Deposition of refractory coatings by LCVD View Full Text


Ontology type: schema:ScholarlyArticle     


Article Info

DATE

1995-12

AUTHORS

I. Zergioti, A. Zervaki, A. Hatziapostolou, G. Haidemenopoulos, E. Hontzopoulos

ABSTRACT

TiC layers have been successfully deposited locally on tool steel specimens and real small industrial tools in order to improve their mechanical and corrosion properties. TiC films have been produced by the pyrolytic laser chemical vapour deposition technique, using a low power RF-modulated CO2 laser and a gas mixture of TiCl4/CCl4/H2/H/Ar. The surface temperature was monitored by a microcomputer-based feedback loop system that was specially developed and integrated to control the laser. SEM, EDX, XRD and TEM analysis showed that close stoichiometric TiC (fcc structure, lattice constant a=4.2Å) was deposited in the films with nanocrystalline structure. The microhardness of the coatings was in the range 2500–3200HK. Furthermore, an ArF excimer laser was used to enhance the deposition rate. More... »

PAGES

1377-1383

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/bf00326489

DOI

http://dx.doi.org/10.1007/bf00326489

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1086032357


Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
Incoming Citations Browse incoming citations for this publication using opencitations.net

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Materials Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Institute of Electronic Structure and Laser, Foundation for Research and Technology-Hellas, PO Box 1527, GR-711 10, Heraklion, Greece", 
          "id": "http://www.grid.ac/institutes/grid.511958.1", 
          "name": [
            "Institute of Electronic Structure and Laser, Foundation for Research and Technology-Hellas, PO Box 1527, GR-711 10, Heraklion, Greece"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Zergioti", 
        "givenName": "I.", 
        "id": "sg:person.01303400231.08", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01303400231.08"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Metallurgical Industrial Research and Technological Development Centre, A' Industrial area of Volos, GR-385 00, Volos, Greece", 
          "id": "http://www.grid.ac/institutes/None", 
          "name": [
            "Metallurgical Industrial Research and Technological Development Centre, A' Industrial area of Volos, GR-385 00, Volos, Greece"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Zervaki", 
        "givenName": "A.", 
        "id": "sg:person.07420163560.19", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07420163560.19"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Institute of Electronic Structure and Laser, Foundation for Research and Technology-Hellas, PO Box 1527, GR-711 10, Heraklion, Greece", 
          "id": "http://www.grid.ac/institutes/grid.511958.1", 
          "name": [
            "Institute of Electronic Structure and Laser, Foundation for Research and Technology-Hellas, PO Box 1527, GR-711 10, Heraklion, Greece"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Hatziapostolou", 
        "givenName": "A.", 
        "id": "sg:person.013401675175.05", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013401675175.05"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Department of Mechanical Engineering, University of Thessaly, GR-383 34, Volos, Greece", 
          "id": "http://www.grid.ac/institutes/grid.410558.d", 
          "name": [
            "Department of Mechanical Engineering, University of Thessaly, GR-383 34, Volos, Greece"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Haidemenopoulos", 
        "givenName": "G.", 
        "id": "sg:person.015521222033.93", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015521222033.93"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Institute of Electronic Structure and Laser, Foundation for Research and Technology-Hellas, PO Box 1527, GR-711 10, Heraklion, Greece", 
          "id": "http://www.grid.ac/institutes/grid.511958.1", 
          "name": [
            "Institute of Electronic Structure and Laser, Foundation for Research and Technology-Hellas, PO Box 1527, GR-711 10, Heraklion, Greece"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Hontzopoulos", 
        "givenName": "E.", 
        "id": "sg:person.07515657145.16", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07515657145.16"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "sg:pub.10.1007/bf02403668", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1026588325", 
          "https://doi.org/10.1007/bf02403668"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "1995-12", 
    "datePublishedReg": "1995-12-01", 
    "description": "TiC layers have been successfully deposited locally on tool steel specimens and real small industrial tools in order to improve their mechanical and corrosion properties. TiC films have been produced by the pyrolytic laser chemical vapour deposition technique, using a low power RF-modulated CO2 laser and a gas mixture of TiCl4/CCl4/H2/H/Ar. The surface temperature was monitored by a microcomputer-based feedback loop system that was specially developed and integrated to control the laser. SEM, EDX, XRD and TEM analysis showed that close stoichiometric TiC (fcc structure, lattice constant a=4.2\u00c5) was deposited in the films with nanocrystalline structure. The microhardness of the coatings was in the range 2500\u20133200HK. Furthermore, an ArF excimer laser was used to enhance the deposition rate.", 
    "genre": "article", 
    "id": "sg:pub.10.1007/bf00326489", 
    "isAccessibleForFree": false, 
    "isPartOf": [
      {
        "id": "sg:journal.1053336", 
        "issn": [
          "0306-8919", 
          "1572-817X"
        ], 
        "name": "Optical and Quantum Electronics", 
        "type": "Periodical"
      }, 
      {
        "issueNumber": "12", 
        "type": "PublicationIssue"
      }, 
      {
        "type": "PublicationVolume", 
        "volumeNumber": "27"
      }
    ], 
    "keywords": [
      "tool steel specimens", 
      "chemical vapor deposition technique", 
      "vapor deposition technique", 
      "TiC layer", 
      "corrosion properties", 
      "steel specimens", 
      "refractory coatings", 
      "TiC films", 
      "nanocrystalline structure", 
      "deposition technique", 
      "deposition rate", 
      "loop system", 
      "ArF excimer laser", 
      "gas mixture", 
      "stoichiometric TiC", 
      "industrial tools", 
      "coatings", 
      "TEM analysis", 
      "films", 
      "surface temperature", 
      "CO2 laser", 
      "excimer laser", 
      "feedback loop system", 
      "laser", 
      "microhardness", 
      "LCVD", 
      "range 2500", 
      "SEM", 
      "EDX", 
      "XRD", 
      "layer", 
      "TiC", 
      "temperature", 
      "deposition", 
      "properties", 
      "mixture", 
      "specimens", 
      "structure", 
      "technique", 
      "system", 
      "Ar", 
      "order", 
      "rate", 
      "tool", 
      "analysis"
    ], 
    "name": "Deposition of refractory coatings by LCVD", 
    "pagination": "1377-1383", 
    "productId": [
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1086032357"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/bf00326489"
        ]
      }
    ], 
    "sameAs": [
      "https://doi.org/10.1007/bf00326489", 
      "https://app.dimensions.ai/details/publication/pub.1086032357"
    ], 
    "sdDataset": "articles", 
    "sdDatePublished": "2022-11-24T20:48", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-springernature-scigraph/baseset/20221124/entities/gbq_results/article/article_280.jsonl", 
    "type": "ScholarlyArticle", 
    "url": "https://doi.org/10.1007/bf00326489"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1007/bf00326489'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1007/bf00326489'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1007/bf00326489'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1007/bf00326489'


