Piezoelectric MEMS Switch View Full Text


Ontology type: schema:Chapter     


Chapter Info

DATE

2015

AUTHORS

R. G. Polcawich , J. S. Pulskamp , R. M. Proie

ABSTRACT

N/A

PAGES

1-17

References to SciGraph publications

  • 2011-01-07. Additive Processes for Piezoelectric Materials: Piezoelectric MEMS in MEMS MATERIALS AND PROCESSES HANDBOOK
  • Book

    TITLE

    Encyclopedia of Nanotechnology

    ISBN

    978-94-007-6178-0

    Identifiers

    URI

    http://scigraph.springernature.com/pub.10.1007/978-94-007-6178-0_322-2

    DOI

    http://dx.doi.org/10.1007/978-94-007-6178-0_322-2

    DIMENSIONS

    https://app.dimensions.ai/details/publication/pub.1012517939


    Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
    Incoming Citations Browse incoming citations for this publication using opencitations.net

    JSON-LD is the canonical representation for SciGraph data.

    TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

    [
      {
        "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
        "author": [
          {
            "affiliation": {
              "name": [
                "US Army Research Laboratory"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Polcawich", 
            "givenName": "R. G.", 
            "id": "sg:person.01105505275.87", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01105505275.87"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "name": [
                "US Army Research Laboratory"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Pulskamp", 
            "givenName": "J. S.", 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "name": [
                "US Army Research Laboratory"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Proie", 
            "givenName": "R. M.", 
            "id": "sg:person.015747411427.34", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015747411427.34"
            ], 
            "type": "Person"
          }
        ], 
        "citation": [
          {
            "id": "https://doi.org/10.1016/j.sna.2006.03.001", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1003312125"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/mei.2004.1367526", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1006214904"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/s0924-4247(99)00070-9", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1009392441"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1080/10584589708013004", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1012643264"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.msea.2006.11.008", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1016267572"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0960-1317/24/1/015011", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1023377950"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/978-0-387-47318-5_5", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1028320859", 
              "https://doi.org/10.1007/978-0-387-47318-5_5"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/978-0-387-47318-5_5", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1028320859", 
              "https://doi.org/10.1007/978-0-387-47318-5_5"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.microrel.2007.08.010", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1035619017"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0034-4885/61/9/002", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1036044587"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.sna.2007.10.041", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1037035952"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0960-1317/18/10/105011", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1052134283"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1063/1.1589192", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1057723366"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/22.734501", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061126007"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/23.101181", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061127715"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/58.852073", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061191832"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/jmems.2002.1007406", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061289682"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/jmems.2011.2148160", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061291030"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/jmems.2011.2179015", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061291151"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/lmwc.2005.845689", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061362022"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/mmw.2002.1004054", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061410474"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmtt.2002.806514", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061705726"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmtt.2007.910072", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061707783"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tns.2013.2282261", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061737553"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1147/rd.234.0376", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1063180825"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/memsys.2010.5442297", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1093307632"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/transducers.2011.5969633", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1093514425"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/memsys.2011.5734657", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1093548722"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/sensor.2009.5285460", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1094289332"
            ], 
            "type": "CreativeWork"
          }
        ], 
        "datePublished": "2015", 
        "datePublishedReg": "2015-01-01", 
        "editor": [
          {
            "familyName": "Bhushan", 
            "givenName": "Bharat", 
            "type": "Person"
          }
        ], 
        "genre": "chapter", 
        "id": "sg:pub.10.1007/978-94-007-6178-0_322-2", 
        "inLanguage": [
          "en"
        ], 
        "isAccessibleForFree": false, 
        "isPartOf": {
          "isbn": [
            "978-94-007-6178-0"
          ], 
          "name": "Encyclopedia of Nanotechnology", 
          "type": "Book"
        }, 
        "name": "Piezoelectric MEMS Switch", 
        "pagination": "1-17", 
        "productId": [
          {
            "name": "doi", 
            "type": "PropertyValue", 
            "value": [
              "10.1007/978-94-007-6178-0_322-2"
            ]
          }, 
          {
            "name": "readcube_id", 
            "type": "PropertyValue", 
            "value": [
              "3ba375d48b4548b9a6426f1eb82ad337ffe0464bd85fc39d06dbcb49acf38be1"
            ]
          }, 
          {
            "name": "dimensions_id", 
            "type": "PropertyValue", 
            "value": [
              "pub.1012517939"
            ]
          }
        ], 
        "publisher": {
          "location": "Dordrecht", 
          "name": "Springer Netherlands", 
          "type": "Organisation"
        }, 
        "sameAs": [
          "https://doi.org/10.1007/978-94-007-6178-0_322-2", 
          "https://app.dimensions.ai/details/publication/pub.1012517939"
        ], 
        "sdDataset": "chapters", 
        "sdDatePublished": "2019-04-15T12:30", 
        "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
        "sdPublisher": {
          "name": "Springer Nature - SN SciGraph project", 
          "type": "Organization"
        }, 
        "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8663_00000250.jsonl", 
        "type": "Chapter", 
        "url": "http://link.springer.com/10.1007/978-94-007-6178-0_322-2"
      }
    ]
     

