Quantitative kinetic analysis of silicon nitridation View Full Text


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Article Info

DATE

1993-01-01

AUTHORS

R. G. Pigeon, A. Varma

ABSTRACT

Kinetic analysis of silicon nitridation requires intrinsic single-particle behaviour to be isolated from global or compact effects that typically manifest during the reaction-bonding process. These effects arise from the influence of adjacent particles, which modify the macropore structure as the reaction proceeds. Much of the variation in the published kinetic data can be attributed to compact effects, particle shape, and size distribution, resulting in a myriad of models being reported, each only applicable to the nitridation conditions in which the data were obtained. Our work clearly demonstrates that the intrinsic single-particle nitridation behaviour is well described by a sharp-interface model, with diffusion control (Ea = 301.5–310.0 kJmol−1) through an expanding Si3N4 product layer developing on the individual grains. For the nitridation of silicon compacts, the reaction-bonding process can be divided into three fundamental stages: (1) initial devitrification/nucleation, (2) massive nitridation, and (3) termination by further sintering, densification, and coarsening of the Si3N4 product. Factors influencing and controlling each stage are summarized. More... »

PAGES

2999-3013

References to SciGraph publications

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  • 1979-05. The influence of iron and hydrogen in the nitridation of silicon in JOURNAL OF MATERIALS SCIENCE
  • 1984-03. The effects of thermal diffusion of nitrogen gas on silicon nitridation rate in JOURNAL OF MATERIALS SCIENCE LETTERS
  • 1984-03. The role of second-component gases on the nitriding rate of a silicon compact in JOURNAL OF MATERIALS SCIENCE LETTERS
  • 1975-07. Nitridation of high-purity silicon in JOURNAL OF MATERIALS SCIENCE
  • 1991-01-01. Kinetics of α- and β-Si3N4 formation from oxide-free high-purity Si powder in JOURNAL OF MATERIALS SCIENCE
  • 1979-07. On Si nitriding kinetics and mechanisms in JOURNAL OF MATERIALS SCIENCE
  • 1976-01. The effect of silica on the nitridation of silicon in JOURNAL OF MATERIALS SCIENCE
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  • 1979-01. The influence of hydrogen in the nitriding gas on the strength, structure and composition of reaction-sintered silicon nitride in JOURNAL OF MATERIALS SCIENCE
  • 1985-05. Iron impurities in Si3N4 processing in JOURNAL OF MATERIALS SCIENCE
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  • 1979-10. Fluoride accelerated nitridation of silicon in JOURNAL OF MATERIALS SCIENCE
  • 1974-08. Effect of oxide impurities on the nitridation of high purity silicon in JOURNAL OF MATERIALS SCIENCE
  • 1976-10. The influence of hydrogen in the nitriding gas on the strength of reaction sintered silicon nitride in JOURNAL OF MATERIALS SCIENCE
  • 1986-11. Kinetics of iron-promoted silicon nitridation in JOURNAL OF MATERIALS RESEARCH
  • 1985-01. The influence of the various transport properties of the nitriding atmosphere on the formation of reaction-bonded Si3N4 in JOURNAL OF MATERIALS SCIENCE
  • 1985-01. The influence of the various transport properties of the nitriding atmosphere on the formation of reaction-bonded Si3N4 in JOURNAL OF MATERIALS SCIENCE
  • 1988-05. Production of silicon nitride by gas nitridation of ultra-fine silicon powder in JOURNAL OF MATERIALS SCIENCE
  • 1987-09. Relationships between processing, microstructure and properties of dense and reaction-bonded silicon nitride in JOURNAL OF MATERIALS SCIENCE
  • 1983-12. The effect of impurities on the densification of reaction-bonded silicon nitride (RBSN) in JOURNAL OF MATERIALS SCIENCE
  • 1979-04. The effects of hydrogen on the nitridation of silicon in JOURNAL OF MATERIALS SCIENCE
  • 1988-07. Reactions between silicon and nitrogen in JOURNAL OF MATERIALS SCIENCE
  • 1984-01. The removal of surface silica and its effect on the nitridation of high-purity silicon in JOURNAL OF MATERIALS SCIENCE
  • 1976-11. Structure, formation mechanisms and kinetics of reaction-bonded silicon nitride in JOURNAL OF MATERIALS SCIENCE
  • 1976-07. Reaction sintered silicon nitride in JOURNAL OF MATERIALS SCIENCE
  • 1979-05. Reaction-bonded silicon nitride: its formation and properties in JOURNAL OF MATERIALS SCIENCE
  • 1982-08. The combined effects of Fe and H2 on the nitridation of silicon in JOURNAL OF MATERIALS SCIENCE LETTERS
  • 1983-04. On reactions between silicon and nitrogen in JOURNAL OF MATERIALS SCIENCE
  • 1978-08. A mechanism for the nitridation of Fe-contaminated silicon in JOURNAL OF MATERIALS SCIENCE
  • 1981-07. The role of hydrogen in the nitridation of silicon powder compacts in JOURNAL OF MATERIALS SCIENCE
  • 1977-02. Effect of Fe and Al additions on nitridation of silicon in JOURNAL OF MATERIALS SCIENCE
  • 1992-01. Quantitative phase analysis of Si3N4 by X-ray diffraction in JOURNAL OF MATERIALS SCIENCE LETTERS
  • 1978-10. The combined effects of Fe and H2 on the kinetics of silicon nitridation in JOURNAL OF MATERIALS SCIENCE
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    http://scigraph.springernature.com/pub.10.1007/bf00354705

