Technology of Cavity Fabrication for Whispering Gallery Modes Laser (m) View Full Text


Ontology type: schema:Chapter     


Chapter Info

DATE

2011-01-22

AUTHORS

E. A. Grebenshchikova , V. V. Sherstnev , N. D. Il’inskaya , S. S. Kizhayev , S. I. Troshkov , Yu. P. Yakovlev

ABSTRACT

Different wet-etching solutions based on CrO3; HClO4 and HBr for materials lattice-matched to InAs for whispering gallery modes (WGM) lasers (3–4 μm) disk cavities fabrication were studied. In the case of WGM-laser cavity – it is crucial to have vertical and smooth sidewalls, free from roughness and other irregularities. Perfect circular disk cavities with diameter from 50 to 300 μm were obtained by using HBr-based wet-etching technology. At a total cavity height reaching 30 μm, the vertical part of the sidewalls was about 10 μm. Based on the obtained disk cavities, WGM lasers are created that produce coherent radiation with a wavelength of \documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document} $$\lambda \approx (3.0\mbox{ \textendash }3.5)$$ \end{document} μm in a continuous regime at 77 K and in a pulsed regime up to 125 K. More... »

PAGES

49-58

Book

TITLE

Terahertz and Mid Infrared Radiation

ISBN

978-94-007-0768-9
978-94-007-0769-6

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/978-94-007-0769-6_7

DOI

http://dx.doi.org/10.1007/978-94-007-0769-6_7

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1036134543


Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
Incoming Citations Browse incoming citations for this publication using opencitations.net

