Fabrication and Properties of Ultra Small Si Wire Arrays by Vapor-Liquid-Solid Growth with Circuits View Full Text


Ontology type: schema:Chapter     


Chapter Info

DATE

2001

AUTHORS

Takeshi Kawano , Yoshiko Kato , Masato Futagawa , Hidekuni Takao , Kazuaki Sawada , Makoto Ishida

ABSTRACT

Penetrating micro-Si wire probe arrays with on-chip circuits have been developed using selective Vapor-Liquid-Solid (VLS) growth method for application to multipoint recording of neural activity potentials. The Si wire probes with 160 µm in length and 3.5 µm in diameter at tip were grown at predetermined positions for growth time of 2 hours at 700 °C. Resistivity of the Si wire probe grown by Au-Si2H6 VLS was 104 Ω·cm without impurity doping process. To achieve low impedance of Si wire probes for recording of neural potential levels, phosphorous thermal diffusion to Si wire probes was carried out. After diffusion at 1100 °C, Si wire probes showed resistivity of 10−2 Ω·cm, and the value is low enough to use the Si wire probe for applications to neuroscience field. More... »

PAGES

1038-1041

Book

TITLE

Transducers ’01 Eurosensors XV

ISBN

978-3-540-42150-4
978-3-642-59497-7

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/978-3-642-59497-7_245

DOI

http://dx.doi.org/10.1007/978-3-642-59497-7_245

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1023910152


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0906", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Electrical and Electronic Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "name": [
            "Department of Electric and Electronic Engineering, Toyohashi University of Technology"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Kawano", 
        "givenName": "Takeshi", 
        "id": "sg:person.016620045721.96", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016620045721.96"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "name": [
            "Department of Electric and Electronic Engineering, Toyohashi University of Technology"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Kato", 
        "givenName": "Yoshiko", 
        "id": "sg:person.013502201475.34", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013502201475.34"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "name": [
            "Department of Electric and Electronic Engineering, Toyohashi University of Technology"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Futagawa", 
        "givenName": "Masato", 
        "id": "sg:person.011303625321.19", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011303625321.19"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "name": [
            "Department of Electric and Electronic Engineering, Toyohashi University of Technology"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Takao", 
        "givenName": "Hidekuni", 
        "id": "sg:person.01325342171.02", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01325342171.02"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "name": [
            "Department of Electric and Electronic Engineering, Toyohashi University of Technology"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Sawada", 
        "givenName": "Kazuaki", 
        "id": "sg:person.012271467225.40", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012271467225.40"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "name": [
            "Department of Electric and Electronic Engineering, Toyohashi University of Technology"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Ishida", 
        "givenName": "Makoto", 
        "id": "sg:person.011406773521.22", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011406773521.22"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1063/1.113549", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057662570"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1753975", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057814420"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2001", 
    "datePublishedReg": "2001-01-01", 
    "description": "Penetrating micro-Si wire probe arrays with on-chip circuits have been developed using selective Vapor-Liquid-Solid (VLS) growth method for application to multipoint recording of neural activity potentials. The Si wire probes with 160 \u00b5m in length and 3.5 \u00b5m in diameter at tip were grown at predetermined positions for growth time of 2 hours at 700 \u00b0C. Resistivity of the Si wire probe grown by Au-Si2H6 VLS was 104 \u03a9\u00b7cm without impurity doping process. To achieve low impedance of Si wire probes for recording of neural potential levels, phosphorous thermal diffusion to Si wire probes was carried out. After diffusion at 1100 \u00b0C, Si wire probes showed resistivity of 10\u22122 \u03a9\u00b7cm, and the value is low enough to use the Si wire probe for applications to neuroscience field.", 
    "editor": [
      {
        "familyName": "Obermeier", 
        "givenName": "Ernst", 
        "type": "Person"
      }
    ], 
    "genre": "chapter", 
    "id": "sg:pub.10.1007/978-3-642-59497-7_245", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": {
      "isbn": [
        "978-3-540-42150-4", 
        "978-3-642-59497-7"
      ], 
      "name": "Transducers \u201901 Eurosensors XV", 
      "type": "Book"
    }, 
    "name": "Fabrication and Properties of Ultra Small Si Wire Arrays by Vapor-Liquid-Solid Growth with Circuits", 
    "pagination": "1038-1041", 
    "productId": [
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/978-3-642-59497-7_245"
        ]
      }, 
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "71e8f9ca12ff6e0a5120193223ce32b9717af6322126b4ed1eefc9856a47fdf1"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1023910152"
        ]
      }
    ], 
    "publisher": {
      "location": "Berlin, Heidelberg", 
      "name": "Springer Berlin Heidelberg", 
      "type": "Organisation"
    }, 
    "sameAs": [
      "https://doi.org/10.1007/978-3-642-59497-7_245", 
      "https://app.dimensions.ai/details/publication/pub.1023910152"
    ], 
    "sdDataset": "chapters", 
    "sdDatePublished": "2019-04-15T17:13", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8678_00000258.jsonl", 
    "type": "Chapter", 
    "url": "http://link.springer.com/10.1007/978-3-642-59497-7_245"
  }
]
 