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    http://dx.doi.org/10.1007/bf00354705

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    [
      {
        "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
        "about": [
          {
            "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/03", 
            "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
            "name": "Chemical Sciences", 
            "type": "DefinedTerm"
          }, 
          {
            "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
            "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
            "name": "Engineering", 
            "type": "DefinedTerm"
          }
        ], 
        "author": [
          {
            "affiliation": {
              "alternateName": "Department of Chemical Engineering, University of Notre Dame, 46556, Notre Dame, IN, USA", 
              "id": "http://www.grid.ac/institutes/grid.131063.6", 
              "name": [
                "Department of Chemical Engineering, University of Notre Dame, 46556, Notre Dame, IN, USA"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Pigeon", 
            "givenName": "R. G.", 
            "id": "sg:person.012410004546.18", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012410004546.18"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "Department of Chemical Engineering, University of Notre Dame, 46556, Notre Dame, IN, USA", 
              "id": "http://www.grid.ac/institutes/grid.131063.6", 
              "name": [
                "Department of Chemical Engineering, University of Notre Dame, 46556, Notre Dame, IN, USA"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Varma", 
            "givenName": "A.", 
            "id": "sg:person.015311351425.35", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015311351425.35"
            ], 
            "type": "Person"
          }
        ], 
        "citation": [
          {
            "id": "sg:pub.10.1007/bf00726480", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1039099297", 
              "https://doi.org/10.1007/bf00726480"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf00540643", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1000726536", 
              "https://doi.org/10.1007/bf00540643"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf00545148", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1027465013", 
              "https://doi.org/10.1007/bf00545148"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf00551961", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1024946453", 
              "https://doi.org/10.1007/bf00551961"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf01028330", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1007454683", 
              "https://doi.org/10.1007/bf01028330"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf00561287", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1032642633", 
              "https://doi.org/10.1007/bf00561287"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf00551855", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1050412163", 
              "https://doi.org/10.1007/bf00551855"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf01111917", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1020914818", 
              "https://doi.org/10.1007/bf01111917"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf00737021", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1023106845", 
              "https://doi.org/10.1007/bf00737021"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf00555907", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1041754136", 
              "https://doi.org/10.1007/bf00555907"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf00561317", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1032103128", 
              "https://doi.org/10.1007/bf00561317"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf02403125", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1020313707", 
              "https://doi.org/10.1007/bf02403125"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/pl00020337", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1020526656", 
              "https://doi.org/10.1007/pl00020337"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf00543678", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1005884942", 
              "https://doi.org/10.1007/bf00543678"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf00726793", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1031062002", 
              "https://doi.org/10.1007/bf00726793"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1557/jmr.1986.0797", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1067901027", 
              "https://doi.org/10.1557/jmr.1986.0797"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf01161167", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1047982695", 
              "https://doi.org/10.1007/bf01161167"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf00708276", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1040739690", 
              "https://doi.org/10.1007/bf00708276"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf02385739", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1031695392", 
              "https://doi.org/10.1007/bf02385739"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf00541693", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1010576908", 
              "https://doi.org/10.1007/bf00541693"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf00540745", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1043643950", 
              "https://doi.org/10.1007/bf00540745"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf00569298", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1009551899", 
              "https://doi.org/10.1007/bf00569298"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf00566267", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1029595879", 
              "https://doi.org/10.1007/bf00566267"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf00545147", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1016207016", 
              "https://doi.org/10.1007/bf00545147"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf00541093", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1018541535", 