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/02", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Sciences", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0202", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Atomic, Molecular, Nuclear, Particle and Plasma Physics", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Ioffe Physical-Technical Institute, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physical-Technical Institute, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Grebenshchikova", 
        "givenName": "E. A.", 
        "id": "sg:person.016421767753.88", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016421767753.88"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Physical-Technical Institute, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physical-Technical Institute, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Sherstnev", 
        "givenName": "V. V.", 
        "id": "sg:person.011741151327.16", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011741151327.16"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Physical-Technical Institute, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physical-Technical Institute, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Il\u2019inskaya", 
        "givenName": "N. D.", 
        "id": "sg:person.010015773715.60", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010015773715.60"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Physical-Technical Institute, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physical-Technical Institute, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Kizhayev", 
        "givenName": "S. S.", 
        "id": "sg:person.014702705523.03", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014702705523.03"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Physical-Technical Institute, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physical-Technical Institute, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Troshkov", 
        "givenName": "S. I.", 
        "id": "sg:person.01126063542.10", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01126063542.10"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Ioffe Physical-Technical Institute, 194021, St. Petersburg, Russia", 
          "id": "http://www.grid.ac/institutes/grid.423485.c", 
          "name": [
            "Ioffe Physical-Technical Institute, 194021, St. Petersburg, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Yakovlev", 
        "givenName": "Yu. P.", 
        "id": "sg:person.012771052533.51", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012771052533.51"
        ], 
        "type": "Person"
      }
    ], 
    "datePublished": "2011-01-22", 
    "datePublishedReg": "2011-01-22", 
    "description": "Different wet-etching solutions based on CrO3; HClO4 and HBr for materials lattice-matched to InAs for whispering gallery modes (WGM) lasers (3\u20134\u2009\u03bcm) disk cavities fabrication were studied. In the case of WGM-laser cavity \u2013 it is crucial to have vertical and smooth sidewalls, free from roughness and other irregularities. Perfect circular disk cavities with diameter from 50 to 300\u2009\u03bcm were obtained by using HBr-based wet-etching technology. At a total cavity height reaching 30\u2009\u03bcm, the vertical part of the sidewalls was about 10\u2009\u03bcm. Based on the obtained disk cavities, WGM lasers are created that produce coherent radiation with a wavelength of \\documentclass[12pt]{minimal}\n\t\t\t\t\\usepackage{amsmath}\n\t\t\t\t\\usepackage{wasysym}\n\t\t\t\t\\usepackage{amsfonts}\n\t\t\t\t\\usepackage{amssymb}\n\t\t\t\t\\usepackage{amsbsy}\n\t\t\t\t\\usepackage{mathrsfs}\n\t\t\t\t\\usepackage{upgreek}\n\t\t\t\t\\setlength{\\oddsidemargin}{-69pt}\n\t\t\t\t\\begin{document}\n$$\\lambda \\approx (3.0\\mbox{ \\textendash }3.5)$$\n\\end{document}\u2009\u03bcm in a continuous regime at 77\u2009K and in a pulsed regime up to 125\u2009K.", 
    "editor": [
      {
        "familyName": "Pereira", 
        "givenName": "Mauro F.", 
        "type": "Person"
      }, 
      {
        "familyName": "Shulika", 
        "givenName": "Oleksiy", 
        "type": "Person"
      }
    ], 
    "genre": "chapter", 
    "id": "sg:pub.10.1007/978-94-007-0769-6_7", 
    "inLanguage": "en", 
    "isAccessibleForFree": false, 
    "isPartOf": {
      "isbn": [
        "978-94-007-0768-9", 
        "978-94-007-0769-6"
      ], 
      "name": "Terahertz and Mid Infrared Radiation", 
      "type": "Book"
    }, 
    "keywords": [
      "disk cavity", 
      "cavity fabrication", 
      "gallery mode lasers", 
      "smooth sidewalls", 
      "cavity height", 
      "coherent radiation", 
      "WGM lasers", 
      "mode laser", 
      "fabrication", 
      "continuous regime", 
      "sidewalls", 
      "vertical part", 
      "laser", 
      "technology", 
      "InAs", 
      "cavity", 
      "wavelength", 
      "regime", 
      "materials", 
      "HBr", 
      "radiation", 
      "CrO3", 
      "height", 
      "diameter", 
      "solution", 
      "irregularities", 
      "part", 
      "HClO4", 
      "cases", 
      "Different wet-etching solutions", 
      "wet-etching solutions", 
      "gallery modes (WGM) lasers (3\u20134\u2009\u03bcm) disk cavities fabrication", 
      "modes (WGM) lasers (3\u20134\u2009\u03bcm) disk cavities fabrication", 
      "lasers (3\u20134\u2009\u03bcm) disk cavities fabrication", 
      "disk cavities fabrication", 
      "WGM-laser cavity", 
      "Perfect circular disk cavities", 
      "circular disk cavities", 
      "wet-etching technology", 
      "total cavity height"
    ], 
    "name": "Technology of Cavity Fabrication for Whispering Gallery Modes Laser (m)", 
    "pagination": "49-58", 
    "productId": [
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1036134543"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/978-94-007-0769-6_7"
        ]
      }
    ], 
    "publisher": {
      "name": "Springer Nature", 
      "type": "Organisation"
    }, 
    "sameAs": [
      "https://doi.org/10.1007/978-94-007-0769-6_7", 
      "https://app.dimensions.ai/details/publication/pub.1036134543"
    ], 
    "sdDataset": "chapters", 
    "sdDatePublished": "2021-11-01T18:52", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-springernature-scigraph/baseset/20211101/entities/gbq_results/chapter/chapter_251.jsonl", 
    "type": "Chapter", 
    "url": "https://doi.org/10.1007/978-94-007-0769-6_7"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1007/978-94-007-0769-6_7'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1007/978-94-007-0769-6_7'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1007/978-94-007-0769-6_7'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1007/978-94-007-0769-6_7'


 

This table displays all metadata directly associated to this object as RDF triples.