 

This table displays all metadata directly associated to this object as RDF triples.

139 TRIPLES      21 PREDICATES      71 URIs      62 LITERALS      6 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/bf00326489 schema:about anzsrc-for:09
2 anzsrc-for:0912
3 schema:author N6e4be7ee3b55474da1f39924004e45af
4 schema:citation sg:pub.10.1007/bf02403668
5 schema:datePublished 1995-12
6 schema:datePublishedReg 1995-12-01
7 schema:description TiC layers have been successfully deposited locally on tool steel specimens and real small industrial tools in order to improve their mechanical and corrosion properties. TiC films have been produced by the pyrolytic laser chemical vapour deposition technique, using a low power RF-modulated CO2 laser and a gas mixture of TiCl4/CCl4/H2/H/Ar. The surface temperature was monitored by a microcomputer-based feedback loop system that was specially developed and integrated to control the laser. SEM, EDX, XRD and TEM analysis showed that close stoichiometric TiC (fcc structure, lattice constant a=4.2Å) was deposited in the films with nanocrystalline structure. The microhardness of the coatings was in the range 2500–3200HK. Furthermore, an ArF excimer laser was used to enhance the deposition rate.
8 schema:genre article
9 schema:isAccessibleForFree false
10 schema:isPartOf Nb628ca974dc24fbf975ce29692e7e63a
11 Nceb950128b624b9c8257d676f1f9f7f0
12 sg:journal.1053336
13 schema:keywords Ar
14 ArF excimer laser
15 CO2 laser
16 EDX
17 LCVD
18 SEM
19 TEM analysis
20 TiC
21 TiC films
22 TiC layer
23 XRD
24 analysis
25 chemical vapor deposition technique
26 coatings
27 corrosion properties
28 deposition
29 deposition rate
30 deposition technique
31 excimer laser
32 feedback loop system
33 films
34 gas mixture
35 industrial tools
36 laser
37 layer
38 loop system
39 microhardness
40 mixture
41 nanocrystalline structure
42 order
43 properties
44 range 2500
45 rate
46 refractory coatings
47 specimens
48 steel specimens
49 stoichiometric TiC
50 structure
51 surface temperature
52 system
53 technique
54 temperature
55 tool
56 tool steel specimens
57 vapor deposition technique
58 schema:name Deposition of refractory coatings by LCVD
59 schema:pagination 1377-1383
60 schema:productId Ncea2848a6400400994b878a2dfcaf993
61 Nd96e90b5552d4e988048a3bb07d22358
62 schema:sameAs https://app.dimensions.ai/details/publication/pub.1086032357
63 https://doi.org/10.1007/bf00326489
64 schema:sdDatePublished 2022-11-24T20:48
65 schema:sdLicense https://scigraph.springernature.com/explorer/license/
66 schema:sdPublisher N34303632982b40fa8bfbdb83a8102ac9
67 schema:url https://doi.org/10.1007/bf00326489
68 sgo:license sg:explorer/license/
69 sgo:sdDataset articles
70 rdf:type schema:ScholarlyArticle
71 N34303632982b40fa8bfbdb83a8102ac9 schema:name Springer Nature - SN SciGraph project
72 rdf:type schema:Organization
73 N6e4be7ee3b55474da1f39924004e45af rdf:first sg:person.01303400231.08
74 rdf:rest Nb7e518f8bf5e4046b660d5fe3417afec
75 Nb628ca974dc24fbf975ce29692e7e63a schema:volumeNumber 27
76 rdf:type schema:PublicationVolume
77 Nb7e518f8bf5e4046b660d5fe3417afec rdf:first sg:person.07420163560.19
78 rdf:rest Nf4c08fb7b7b24af194ce1974bdaa6bc6
79 Ncea2848a6400400994b878a2dfcaf993 schema:name doi
80 schema:value 10.1007/bf00326489
81 rdf:type schema:PropertyValue
