Fabrication and Properties of Ultra Small Si Wire Arrays by Vapor-Liquid-Solid Growth with Circuits View Full Text


Ontology type: schema:Chapter     


Chapter Info

DATE

2001

AUTHORS

Takeshi Kawano , Yoshiko Kato , Masato Futagawa , Hidekuni Takao , Kazuaki Sawada , Makoto Ishida

ABSTRACT

Penetrating micro-Si wire probe arrays with on-chip circuits have been developed using selective Vapor-Liquid-Solid (VLS) growth method for application to multipoint recording of neural activity potentials. The Si wire probes with 160 µm in length and 3.5 µm in diameter at tip were grown at predetermined positions for growth time of 2 hours at 700 °C. Resistivity of the Si wire probe grown by Au-Si2H6 VLS was 104 Ω·cm without impurity doping process. To achieve low impedance of Si wire probes for recording of neural potential levels, phosphorous thermal diffusion to Si wire probes was carried out. After diffusion at 1100 °C, Si wire probes showed resistivity of 10−2 Ω·cm, and the value is low enough to use the Si wire probe for applications to neuroscience field. More... »

PAGES

1038-1041

Book

TITLE

Transducers ’01 Eurosensors XV

ISBN

978-3-540-42150-4
978-3-642-59497-7

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/978-3-642-59497-7_245

DOI

http://dx.doi.org/10.1007/978-3-642-59497-7_245

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1023910152


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0906", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Electrical and Electronic Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "name": [
            "Department of Electric and Electronic Engineering, Toyohashi University of Technology"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Kawano", 
        "givenName": "Takeshi", 
        "id": "sg:person.016620045721.96", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016620045721.96"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "name": [
            "Department of Electric and Electronic Engineering, Toyohashi University of Technology"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Kato", 
        "givenName": "Yoshiko", 
        "id": "sg:person.013502201475.34", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013502201475.34"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "name": [
            "Department of Electric and Electronic Engineering, Toyohashi University of Technology"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Futagawa", 
        "givenName": "Masato", 
        "id": "sg:person.011303625321.19", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011303625321.19"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "name": [
            "Department of Electric and Electronic Engineering, Toyohashi University of Technology"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Takao", 
        "givenName": "Hidekuni", 
        "id": "sg:person.01325342171.02", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01325342171.02"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "name": [
            "Department of Electric and Electronic Engineering, Toyohashi University of Technology"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Sawada", 
        "givenName": "Kazuaki", 
        "id": "sg:person.012271467225.40", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012271467225.40"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "name": [
            "Department of Electric and Electronic Engineering, Toyohashi University of Technology"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Ishida", 
        "givenName": "Makoto", 
        "id": "sg:person.011406773521.22", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011406773521.22"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1063/1.113549", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057662570"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1753975", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057814420"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2001", 
    "datePublishedReg": "2001-01-01", 
    "description": "Penetrating micro-Si wire probe arrays with on-chip circuits have been developed using selective Vapor-Liquid-Solid (VLS) growth method for application to multipoint recording of neural activity potentials. The Si wire probes with 160 \u00b5m in length and 3.5 \u00b5m in diameter at tip were grown at predetermined positions for growth time of 2 hours at 700 \u00b0C. Resistivity of the Si wire probe grown by Au-Si2H6 VLS was 104 \u03a9\u00b7cm without impurity doping process. To achieve low impedance of Si wire probes for recording of neural potential levels, phosphorous thermal diffusion to Si wire probes was carried out. After diffusion at 1100 \u00b0C, Si wire probes showed resistivity of 10\u22122 \u03a9\u00b7cm, and the value is low enough to use the Si wire probe for applications to neuroscience field.", 
    "editor": [
      {
        "familyName": "Obermeier", 
        "givenName": "Ernst", 
        "type": "Person"
      }
    ], 
    "genre": "chapter", 
    "id": "sg:pub.10.1007/978-3-642-59497-7_245", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": {
      "isbn": [
        "978-3-540-42150-4", 
        "978-3-642-59497-7"
      ], 
      "name": "Transducers \u201901 Eurosensors XV", 
      "type": "Book"
    }, 
    "name": "Fabrication and Properties of Ultra Small Si Wire Arrays by Vapor-Liquid-Solid Growth with Circuits", 
    "pagination": "1038-1041", 
    "productId": [
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/978-3-642-59497-7_245"
        ]
      }, 
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "71e8f9ca12ff6e0a5120193223ce32b9717af6322126b4ed1eefc9856a47fdf1"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1023910152"
        ]
      }
    ], 
    "publisher": {
      "location": "Berlin, Heidelberg", 
      "name": "Springer Berlin Heidelberg", 
      "type": "Organisation"
    }, 
    "sameAs": [
      "https://doi.org/10.1007/978-3-642-59497-7_245", 
      "https://app.dimensions.ai/details/publication/pub.1023910152"
    ], 
    "sdDataset": "chapters", 
    "sdDatePublished": "2019-04-15T17:13", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8678_00000258.jsonl", 
    "type": "Chapter", 
    "url": "http://link.springer.com/10.1007/978-3-642-59497-7_245"
  }
]
 

