e-Beam Lithography, EBL View Full Text


Ontology type: schema:Chapter     


Chapter Info

DATE

2012

AUTHORS

Mélanie Auffan , Catherine Santaella , Alain Thiéry , Christine Paillès , Jérôme Rose , Wafa Achouak , Antoine Thill , Armand Masion , Mark Wiesner , Jean-Yves Bottero , Florence Mouchet , Périne Landois , Floriane Bourdiol , Isabelle Fourquaux , Pascal Puech , Emmanuel Flahaut , Laury Gauthier , Malgorzata J. Rybak-Smith , Youngjun Song , Michael J. Heller , David Holmes , Benjamin L. J. Webb , Tao Sun , Theresa S. Mayer , Jeffrey S. Mayer , Christine D. Keating , Amitabha Ghosh , Ilya V. Pobelov , Chen Li , Thomas Wandlowski , Michael G. Helander , Zhibin Wang , Zheng-Hong Lu , Francesca Carpino , Larry R. Gibson , Dane A. Grismer , Paul W. Bohn , Nezih Pala , Mustafa Karabiyik , Alexandra Porter , Eva McGuire , Guoqiang Xie , Alejandro Lopez-Bezanilla , Stephan Roche , Eduardo Cruz-Silva , Bobby G. Sumpter , Vincent Meunier , Michael J. Laudenslager , Wolfgang M. Sigmund , Neal A. Hall , CJ Kim , Guoxing Wang , Robert J. Greenberg , Chimaobi Mbanaso , Gregory Denbeaux , Claire Coutris , Erik J. Joner

ABSTRACT

N/A

PAGES

623-623

Book

TITLE

Encyclopedia of Nanotechnology

ISBN

978-90-481-9750-7
978-90-481-9751-4

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/978-90-481-9751-4_100198

DOI

http://dx.doi.org/10.1007/978-90-481-9751-4_100198

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1033349138


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