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This table displays all metadata directly associated to this object as RDF triples.

115 TRIPLES      23 PREDICATES      29 URIs      20 LITERALS      8 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/978-3-642-59497-7_245 schema:about anzsrc-for:09
2 anzsrc-for:0906
3 schema:author Ne96eba6b5b63409fb0f5e28ac132683f
4 schema:citation https://doi.org/10.1063/1.113549
5 https://doi.org/10.1063/1.1753975
6 schema:datePublished 2001
7 schema:datePublishedReg 2001-01-01
8 schema:description Penetrating micro-Si wire probe arrays with on-chip circuits have been developed using selective Vapor-Liquid-Solid (VLS) growth method for application to multipoint recording of neural activity potentials. The Si wire probes with 160 µm in length and 3.5 µm in diameter at tip were grown at predetermined positions for growth time of 2 hours at 700 °C. Resistivity of the Si wire probe grown by Au-Si2H6 VLS was 104 Ω·cm without impurity doping process. To achieve low impedance of Si wire probes for recording of neural potential levels, phosphorous thermal diffusion to Si wire probes was carried out. After diffusion at 1100 °C, Si wire probes showed resistivity of 10−2 Ω·cm, and the value is low enough to use the Si wire probe for applications to neuroscience field.
9 schema:editor N62bc9f21749248a8a4d14dd0edd122b0
10 schema:genre chapter
11 schema:inLanguage en
12 schema:isAccessibleForFree false
13 schema:isPartOf Naee34d64c38740a3ad0a5b494c272054
14 schema:name Fabrication and Properties of Ultra Small Si Wire Arrays by Vapor-Liquid-Solid Growth with Circuits
15 schema:pagination 1038-1041
16 schema:productId N7f77b86ddbb24d4d8cbe3b3b044360ea
17 N901b5fadd0ff4b3fb81b7d45ac85ae60
18 Nb6d746d17cfe43a9beec87a215aa5eda
19 schema:publisher Nd6cf0b6d52514c4db4c9b6f0f5184e34
20 schema:sameAs https://app.dimensions.ai/details/publication/pub.1023910152
21 https://doi.org/10.1007/978-3-642-59497-7_245
22 schema:sdDatePublished 2019-04-15T17:13
23 schema:sdLicense https://scigraph.springernature.com/explorer/license/
24 schema:sdPublisher Nf4d307f4ca1949338f22c53148a977ce
25 schema:url http://link.springer.com/10.1007/978-3-642-59497-7_245
26 sgo:license sg:explorer/license/
27 sgo:sdDataset chapters
28 rdf:type schema:Chapter
29 N24217c0be6ac4106bcbdf9c44d9bffab schema:familyName Obermeier
30 schema:givenName Ernst
31 rdf:type schema:Person
32 N430730b4dcaf447c93a86a37e782b8ef schema:name Department of Electric and Electronic Engineering, Toyohashi University of Technology
33 rdf:type schema:Organization
34 N4afdd7a66614470db4d769b3f187ea7b schema:name Department of Electric and Electronic Engineering, Toyohashi University of Technology
35 rdf:type schema:Organization
36 N4fce993ab7444175bc391e40c47cb9fb rdf:first sg:person.011406773521.22
37 rdf:rest rdf:nil
38 N62bc9f21749248a8a4d14dd0edd122b0 rdf:first N24217c0be6ac4106bcbdf9c44d9bffab
39 rdf:rest rdf:nil
40 N71f98c74dd0a4c70b29f9a610fcd01a8 rdf:first sg:person.013502201475.34
41 rdf:rest Na16067d6243345c5a48fd4c53a5ad6d4
42 N7f77b86ddbb24d4d8cbe3b3b044360ea schema:name readcube_id
43 schema:value 71e8f9ca12ff6e0a5120193223ce32b9717af6322126b4ed1eefc9856a47fdf1
44 rdf:type schema:PropertyValue
45 N828363cffe9c471b9f9cdcd87cc80477 schema:name Department of Electric and Electronic Engineering, Toyohashi University of Technology
46 rdf:type schema:Organization
47 N8ffc97895696460bbb252c39df076040 rdf:first sg:person.012271467225.40
48 rdf:rest N4fce993ab7444175bc391e40c47cb9fb
