Photoablation and Surface Modification of Polymers with the Excimer Laser Radiation View Full Text


Ontology type: schema:Chapter     


Chapter Info

DATE

1994

AUTHORS

Sylvain Lazare , Pascale Benet , Weiping Guan , Matthias Bolle , Stephen Mihailov

ABSTRACT

The excimer laser radiation has been used for more than ten years to study the ablation and surface modification of polymeric materials. Most of common polymers display strong absorption of the ArF and KrF radiations. The model of the moving interface describes the ablation behaviour with two coefflcients which are the ablation rate constant k and the screening coefficient ß. Both k and ß depend on polymer, wavelength and pulse duration and are determined by fitting the experimental ablation curves. The parameters have been successfully analyzed for a variety of different polymers. Correlations are found with the aromaticity of the polymer. The model of the moving interface can be used to evaluate the energy which is left on the surface after ablation, as for instance in the case of Mylar surface amorphization. Teflon AF is transparent to most of the wavelengths of the excimer laser and can not be ablated directly. Doped Teflon AF was etched at 193 nm and used for the fabrication of microlenses arrays. It has been demonstrated that these arrays can in turn be used for ablation purposes with the ArF radiation. Ablation is always accompanied with an appreciable modification of the surface target. This modification is usually restricted to the penetration depth of the radiation. For polymers the main modification is a degradation of the polymeric chains. It is also commonly observed that an important roughness develop upon accumulation of several pulses on the same surface. This roughness may sometime be periodic but its characteristic dimension is larger than one micron. It mainly depends on the microstructure of the polymeric target. Mylar polyester films irradiated with one pulse of the ArF or KrF radiations evidence a surface amorphization. The amorphous depths, measured by ellipsometry, are respectively 900 A and 1600 A for 193 nm and 248 nm. The amorphization appears with a fluence threshold which is lower than the ablation threshold. The variations of the amorphous depths with fluence are well predicted with the aid of the moving interface model. The mechanism of the amorphization can be either a thermal quenching after laser melting or a photochemical defects formation which would damage the crystallinity of the virgin film. Below the ablation threshold, we have demonstrated that submicron periodic structures appear when polymer surfaces are irradiated Periodic structures are seen after ablation of polymers having a particular microstructure like poly(ethylene terephthalate). These structures have dimensional features of the order of several microns because of the formation of a transiently fluidized layer during ablation. In a new regime of irradiation using polarized pulses of energy lower the ablation threshold periodic structures of submicron dimensions in the direction of polarization are created on various polymers. This phenomenon is due to a surface wave that is capable of interference with the incident wave and gives rise to a periodic spatial modulation of the absorbed radiation. More... »

PAGES

201-219

Book

TITLE

Excimer Lasers

ISBN

978-90-481-4395-5
978-94-015-8104-2

Author Affiliations

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/978-94-015-8104-2_14

DOI

http://dx.doi.org/10.1007/978-94-015-8104-2_14

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1039844789


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