    Download the RDF metadata as:  json-ld nt turtle xml License info

    HOW TO GET THIS DATA PROGRAMMATICALLY:

    JSON-LD is a popular format for linked data which is fully compatible with JSON.

    curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1007/978-94-007-6178-0_322-2'

    N-Triples is a line-based linked data format ideal for batch operations.

    curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1007/978-94-007-6178-0_322-2'

    Turtle is a human-readable linked data format.

    curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1007/978-94-007-6178-0_322-2'

    RDF/XML is a standard XML format for linked data.

    curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1007/978-94-007-6178-0_322-2'


     

    This table displays all metadata directly associated to this object as RDF triples.

    156 TRIPLES      21 PREDICATES      52 URIs      19 LITERALS      8 BLANK NODES

    Subject Predicate Object
    1 sg:pub.10.1007/978-94-007-6178-0_322-2 schema:author N7ee8eafad04543428dfa914e24cfd680
    2 schema:citation sg:pub.10.1007/978-0-387-47318-5_5
    3 https://doi.org/10.1016/j.microrel.2007.08.010
    4 https://doi.org/10.1016/j.msea.2006.11.008
    5 https://doi.org/10.1016/j.sna.2006.03.001
    6 https://doi.org/10.1016/j.sna.2007.10.041
    7 https://doi.org/10.1016/s0924-4247(99)00070-9
    8 https://doi.org/10.1063/1.1589192
    9 https://doi.org/10.1080/10584589708013004
    10 https://doi.org/10.1088/0034-4885/61/9/002
    11 https://doi.org/10.1088/0960-1317/18/10/105011
    12 https://doi.org/10.1088/0960-1317/24/1/015011
    13 https://doi.org/10.1109/22.734501
    14 https://doi.org/10.1109/23.101181
    15 https://doi.org/10.1109/58.852073
    16 https://doi.org/10.1109/jmems.2002.1007406
    17 https://doi.org/10.1109/jmems.2011.2148160
    18 https://doi.org/10.1109/jmems.2011.2179015
    19 https://doi.org/10.1109/lmwc.2005.845689
    20 https://doi.org/10.1109/mei.2004.1367526
    21 https://doi.org/10.1109/memsys.2010.5442297
    22 https://doi.org/10.1109/memsys.2011.5734657
    23 https://doi.org/10.1109/mmw.2002.1004054
    24 https://doi.org/10.1109/sensor.2009.5285460
    25 https://doi.org/10.1109/tmtt.2002.806514
    26 https://doi.org/10.1109/tmtt.2007.910072
    27 https://doi.org/10.1109/tns.2013.2282261
    28 https://doi.org/10.1109/transducers.2011.5969633
    29 https://doi.org/10.1147/rd.234.0376
    30 schema:datePublished 2015
    31 schema:datePublishedReg 2015-01-01
    32 schema:editor Ne25e353b1c384cb09cfc3cd2b48602c6
    33 schema:genre chapter
    34 schema:inLanguage en
    35 schema:isAccessibleForFree false
    36 schema:isPartOf N433a91a3a59f4779b3eb625336cd4231
    37 schema:name Piezoelectric MEMS Switch
    38 schema:pagination 1-17
    39 schema:productId N16ce25aaa9464473a3b41af734973d78
    40 N5f9a55cc566c41a2a9aee9a9ef785b35
    41 N96abb56cbc3041e6b540d744050f43ee
    42 schema:publisher Ne0d494b2396f45d284602a28fd178ee0
    43 schema:sameAs https://app.dimensions.ai/details/publication/pub.1012517939
    44 https://doi.org/10.1007/978-94-007-6178-0_322-2
    45 schema:sdDatePublished 2019-04-15T12:30
    46 schema:sdLicense https://scigraph.springernature.com/explorer/license/
    47 schema:sdPublisher N9024149bc45e43589a9596482a958512
    48 schema:url http://link.springer.com/10.1007/978-94-007-6178-0_322-2
    49 sgo:license sg:explorer/license/
    50 sgo:sdDataset chapters
    51 rdf:type schema:Chapter