              "https://doi.org/10.1007/bf00541093"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf00726792", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1043962584", 
              "https://doi.org/10.1007/bf00726792"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf00555287", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1031394947", 
              "https://doi.org/10.1007/bf00555287"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf00541409", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1040221041", 
              "https://doi.org/10.1007/bf00541409"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf00726791", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1039122600", 
              "https://doi.org/10.1007/bf00726791"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf00548727", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1047803940", 
              "https://doi.org/10.1007/bf00548727"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf01115725", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1026579958", 
              "https://doi.org/10.1007/bf01115725"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf00555906", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1040746536", 
              "https://doi.org/10.1007/bf00555906"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf00550738", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1042780633", 
              "https://doi.org/10.1007/bf00550738"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/bf00729365", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1006404503", 
              "https://doi.org/10.1007/bf00729365"
            ], 
            "type": "CreativeWork"
          }
        ], 
        "datePublished": "1993-01-01", 
        "datePublishedReg": "1993-01-01", 
        "description": "Kinetic analysis of silicon nitridation requires intrinsic single-particle behaviour to be isolated from global or compact effects that typically manifest during the reaction-bonding process. These effects arise from the influence of adjacent particles, which modify the macropore structure as the reaction proceeds. Much of the variation in the published kinetic data can be attributed to compact effects, particle shape, and size distribution, resulting in a myriad of models being reported, each only applicable to the nitridation conditions in which the data were obtained. Our work clearly demonstrates that the intrinsic single-particle nitridation behaviour is well described by a sharp-interface model, with diffusion control (Ea = 301.5\u2013310.0 kJmol\u22121) through an expanding Si3N4 product layer developing on the individual grains. For the nitridation of silicon compacts, the reaction-bonding process can be divided into three fundamental stages: (1) initial devitrification/nucleation, (2) massive nitridation, and (3) termination by further sintering, densification, and coarsening of the Si3N4 product. Factors influencing and controlling each stage are summarized.", 
        "genre": "article", 
        "id": "sg:pub.10.1007/bf00354705", 
        "inLanguage": "en", 
        "isAccessibleForFree": false, 
        "isPartOf": [
          {
            "id": "sg:journal.1312116", 
            "issn": [
              "0022-2461", 
              "1573-4811"
            ], 
            "name": "Journal of Materials Science", 
            "publisher": "Springer Nature", 
            "type": "Periodical"
          }, 
          {
            "issueNumber": "11", 
            "type": "PublicationIssue"
          }, 
          {
            "type": "PublicationVolume", 
            "volumeNumber": "28"
          }
        ], 
        "keywords": [
          "reaction-bonding process", 
          "silicon nitridation", 
          "compact effect", 
          "sharp-interface model", 
          "nitridation behavior", 
          "product layer", 
          "Si3N4 products", 
          "adjacent particles", 
          "macropore structure", 
          "nitridation conditions", 
          "silicon compacts", 
          "nitridation", 
          "particle shape", 
          "single-particle behavior", 
          "size distribution", 
          "diffusion control", 
          "individual grains", 
          "sintering", 
          "densification", 
          "compacts", 
          "coarsening", 
          "kinetic data", 
          "layer", 
          "behavior", 
          "particles", 
          "nucleation", 
          "process", 
          "grains", 
          "fundamental stage", 
          "quantitative kinetic analysis", 
          "model", 
          "kinetic analysis", 
          "shape", 
          "effect", 
          "influence", 
          "structure", 
          "distribution", 
          "conditions", 
          "work", 
          "analysis", 
          "variation", 
          "myriad of models", 
          "products", 
          "control", 
          "stage", 
          "data", 
          "reaction", 
          "factors", 
          "myriad", 
          "termination", 
          "intrinsic single-particle behaviour", 
          "intrinsic single-particle nitridation behaviour", 
          "single-particle nitridation behaviour", 
          "Si3N4 product layer", 
          "initial devitrification/nucleation", 
          "devitrification/nucleation", 
          "massive nitridation"
        ], 
        "name": "Quantitative kinetic analysis of silicon nitridation", 
        "pagination": "2999-3013", 
        "productId": [
          {
            "name": "dimensions_id", 
            "type": "PropertyValue", 
            "value": [
              "pub.1042224229"
            ]
          }, 
          {
            "name": "doi", 
            "type": "PropertyValue", 
            "value": [
              "10.1007/bf00354705"
            ]
          }
        ], 
        "sameAs": [
          "https://doi.org/10.1007/bf00354705", 
          "https://app.dimensions.ai/details/publication/pub.1042224229"
        ], 
        "sdDataset": "articles", 
        "sdDatePublished": "2022-01-01T18:06", 
        "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
        "sdPublisher": {
          "name": "Springer Nature - SN SciGraph project", 
          "type": "Organization"
        }, 
        "sdSource": "s3://com-springernature-scigraph/baseset/20220101/entities/gbq_results/article/article_256.jsonl", 
        "type": "ScholarlyArticle", 
        "url": "https://doi.org/10.1007/bf00354705"
      }
    ]
     