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This table displays all metadata directly associated to this object as RDF triples.

115 TRIPLES      23 PREDICATES      29 URIs      20 LITERALS      8 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/978-3-642-59497-7_245 schema:about anzsrc-for:09
2 anzsrc-for:0906
3 schema:author N69a9e55a384c445f88c0702226bdb877
4 schema:citation https://doi.org/10.1063/1.113549
5 https://doi.org/10.1063/1.1753975
6 schema:datePublished 2001
7 schema:datePublishedReg 2001-01-01
8 schema:description Penetrating micro-Si wire probe arrays with on-chip circuits have been developed using selective Vapor-Liquid-Solid (VLS) growth method for application to multipoint recording of neural activity potentials. The Si wire probes with 160 µm in length and 3.5 µm in diameter at tip were grown at predetermined positions for growth time of 2 hours at 700 °C. Resistivity of the Si wire probe grown by Au-Si2H6 VLS was 104 Ω·cm without impurity doping process. To achieve low impedance of Si wire probes for recording of neural potential levels, phosphorous thermal diffusion to Si wire probes was carried out. After diffusion at 1100 °C, Si wire probes showed resistivity of 10−2 Ω·cm, and the value is low enough to use the Si wire probe for applications to neuroscience field.
9 schema:editor N95cddf8f1ce54410bcc3b6fd4be49cfb
10 schema:genre chapter
11 schema:inLanguage en
12 schema:isAccessibleForFree false
13 schema:isPartOf Ndd92e2f6c4da436180a6e5cc731d7b90
14 schema:name Fabrication and Properties of Ultra Small Si Wire Arrays by Vapor-Liquid-Solid Growth with Circuits
15 schema:pagination 1038-1041
16 schema:productId N589b965b93624d60af996db0b7863dda
17 Ne5dbde05221544518ceef006c479e67f
18 Nfa19a1a2b9a4440eb3de9666b46ec808
19 schema:publisher N6ac99cff2cea40b6bbdf38a566667c2b
20 schema:sameAs https://app.dimensions.ai/details/publication/pub.1023910152
21 https://doi.org/10.1007/978-3-642-59497-7_245
22 schema:sdDatePublished 2019-04-15T17:13
23 schema:sdLicense https://scigraph.springernature.com/explorer/license/
24 schema:sdPublisher Nf7c43acc028a4b5cb539f104678a2651
25 schema:url http://link.springer.com/10.1007/978-3-642-59497-7_245
26 sgo:license sg:explorer/license/
27 sgo:sdDataset chapters
28 rdf:type schema:Chapter
29 N0710157cfc82440cad9094ebd6b1b82f schema:name Department of Electric and Electronic Engineering, Toyohashi University of Technology
30 rdf:type schema:Organization
31 N25b38dd1357c43ac8aa1b07e7bbf93f8 schema:name Department of Electric and Electronic Engineering, Toyohashi University of Technology
32 rdf:type schema:Organization
33 N52650dce950d47b7918fafc0141d733f schema:name Department of Electric and Electronic Engineering, Toyohashi University of Technology
34 rdf:type schema:Organization
35 N589b965b93624d60af996db0b7863dda schema:name readcube_id
36 schema:value 71e8f9ca12ff6e0a5120193223ce32b9717af6322126b4ed1eefc9856a47fdf1
37 rdf:type schema:PropertyValue
38 N62ae392cad124f1cbca99746aa838dfa schema:name Department of Electric and Electronic Engineering, Toyohashi University of Technology
39 rdf:type schema:Organization
40 N69a9e55a384c445f88c0702226bdb877 rdf:first sg:person.016620045721.96
41 rdf:rest Nd4e4836f131145469fbfd71117b4c2b8
42 N6ab6cee83ac740b1a849d14929631afd schema:name Department of Electric and Electronic Engineering, Toyohashi University of Technology
43 rdf:type schema:Organization
44 N6ac99cff2cea40b6bbdf38a566667c2b schema:location Berlin, Heidelberg
45 schema:name Springer Berlin Heidelberg
