Models for implantation into multilayer targets View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

1986-11

AUTHORS

H. Ryssel, J. Lorenz, K. Hoffmann

ABSTRACT

Models for the description of implantation profiles in multilayer targets are compared. It is found that all analytical models have severe limitations if the different layers possess very different stopping powers. The best description of multilayer targets is obtained by a combination model using density scaling of the range and integration to account for mass conservation. More... »

PAGES

201-207

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/bf00616841

DOI

http://dx.doi.org/10.1007/bf00616841

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1043730821


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