140 TRIPLES      23 PREDICATES      65 URIs      58 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/978-94-007-0769-6_7 schema:about anzsrc-for:02
2 anzsrc-for:0202
3 schema:author N0296ee54f8f84b9a9bdba9a484b7bcd2
4 schema:datePublished 2011-01-22
5 schema:datePublishedReg 2011-01-22
6 schema:description Different wet-etching solutions based on CrO3; HClO4 and HBr for materials lattice-matched to InAs for whispering gallery modes (WGM) lasers (3–4 μm) disk cavities fabrication were studied. In the case of WGM-laser cavity – it is crucial to have vertical and smooth sidewalls, free from roughness and other irregularities. Perfect circular disk cavities with diameter from 50 to 300 μm were obtained by using HBr-based wet-etching technology. At a total cavity height reaching 30 μm, the vertical part of the sidewalls was about 10 μm. Based on the obtained disk cavities, WGM lasers are created that produce coherent radiation with a wavelength of \documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document} $$\lambda \approx (3.0\mbox{ \textendash }3.5)$$ \end{document} μm in a continuous regime at 77 K and in a pulsed regime up to 125 K.
7 schema:editor Nb1cb26e62b04430e83c4228b3fadbf97
8 schema:genre chapter
9 schema:inLanguage en
10 schema:isAccessibleForFree false
11 schema:isPartOf Na661d87e9ba748ec9b6d43c6c027f357
12 schema:keywords CrO3
13 Different wet-etching solutions
14 HBr
15 HClO4
16 InAs
17 Perfect circular disk cavities
18 WGM lasers
19 WGM-laser cavity
20 cases
21 cavity
22 cavity fabrication
23 cavity height
24 circular disk cavities
25 coherent radiation
26 continuous regime
27 diameter
28 disk cavities fabrication
29 disk cavity
30 fabrication
31 gallery mode lasers
32 gallery modes (WGM) lasers (3–4 μm) disk cavities fabrication
33 height
34 irregularities
35 laser
36 lasers (3–4 μm) disk cavities fabrication
37 materials
38 mode laser
39 modes (WGM) lasers (3–4 μm) disk cavities fabrication
40 part
41 radiation
42 regime
43 sidewalls
44 smooth sidewalls
45 solution
46 technology
47 total cavity height
48 vertical part
49 wavelength
50 wet-etching solutions
51 wet-etching technology
52 schema:name Technology of Cavity Fabrication for Whispering Gallery Modes Laser (m)
53 schema:pagination 49-58
54 schema:productId Nca67385ee4ee4175b05587cd9f74c292
55 Nf3ac5d27321b454a8d6ea1f0f369603f
56 schema:publisher N60d490a1660048bd89b6ae8b403864e2
57 schema:sameAs https://app.dimensions.ai/details/publication/pub.1036134543
58 https://doi.org/10.1007/978-94-007-0769-6_7
59 schema:sdDatePublished 2021-11-01T18:52
60 schema:sdLicense https://scigraph.springernature.com/explorer/license/
61 schema:sdPublisher Nd1357095f29746c6aadbedfef0ef4a5b
62 schema:url https://doi.org/10.1007/978-94-007-0769-6_7
63 sgo:license sg:explorer/license/
64 sgo:sdDataset chapters
65 rdf:type schema:Chapter
66 N0296ee54f8f84b9a9bdba9a484b7bcd2 rdf:first sg:person.016421767753.88
67 rdf:rest Ne2aaa915007e466db86ed2ba817400d4
68 N20d299818544436b9fbf29789465b891 rdf:first sg:person.012771052533.51
69 rdf:rest rdf:nil
70 N2880d0efa2cf4acc9ca2dff6545fc150 rdf:first N5c3b7498081047c391b21a633a546dbf
71 rdf:rest rdf:nil
72 N42985fbc33114706809bde3040d71f75 schema:familyName Pereira
73 schema:givenName Mauro F.
74 rdf:type schema:Person
75 N5acf3530d0e541b7aaf0a311906b76fe rdf:first sg:person.014702705523.03