49 N901b5fadd0ff4b3fb81b7d45ac85ae60 schema:name dimensions_id
50 schema:value pub.1023910152
51 rdf:type schema:PropertyValue
52 Na16067d6243345c5a48fd4c53a5ad6d4 rdf:first sg:person.011303625321.19
53 rdf:rest Ncf4d443362fa4743a76750d2d73829f0
54 Naee34d64c38740a3ad0a5b494c272054 schema:isbn 978-3-540-42150-4
55 978-3-642-59497-7
56 schema:name Transducers ’01 Eurosensors XV
57 rdf:type schema:Book
58 Nb65c2394f895439693e8286e4c18fea7 schema:name Department of Electric and Electronic Engineering, Toyohashi University of Technology
59 rdf:type schema:Organization
60 Nb6d746d17cfe43a9beec87a215aa5eda schema:name doi
61 schema:value 10.1007/978-3-642-59497-7_245
62 rdf:type schema:PropertyValue
63 Ncf4d443362fa4743a76750d2d73829f0 rdf:first sg:person.01325342171.02
64 rdf:rest N8ffc97895696460bbb252c39df076040
65 Nd1704a028f0a41038011c049af8fac06 schema:name Department of Electric and Electronic Engineering, Toyohashi University of Technology
66 rdf:type schema:Organization
67 Nd6cf0b6d52514c4db4c9b6f0f5184e34 schema:location Berlin, Heidelberg
68 schema:name Springer Berlin Heidelberg
69 rdf:type schema:Organisation
70 Ne96eba6b5b63409fb0f5e28ac132683f rdf:first sg:person.016620045721.96
71 rdf:rest N71f98c74dd0a4c70b29f9a610fcd01a8
72 Nef0d9ab92e494705891b183a6f499cf8 schema:name Department of Electric and Electronic Engineering, Toyohashi University of Technology
73 rdf:type schema:Organization
74 Nf4d307f4ca1949338f22c53148a977ce schema:name Springer Nature - SN SciGraph project
75 rdf:type schema:Organization
76 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
77 schema:name Engineering
78 rdf:type schema:DefinedTerm
79 anzsrc-for:0906 schema:inDefinedTermSet anzsrc-for:
80 schema:name Electrical and Electronic Engineering
81 rdf:type schema:DefinedTerm
82 sg:person.011303625321.19 schema:affiliation N4afdd7a66614470db4d769b3f187ea7b
83 schema:familyName Futagawa
84 schema:givenName Masato
85 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011303625321.19
86 rdf:type schema:Person
87 sg:person.011406773521.22 schema:affiliation Nef0d9ab92e494705891b183a6f499cf8
88 schema:familyName Ishida
89 schema:givenName Makoto
90 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011406773521.22
91 rdf:type schema:Person
92 sg:person.012271467225.40 schema:affiliation Nd1704a028f0a41038011c049af8fac06
93 schema:familyName Sawada
94 schema:givenName Kazuaki
95 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012271467225.40
96 rdf:type schema:Person
97 sg:person.01325342171.02 schema:affiliation Nb65c2394f895439693e8286e4c18fea7
98 schema:familyName Takao
99 schema:givenName Hidekuni
100 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01325342171.02
101 rdf:type schema:Person
102 sg:person.013502201475.34 schema:affiliation N430730b4dcaf447c93a86a37e782b8ef
103 schema:familyName Kato
104 schema:givenName Yoshiko
105 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013502201475.34
106 rdf:type schema:Person
107 sg:person.016620045721.96 schema:affiliation N828363cffe9c471b9f9cdcd87cc80477
108 schema:familyName Kawano
109 schema:givenName Takeshi
110 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016620045721.96
111 rdf:type schema:Person
112 https://doi.org/10.1063/1.113549 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057662570
113 rdf:type schema:CreativeWork
114 https://doi.org/10.1063/1.1753975 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057814420
115 rdf:type schema:CreativeWork
 




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