46 rdf:type schema:Organisation
47 N6d6cc1409b5345fdb609fe016796223c rdf:first sg:person.012271467225.40
48 rdf:rest Na45dcbef162547ec8fc30955c6f2996c
49 N81723e2e5bfe4e428214f560fc9a27d2 rdf:first sg:person.01325342171.02
50 rdf:rest N6d6cc1409b5345fdb609fe016796223c
51 N95cddf8f1ce54410bcc3b6fd4be49cfb rdf:first Nec58ddea65c448f8af8bae83af38b3b1
52 rdf:rest rdf:nil
53 Na45dcbef162547ec8fc30955c6f2996c rdf:first sg:person.011406773521.22
54 rdf:rest rdf:nil
55 Nc191b0c5436d4f68bfc44c0805e8edac rdf:first sg:person.011303625321.19
56 rdf:rest N81723e2e5bfe4e428214f560fc9a27d2
57 Nd4e4836f131145469fbfd71117b4c2b8 rdf:first sg:person.013502201475.34
58 rdf:rest Nc191b0c5436d4f68bfc44c0805e8edac
59 Ndd92e2f6c4da436180a6e5cc731d7b90 schema:isbn 978-3-540-42150-4
60 978-3-642-59497-7
61 schema:name Transducers ’01 Eurosensors XV
62 rdf:type schema:Book
63 Ne5dbde05221544518ceef006c479e67f schema:name doi
64 schema:value 10.1007/978-3-642-59497-7_245
65 rdf:type schema:PropertyValue
66 Ne988067fcc1d46a49eb0da38a03e2386 schema:name Department of Electric and Electronic Engineering, Toyohashi University of Technology
67 rdf:type schema:Organization
68 Nec58ddea65c448f8af8bae83af38b3b1 schema:familyName Obermeier
69 schema:givenName Ernst
70 rdf:type schema:Person
71 Nf7c43acc028a4b5cb539f104678a2651 schema:name Springer Nature - SN SciGraph project
72 rdf:type schema:Organization
73 Nfa19a1a2b9a4440eb3de9666b46ec808 schema:name dimensions_id
74 schema:value pub.1023910152
75 rdf:type schema:PropertyValue
76 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
77 schema:name Engineering
78 rdf:type schema:DefinedTerm
79 anzsrc-for:0906 schema:inDefinedTermSet anzsrc-for:
80 schema:name Electrical and Electronic Engineering
81 rdf:type schema:DefinedTerm
82 sg:person.011303625321.19 schema:affiliation N52650dce950d47b7918fafc0141d733f
83 schema:familyName Futagawa
84 schema:givenName Masato
85 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011303625321.19
86 rdf:type schema:Person
87 sg:person.011406773521.22 schema:affiliation N25b38dd1357c43ac8aa1b07e7bbf93f8
88 schema:familyName Ishida
89 schema:givenName Makoto
90 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011406773521.22
91 rdf:type schema:Person
92 sg:person.012271467225.40 schema:affiliation N0710157cfc82440cad9094ebd6b1b82f
93 schema:familyName Sawada
94 schema:givenName Kazuaki
95 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012271467225.40
96 rdf:type schema:Person
97 sg:person.01325342171.02 schema:affiliation Ne988067fcc1d46a49eb0da38a03e2386
98 schema:familyName Takao
99 schema:givenName Hidekuni
100 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01325342171.02
101 rdf:type schema:Person
102 sg:person.013502201475.34 schema:affiliation N62ae392cad124f1cbca99746aa838dfa
103 schema:familyName Kato
104 schema:givenName Yoshiko
105 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013502201475.34
106 rdf:type schema:Person
107 sg:person.016620045721.96 schema:affiliation N6ab6cee83ac740b1a849d14929631afd
108 schema:familyName Kawano
109 schema:givenName Takeshi
110 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016620045721.96
111 rdf:type schema:Person
112 https://doi.org/10.1063/1.113549 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057662570
113 rdf:type schema:CreativeWork
114 https://doi.org/10.1063/1.1753975 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057814420
115 rdf:type schema:CreativeWork
 




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