76 rdf:rest Nca9fe3d52a1b44ed99d9b65e4843fb2f
77 N5c3b7498081047c391b21a633a546dbf schema:familyName Shulika
78 schema:givenName Oleksiy
79 rdf:type schema:Person
80 N60d490a1660048bd89b6ae8b403864e2 schema:name Springer Nature
81 rdf:type schema:Organisation
82 Na661d87e9ba748ec9b6d43c6c027f357 schema:isbn 978-94-007-0768-9
83 978-94-007-0769-6
84 schema:name Terahertz and Mid Infrared Radiation
85 rdf:type schema:Book
86 Naa89e322e62c4529ac9b38c5b8aeceb4 rdf:first sg:person.010015773715.60
87 rdf:rest N5acf3530d0e541b7aaf0a311906b76fe
88 Nb1cb26e62b04430e83c4228b3fadbf97 rdf:first N42985fbc33114706809bde3040d71f75
89 rdf:rest N2880d0efa2cf4acc9ca2dff6545fc150
90 Nca67385ee4ee4175b05587cd9f74c292 schema:name doi
91 schema:value 10.1007/978-94-007-0769-6_7
92 rdf:type schema:PropertyValue
93 Nca9fe3d52a1b44ed99d9b65e4843fb2f rdf:first sg:person.01126063542.10
94 rdf:rest N20d299818544436b9fbf29789465b891
95 Nd1357095f29746c6aadbedfef0ef4a5b schema:name Springer Nature - SN SciGraph project
96 rdf:type schema:Organization
97 Ne2aaa915007e466db86ed2ba817400d4 rdf:first sg:person.011741151327.16
98 rdf:rest Naa89e322e62c4529ac9b38c5b8aeceb4
99 Nf3ac5d27321b454a8d6ea1f0f369603f schema:name dimensions_id
100 schema:value pub.1036134543
101 rdf:type schema:PropertyValue
102 anzsrc-for:02 schema:inDefinedTermSet anzsrc-for:
103 schema:name Physical Sciences
104 rdf:type schema:DefinedTerm
105 anzsrc-for:0202 schema:inDefinedTermSet anzsrc-for:
106 schema:name Atomic, Molecular, Nuclear, Particle and Plasma Physics
107 rdf:type schema:DefinedTerm
108 sg:person.010015773715.60 schema:affiliation grid-institutes:grid.423485.c
109 schema:familyName Il’inskaya
110 schema:givenName N. D.
111 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010015773715.60
112 rdf:type schema:Person
113 sg:person.01126063542.10 schema:affiliation grid-institutes:grid.423485.c
114 schema:familyName Troshkov
115 schema:givenName S. I.
116 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01126063542.10
117 rdf:type schema:Person
118 sg:person.011741151327.16 schema:affiliation grid-institutes:grid.423485.c
119 schema:familyName Sherstnev
120 schema:givenName V. V.
121 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011741151327.16
122 rdf:type schema:Person
123 sg:person.012771052533.51 schema:affiliation grid-institutes:grid.423485.c
124 schema:familyName Yakovlev
125 schema:givenName Yu. P.
126 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012771052533.51
127 rdf:type schema:Person
128 sg:person.014702705523.03 schema:affiliation grid-institutes:grid.423485.c
129 schema:familyName Kizhayev
130 schema:givenName S. S.
131 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014702705523.03
132 rdf:type schema:Person
133 sg:person.016421767753.88 schema:affiliation grid-institutes:grid.423485.c
134 schema:familyName Grebenshchikova
135 schema:givenName E. A.
136 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016421767753.88
137 rdf:type schema:Person
138 grid-institutes:grid.423485.c schema:alternateName Ioffe Physical-Technical Institute, 194021, St. Petersburg, Russia
139 schema:name Ioffe Physical-Technical Institute, 194021, St. Petersburg, Russia
140 rdf:type schema:Organization
 




Preview window. Press ESC to close (or click here)


...