Quantitative elastic recoil detection (ERD) View Full Text


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Article Info

DATE

1995-01

AUTHORS

A. Bergmaier, G. Dollinger, C. M. Frey, T. Faestermann

ABSTRACT

Elastic recoil detection with heavy ions is a well suited method to measure depth profiles of light and medium heavy elements in thin films. Due to known Rutherford scattering cross sections and stopping powers of ions in matter, measurements can be quantified with an accuracy of about 1%. The transformation of energy spectra to quantitative elemental depth profiles, however, is generally a non trivial task and therefore a transofrmation algorithm has been developed based on a similar one for RBS analysis and realised in the program KONZERD. The transformation procedure allows a fast conversion from raw spectra to concentration profiles for classical ERD measurements as well as for high resolution measurements with a depth resolution better than 1 nm. More... »

PAGES

582-584

References to SciGraph publications

  • 1982-04. Depth profiling by ion-beam spectrometry in APPLIED PHYSICS A
  • Identifiers

    URI

    http://scigraph.springernature.com/pub.10.1007/bf00321328

    DOI

    http://dx.doi.org/10.1007/bf00321328

    DIMENSIONS

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