    Download the RDF metadata as:  json-ld nt turtle xml License info

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    This table displays all metadata directly associated to this object as RDF triples.

    258 TRIPLES      22 PREDICATES      116 URIs      74 LITERALS      6 BLANK NODES

    Subject Predicate Object
    1 sg:pub.10.1007/bf00354705 schema:about anzsrc-for:03
    2 anzsrc-for:09
    3 schema:author N37a98d282ca64278bc45278f315191b6
    4 schema:citation sg:pub.10.1007/bf00540643
    5 sg:pub.10.1007/bf00540745
    6 sg:pub.10.1007/bf00541093
    7 sg:pub.10.1007/bf00541409
    8 sg:pub.10.1007/bf00541693
    9 sg:pub.10.1007/bf00543678
    10 sg:pub.10.1007/bf00545147
    11 sg:pub.10.1007/bf00545148
    12 sg:pub.10.1007/bf00548727
    13 sg:pub.10.1007/bf00550738
    14 sg:pub.10.1007/bf00551855
    15 sg:pub.10.1007/bf00551961
    16 sg:pub.10.1007/bf00555287
    17 sg:pub.10.1007/bf00555906
    18 sg:pub.10.1007/bf00555907
    19 sg:pub.10.1007/bf00561287
    20 sg:pub.10.1007/bf00561317
    21 sg:pub.10.1007/bf00566267
    22 sg:pub.10.1007/bf00569298
    23 sg:pub.10.1007/bf00708276
    24 sg:pub.10.1007/bf00726480
    25 sg:pub.10.1007/bf00726791
    26 sg:pub.10.1007/bf00726792
    27 sg:pub.10.1007/bf00726793
    28 sg:pub.10.1007/bf00729365
    29 sg:pub.10.1007/bf00737021
    30 sg:pub.10.1007/bf01028330
    31 sg:pub.10.1007/bf01111917
    32 sg:pub.10.1007/bf01115725
    33 sg:pub.10.1007/bf01161167
    34 sg:pub.10.1007/bf02385739
    35 sg:pub.10.1007/bf02403125
    36 sg:pub.10.1007/pl00020337
    37 sg:pub.10.1557/jmr.1986.0797
    38 schema:datePublished 1993-01-01
    39 schema:datePublishedReg 1993-01-01
    40 schema:description Kinetic analysis of silicon nitridation requires intrinsic single-particle behaviour to be isolated from global or compact effects that typically manifest during the reaction-bonding process. These effects arise from the influence of adjacent particles, which modify the macropore structure as the reaction proceeds. Much of the variation in the published kinetic data can be attributed to compact effects, particle shape, and size distribution, resulting in a myriad of models being reported, each only applicable to the nitridation conditions in which the data were obtained. Our work clearly demonstrates that the intrinsic single-particle nitridation behaviour is well described by a sharp-interface model, with diffusion control (Ea = 301.5–310.0 kJmol−1) through an expanding Si3N4 product layer developing on the individual grains. For the nitridation of silicon compacts, the reaction-bonding process can be divided into three fundamental stages: (1) initial devitrification/nucleation, (2) massive nitridation, and (3) termination by further sintering, densification, and coarsening of the Si3N4 product. Factors influencing and controlling each stage are summarized.
    41 schema:genre article
    42 schema:inLanguage en
    43 schema:isAccessibleForFree false
    44 schema:isPartOf N3d7bf1645ed245f68efdd23228c8af21
    45 N8305b62fe7b7468fa31cdad18830b8c2
    46 sg:journal.1312116
    47 schema:keywords Si3N4 product layer
    48 Si3N4 products
    49 adjacent particles
    50 analysis
    51 behavior
    52 coarsening
    53 compact effect
    54 compacts
    55 conditions
    56 control
    57 data
    58 densification
    59 devitrification/nucleation
    60 diffusion control
    61 distribution