82 Nceb950128b624b9c8257d676f1f9f7f0 schema:issueNumber 12
83 rdf:type schema:PublicationIssue
84 Nd96e90b5552d4e988048a3bb07d22358 schema:name dimensions_id
85 schema:value pub.1086032357
86 rdf:type schema:PropertyValue
87 Ne1f8454a902a4d598d3bcbca10818322 rdf:first sg:person.07515657145.16
88 rdf:rest rdf:nil
89 Ne77d4405714143ea96570aeed05b48fa rdf:first sg:person.015521222033.93
90 rdf:rest Ne1f8454a902a4d598d3bcbca10818322
91 Nf4c08fb7b7b24af194ce1974bdaa6bc6 rdf:first sg:person.013401675175.05
92 rdf:rest Ne77d4405714143ea96570aeed05b48fa
93 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
94 schema:name Engineering
95 rdf:type schema:DefinedTerm
96 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
97 schema:name Materials Engineering
98 rdf:type schema:DefinedTerm
99 sg:journal.1053336 schema:issn 0306-8919
100 1572-817X
101 schema:name Optical and Quantum Electronics
102 rdf:type schema:Periodical
103 sg:person.01303400231.08 schema:affiliation grid-institutes:grid.511958.1
104 schema:familyName Zergioti
105 schema:givenName I.
106 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01303400231.08
107 rdf:type schema:Person
108 sg:person.013401675175.05 schema:affiliation grid-institutes:grid.511958.1
109 schema:familyName Hatziapostolou
110 schema:givenName A.
111 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013401675175.05
112 rdf:type schema:Person
113 sg:person.015521222033.93 schema:affiliation grid-institutes:grid.410558.d
114 schema:familyName Haidemenopoulos
115 schema:givenName G.
116 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015521222033.93
117 rdf:type schema:Person
118 sg:person.07420163560.19 schema:affiliation grid-institutes:None
119 schema:familyName Zervaki
120 schema:givenName A.
121 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07420163560.19
122 rdf:type schema:Person
123 sg:person.07515657145.16 schema:affiliation grid-institutes:grid.511958.1
124 schema:familyName Hontzopoulos
125 schema:givenName E.
126 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07515657145.16
127 rdf:type schema:Person
128 sg:pub.10.1007/bf02403668 schema:sameAs https://app.dimensions.ai/details/publication/pub.1026588325
129 https://doi.org/10.1007/bf02403668
130 rdf:type schema:CreativeWork
131 grid-institutes:None schema:alternateName Metallurgical Industrial Research and Technological Development Centre, A' Industrial area of Volos, GR-385 00, Volos, Greece
132 schema:name Metallurgical Industrial Research and Technological Development Centre, A' Industrial area of Volos, GR-385 00, Volos, Greece
133 rdf:type schema:Organization
134 grid-institutes:grid.410558.d schema:alternateName Department of Mechanical Engineering, University of Thessaly, GR-383 34, Volos, Greece
135 schema:name Department of Mechanical Engineering, University of Thessaly, GR-383 34, Volos, Greece
136 rdf:type schema:Organization
137 grid-institutes:grid.511958.1 schema:alternateName Institute of Electronic Structure and Laser, Foundation for Research and Technology-Hellas, PO Box 1527, GR-711 10, Heraklion, Greece
138 schema:name Institute of Electronic Structure and Laser, Foundation for Research and Technology-Hellas, PO Box 1527, GR-711 10, Heraklion, Greece
139 rdf:type schema:Organization
 




Preview window. Press ESC to close (or click here)


...