    52 N0e7bdb8a44f14ad19c07d291dd4c764a schema:familyName Bhushan
    53 schema:givenName Bharat
    54 rdf:type schema:Person
    55 N0fd822be5777430a82cfa0bc28623c4b rdf:first sg:person.015747411427.34
    56 rdf:rest rdf:nil
    57 N16ce25aaa9464473a3b41af734973d78 schema:name doi
    58 schema:value 10.1007/978-94-007-6178-0_322-2
    59 rdf:type schema:PropertyValue
    60 N1a8baaac54f54ce1a39683e427850f58 rdf:first N8e0d479f93c4424a9a188272b50a6e33
    61 rdf:rest N0fd822be5777430a82cfa0bc28623c4b
    62 N36195ad4313f4e7a865ac05d35f3a7b5 schema:name US Army Research Laboratory
    63 rdf:type schema:Organization
    64 N433a91a3a59f4779b3eb625336cd4231 schema:isbn 978-94-007-6178-0
    65 schema:name Encyclopedia of Nanotechnology
    66 rdf:type schema:Book
    67 N5c6c35c332524b52986ebb93a6ff35b6 schema:name US Army Research Laboratory
    68 rdf:type schema:Organization
    69 N5f9a55cc566c41a2a9aee9a9ef785b35 schema:name readcube_id
    70 schema:value 3ba375d48b4548b9a6426f1eb82ad337ffe0464bd85fc39d06dbcb49acf38be1
    71 rdf:type schema:PropertyValue
    72 N7ee8eafad04543428dfa914e24cfd680 rdf:first sg:person.01105505275.87
    73 rdf:rest N1a8baaac54f54ce1a39683e427850f58
    74 N8e0d479f93c4424a9a188272b50a6e33 schema:affiliation N5c6c35c332524b52986ebb93a6ff35b6
    75 schema:familyName Pulskamp
    76 schema:givenName J. S.
    77 rdf:type schema:Person
    78 N9024149bc45e43589a9596482a958512 schema:name Springer Nature - SN SciGraph project
    79 rdf:type schema:Organization
    80 N96abb56cbc3041e6b540d744050f43ee schema:name dimensions_id
    81 schema:value pub.1012517939
    82 rdf:type schema:PropertyValue
    83 Ne0d494b2396f45d284602a28fd178ee0 schema:location Dordrecht
    84 schema:name Springer Netherlands
    85 rdf:type schema:Organisation
    86 Ne25e353b1c384cb09cfc3cd2b48602c6 rdf:first N0e7bdb8a44f14ad19c07d291dd4c764a
    87 rdf:rest rdf:nil
    88 Ne926f6a43af845c4b5918b18a5cb235b schema:name US Army Research Laboratory
    89 rdf:type schema:Organization
    90 sg:person.01105505275.87 schema:affiliation Ne926f6a43af845c4b5918b18a5cb235b
    91 schema:familyName Polcawich
    92 schema:givenName R. G.
    93 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01105505275.87
    94 rdf:type schema:Person
    95 sg:person.015747411427.34 schema:affiliation N36195ad4313f4e7a865ac05d35f3a7b5
    96 schema:familyName Proie
    97 schema:givenName R. M.
    98 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.015747411427.34
    99 rdf:type schema:Person
    100 sg:pub.10.1007/978-0-387-47318-5_5 schema:sameAs https://app.dimensions.ai/details/publication/pub.1028320859
    101 https://doi.org/10.1007/978-0-387-47318-5_5
    102 rdf:type schema:CreativeWork
    103 https://doi.org/10.1016/j.microrel.2007.08.010 schema:sameAs https://app.dimensions.ai/details/publication/pub.1035619017
    104 rdf:type schema:CreativeWork
    105 https://doi.org/10.1016/j.msea.2006.11.008 schema:sameAs https://app.dimensions.ai/details/publication/pub.1016267572
    106 rdf:type schema:CreativeWork
    107 https://doi.org/10.1016/j.sna.2006.03.001 schema:sameAs https://app.dimensions.ai/details/publication/pub.1003312125
    108 rdf:type schema:CreativeWork
    109 https://doi.org/10.1016/j.sna.2007.10.041 schema:sameAs https://app.dimensions.ai/details/publication/pub.1037035952
    110 rdf:type schema:CreativeWork
    111 https://doi.org/10.1016/s0924-4247(99)00070-9 schema:sameAs https://app.dimensions.ai/details/publication/pub.1009392441