    62 effect
    63 factors
    64 fundamental stage
    65 grains
    66 individual grains
    67 influence
    68 initial devitrification/nucleation
    69 intrinsic single-particle behaviour
    70 intrinsic single-particle nitridation behaviour
    71 kinetic analysis
    72 kinetic data
    73 layer
    74 macropore structure
    75 massive nitridation
    76 model
    77 myriad
    78 myriad of models
    79 nitridation
    80 nitridation behavior
    81 nitridation conditions
    82 nucleation
    83 particle shape
    84 particles
    85 process
    86 product layer
    87 products
    88 quantitative kinetic analysis
    89 reaction
    90 reaction-bonding process
    91 shape
    92 sharp-interface model
    93 silicon compacts
    94 silicon nitridation
    95 single-particle behavior
    96 single-particle nitridation behaviour
    97 sintering
    98 size distribution
    99 stage
    100 structure
    101 termination
    102 variation
    103 work
    104 schema:name Quantitative kinetic analysis of silicon nitridation
    105 schema:pagination 2999-3013
    106 schema:productId N00ef696d66b24c9e9bd0be9d42ac4782
    107 N4f2c34a5d17d44d3a677a1ef6337488f
    108 schema:sameAs https://app.dimensions.ai/details/publication/pub.1042224229
    109 https://doi.org/10.1007/bf00354705
    110 schema:sdDatePublished 2022-01-01T18:06
    111 schema:sdLicense https://scigraph.springernature.com/explorer/license/
    112 schema:sdPublisher Naacd6d4c133644e2ad9856d8ba95770a
    113 schema:url https://doi.org/10.1007/bf00354705
    114 sgo:license sg:explorer/license/
    115 sgo:sdDataset articles
    116 rdf:type schema:ScholarlyArticle
    117 N00ef696d66b24c9e9bd0be9d42ac4782 schema:name doi
    118 schema:value 10.1007/bf00354705
    119 rdf:type schema:PropertyValue
    120 N37a98d282ca64278bc45278f315191b6 rdf:first sg:person.012410004546.18
    121 rdf:rest Ne2fdf0b54e304b2d8c6161b1c744d8b3
    122 N3d7bf1645ed245f68efdd23228c8af21 schema:volumeNumber 28
    123 rdf:type schema:PublicationVolume
    124 N4f2c34a5d17d44d3a677a1ef6337488f schema:name dimensions_id
    125 schema:value pub.1042224229
    126 rdf:type schema:PropertyValue
    127 N8305b62fe7b7468fa31cdad18830b8c2 schema:issueNumber 11
    128 rdf:type schema:PublicationIssue
    129 Naacd6d4c133644e2ad9856d8ba95770a schema:name Springer Nature - SN SciGraph project
    130 rdf:type schema:Organization
    131 Ne2fdf0b54e304b2d8c6161b1c744d8b3 rdf:first sg:person.015311351425.35
    132 rdf:rest rdf:nil
    133 anzsrc-for:03 schema:inDefinedTermSet anzsrc-for:
    134 schema:name Chemical Sciences
    135 rdf:type schema:DefinedTerm
    136 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
    137 schema:name Engineering
    138 rdf:type schema:DefinedTerm
    139 sg:journal.1312116 schema:issn 0022-2461
    140 1573-4811
    141 schema:name Journal of Materials Science
    142 schema:publisher Springer Nature
    143 rdf:type schema:Periodical
    144 sg:person.012410004546.18 schema:affiliation grid-institutes:grid.131063.6
    145 schema:familyName Pigeon
    146 schema:givenName R. G.
    147 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012410004546.18
    148 rdf:type schema:Person
    149 sg:person.015311351425.35 schema:affiliation grid-institutes:grid.131063.6
    150 schema:familyName Varma
    151 schema:givenName A.
    152 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015311351425.35
