/10.1007/bf01425680

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1008987178


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