    112 rdf:type schema:CreativeWork
    113 https://doi.org/10.1063/1.1589192 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057723366
    114 rdf:type schema:CreativeWork
    115 https://doi.org/10.1080/10584589708013004 schema:sameAs https://app.dimensions.ai/details/publication/pub.1012643264
    116 rdf:type schema:CreativeWork
    117 https://doi.org/10.1088/0034-4885/61/9/002 schema:sameAs https://app.dimensions.ai/details/publication/pub.1036044587
    118 rdf:type schema:CreativeWork
    119 https://doi.org/10.1088/0960-1317/18/10/105011 schema:sameAs https://app.dimensions.ai/details/publication/pub.1052134283
    120 rdf:type schema:CreativeWork
    121 https://doi.org/10.1088/0960-1317/24/1/015011 schema:sameAs https://app.dimensions.ai/details/publication/pub.1023377950
    122 rdf:type schema:CreativeWork
    123 https://doi.org/10.1109/22.734501 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061126007
    124 rdf:type schema:CreativeWork
    125 https://doi.org/10.1109/23.101181 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061127715
    126 rdf:type schema:CreativeWork
    127 https://doi.org/10.1109/58.852073 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061191832
    128 rdf:type schema:CreativeWork
    129 https://doi.org/10.1109/jmems.2002.1007406 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061289682
    130 rdf:type schema:CreativeWork
    131 https://doi.org/10.1109/jmems.2011.2148160 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061291030
    132 rdf:type schema:CreativeWork
    133 https://doi.org/10.1109/jmems.2011.2179015 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061291151
    134 rdf:type schema:CreativeWork
    135 https://doi.org/10.1109/lmwc.2005.845689 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061362022
    136 rdf:type schema:CreativeWork
    137 https://doi.org/10.1109/mei.2004.1367526 schema:sameAs https://app.dimensions.ai/details/publication/pub.1006214904
    138 rdf:type schema:CreativeWork
    139 https://doi.org/10.1109/memsys.2010.5442297 schema:sameAs https://app.dimensions.ai/details/publication/pub.1093307632
    140 rdf:type schema:CreativeWork
    141 https://doi.org/10.1109/memsys.2011.5734657 schema:sameAs https://app.dimensions.ai/details/publication/pub.1093548722
    142 rdf:type schema:CreativeWork
    143 https://doi.org/10.1109/mmw.2002.1004054 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061410474
    144 rdf:type schema:CreativeWork
    145 https://doi.org/10.1109/sensor.2009.5285460 schema:sameAs https://app.dimensions.ai/details/publication/pub.1094289332
    146 rdf:type schema:CreativeWork
    147 https://doi.org/10.1109/tmtt.2002.806514 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061705726
    148 rdf:type schema:CreativeWork
    149 https://doi.org/10.1109/tmtt.2007.910072 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061707783
    150 rdf:type schema:CreativeWork
    151 https://doi.org/10.1109/tns.2013.2282261 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061737553
    152 rdf:type schema:CreativeWork
    153 https://doi.org/10.1109/transducers.2011.5969633 schema:sameAs https://app.dimensions.ai/details/publication/pub.1093514425
    154 rdf:type schema:CreativeWork
    155 https://doi.org/10.1147/rd.234.0376 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063180825
    156 rdf:type schema:CreativeWork
     




    Preview window. Press ESC to close (or click here)


    ...