    153 rdf:type schema:Person
    154 sg:pub.10.1007/bf00540643 schema:sameAs https://app.dimensions.ai/details/publication/pub.1000726536
    155 https://doi.org/10.1007/bf00540643
    156 rdf:type schema:CreativeWork
    157 sg:pub.10.1007/bf00540745 schema:sameAs https://app.dimensions.ai/details/publication/pub.1043643950
    158 https://doi.org/10.1007/bf00540745
    159 rdf:type schema:CreativeWork
    160 sg:pub.10.1007/bf00541093 schema:sameAs https://app.dimensions.ai/details/publication/pub.1018541535
    161 https://doi.org/10.1007/bf00541093
    162 rdf:type schema:CreativeWork
    163 sg:pub.10.1007/bf00541409 schema:sameAs https://app.dimensions.ai/details/publication/pub.1040221041
    164 https://doi.org/10.1007/bf00541409
    165 rdf:type schema:CreativeWork
    166 sg:pub.10.1007/bf00541693 schema:sameAs https://app.dimensions.ai/details/publication/pub.1010576908
    167 https://doi.org/10.1007/bf00541693
    168 rdf:type schema:CreativeWork
    169 sg:pub.10.1007/bf00543678 schema:sameAs https://app.dimensions.ai/details/publication/pub.1005884942
    170 https://doi.org/10.1007/bf00543678
    171 rdf:type schema:CreativeWork
    172 sg:pub.10.1007/bf00545147 schema:sameAs https://app.dimensions.ai/details/publication/pub.1016207016
    173 https://doi.org/10.1007/bf00545147
    174 rdf:type schema:CreativeWork
    175 sg:pub.10.1007/bf00545148 schema:sameAs https://app.dimensions.ai/details/publication/pub.1027465013
    176 https://doi.org/10.1007/bf00545148
    177 rdf:type schema:CreativeWork
    178 sg:pub.10.1007/bf00548727 schema:sameAs https://app.dimensions.ai/details/publication/pub.1047803940
    179 https://doi.org/10.1007/bf00548727
    180 rdf:type schema:CreativeWork
    181 sg:pub.10.1007/bf00550738 schema:sameAs https://app.dimensions.ai/details/publication/pub.1042780633
    182 https://doi.org/10.1007/bf00550738
    183 rdf:type schema:CreativeWork
    184 sg:pub.10.1007/bf00551855 schema:sameAs https://app.dimensions.ai/details/publication/pub.1050412163
    185 https://doi.org/10.1007/bf00551855
    186 rdf:type schema:CreativeWork
    187 sg:pub.10.1007/bf00551961 schema:sameAs https://app.dimensions.ai/details/publication/pub.1024946453
    188 https://doi.org/10.1007/bf00551961
    189 rdf:type schema:CreativeWork
    190 sg:pub.10.1007/bf00555287 schema:sameAs https://app.dimensions.ai/details/publication/pub.1031394947
    191 https://doi.org/10.1007/bf00555287
    192 rdf:type schema:CreativeWork
    193 sg:pub.10.1007/bf00555906 schema:sameAs https://app.dimensions.ai/details/publication/pub.1040746536
    194 https://doi.org/10.1007/bf00555906
    195 rdf:type schema:CreativeWork
    196 sg:pub.10.1007/bf00555907 schema:sameAs https://app.dimensions.ai/details/publication/pub.1041754136
    197 https://doi.org/10.1007/bf00555907
    198 rdf:type schema:CreativeWork
    199 sg:pub.10.1007/bf00561287 schema:sameAs https://app.dimensions.ai/details/publication/pub.1032642633
    200 https://doi.org/10.1007/bf00561287
    201 rdf:type schema:CreativeWork
    202 sg:pub.10.1007/bf00561317 schema:sameAs https://app.dimensions.ai/details/publication/pub.1032103128
    203 https://doi.org/10.1007/bf00561317
    204 rdf:type schema:CreativeWork
    205 sg:pub.10.1007/bf00566267 schema:sameAs https://app.dimensions.ai/details/publication/pub.1029595879
    206 https://doi.org/10.1007/bf00566267
