Fibre-Optic Fabry-Perot Sensor for Vibration and Profile Measurements View Full Text


Ontology type: schema:Chapter     


Chapter Info

DATE

1995

AUTHORS

I. Paulicka , V. Sochor , J. Stulpa

ABSTRACT

In this paper we demonstrate the operation of a feedback stabilised quadrature phase-shifted extrinsic Fabry-Perot (FP) fibre-optic sensor for the remote detection of the amplitude and the relative phase of subnanometer vibrations and displacements. The surface of a measured object facing at a short distance the end of single-mode fibre, acts as a reflector, thereby creating an air gap of Fabry-Perot cavity. To provide the surface profile measurements the fibre end is vibrating laterally at a constant distance from the plane of object surface. A brief description of the device is given, and its operation is described. A resolution in the order of 10–11m for the vibration amplitude measurement was obtained. In the surface scanning regime a vertical deviations around 1 nm can be distinguished. More... »

PAGES

838-838

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/978-94-011-0035-9_58

DOI

http://dx.doi.org/10.1007/978-94-011-0035-9_58

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1015204092


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