    207 rdf:type schema:CreativeWork
    208 sg:pub.10.1007/bf00569298 schema:sameAs https://app.dimensions.ai/details/publication/pub.1009551899
    209 https://doi.org/10.1007/bf00569298
    210 rdf:type schema:CreativeWork
    211 sg:pub.10.1007/bf00708276 schema:sameAs https://app.dimensions.ai/details/publication/pub.1040739690
    212 https://doi.org/10.1007/bf00708276
    213 rdf:type schema:CreativeWork
    214 sg:pub.10.1007/bf00726480 schema:sameAs https://app.dimensions.ai/details/publication/pub.1039099297
    215 https://doi.org/10.1007/bf00726480
    216 rdf:type schema:CreativeWork
    217 sg:pub.10.1007/bf00726791 schema:sameAs https://app.dimensions.ai/details/publication/pub.1039122600
    218 https://doi.org/10.1007/bf00726791
    219 rdf:type schema:CreativeWork
    220 sg:pub.10.1007/bf00726792 schema:sameAs https://app.dimensions.ai/details/publication/pub.1043962584
    221 https://doi.org/10.1007/bf00726792
    222 rdf:type schema:CreativeWork
    223 sg:pub.10.1007/bf00726793 schema:sameAs https://app.dimensions.ai/details/publication/pub.1031062002
    224 https://doi.org/10.1007/bf00726793
    225 rdf:type schema:CreativeWork
    226 sg:pub.10.1007/bf00729365 schema:sameAs https://app.dimensions.ai/details/publication/pub.1006404503
    227 https://doi.org/10.1007/bf00729365
    228 rdf:type schema:CreativeWork
    229 sg:pub.10.1007/bf00737021 schema:sameAs https://app.dimensions.ai/details/publication/pub.1023106845
    230 https://doi.org/10.1007/bf00737021
    231 rdf:type schema:CreativeWork
    232 sg:pub.10.1007/bf01028330 schema:sameAs https://app.dimensions.ai/details/publication/pub.1007454683
    233 https://doi.org/10.1007/bf01028330
    234 rdf:type schema:CreativeWork
    235 sg:pub.10.1007/bf01111917 schema:sameAs https://app.dimensions.ai/details/publication/pub.1020914818
    236 https://doi.org/10.1007/bf01111917
    237 rdf:type schema:CreativeWork
    238 sg:pub.10.1007/bf01115725 schema:sameAs https://app.dimensions.ai/details/publication/pub.1026579958
    239 https://doi.org/10.1007/bf01115725
    240 rdf:type schema:CreativeWork
    241 sg:pub.10.1007/bf01161167 schema:sameAs https://app.dimensions.ai/details/publication/pub.1047982695
    242 https://doi.org/10.1007/bf01161167
    243 rdf:type schema:CreativeWork
    244 sg:pub.10.1007/bf02385739 schema:sameAs https://app.dimensions.ai/details/publication/pub.1031695392
    245 https://doi.org/10.1007/bf02385739
    246 rdf:type schema:CreativeWork
    247 sg:pub.10.1007/bf02403125 schema:sameAs https://app.dimensions.ai/details/publication/pub.1020313707
    248 https://doi.org/10.1007/bf02403125
    249 rdf:type schema:CreativeWork
    250 sg:pub.10.1007/pl00020337 schema:sameAs https://app.dimensions.ai/details/publication/pub.1020526656
    251 https://doi.org/10.1007/pl00020337
    252 rdf:type schema:CreativeWork
    253 sg:pub.10.1557/jmr.1986.0797 schema:sameAs https://app.dimensions.ai/details/publication/pub.1067901027
    254 https://doi.org/10.1557/jmr.1986.0797
    255 rdf:type schema:CreativeWork
    256 grid-institutes:grid.131063.6 schema:alternateName Department of Chemical Engineering, University of Notre Dame, 46556, Notre Dame, IN, USA
    257 schema:name Department of Chemical Engineering, University of Notre Dame, 46556, Notre Dame, IN, USA
    258 rdf:type schema:Organization
     




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