A Pneumatically-Actuated Silicon Microvalve and its Application to Functional Fluidic Integrated Circuits View Full Text


Ontology type: schema:Chapter     


Chapter Info

DATE

2001

AUTHORS

Hidekuni Takao , Makoto Ishida , Kazuaki Sawada

ABSTRACT

In this paper, a pneumatically-actuated in-channel silicon microvalve applicable to micro fluidic systems, and its novel application to functional fluidic integrated circuits are presented. This microvalve works as transistor like device in fluidic integrated circuits by means of its pneumatic inlet port connected to a front-side fluid channel. Fabricated microvalves showed good performance for fluid flow control. The “pressure inverter amplifier” was also fabricated as an example of fluidic integrated circuit using this microvalve. The measured pressure gain of the amplifier reached about 40. Many kinds of functional fluidic circuits can be realized with the new concept presented in this article. More... »

PAGES

918-921

References to SciGraph publications

  • 1998-11-09. Fluids for Sensor Systems in MICROSYSTEM TECHNOLOGY IN CHEMISTRY AND LIFE SCIENCE
  • Book

    TITLE

    Transducers ’01 Eurosensors XV

    ISBN

    978-3-540-42150-4
    978-3-642-59497-7

    Identifiers

    URI

    http://scigraph.springernature.com/pub.10.1007/978-3-642-59497-7_217

    DOI

    http://dx.doi.org/10.1007/978-3-642-59497-7_217

    DIMENSIONS

    https://app.dimensions.ai/details/publication/pub.1038556552


    Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
    Incoming Citations Browse incoming citations for this publication using opencitations.net

    JSON-LD is the canonical representation for SciGraph data.

    TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

    [
      {
        "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
        "about": [
          {
            "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0915", 
            "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
            "name": "Interdisciplinary Engineering", 
            "type": "DefinedTerm"
          }, 
          {
            "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
            "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
            "name": "Engineering", 
            "type": "DefinedTerm"
          }
        ], 
        "author": [
          {
            "affiliation": {
              "alternateName": "Toyohashi University of Technology", 
              "id": "https://www.grid.ac/institutes/grid.412804.b", 
              "name": [
                "Department of Electrical and Electronic Engineering, Toyohashi University of Technology"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Takao", 
            "givenName": "Hidekuni", 
            "id": "sg:person.01325342171.02", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01325342171.02"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "Toyohashi University of Technology", 
              "id": "https://www.grid.ac/institutes/grid.412804.b", 
              "name": [
                "Department of Electrical and Electronic Engineering, Toyohashi University of Technology"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Ishida", 
            "givenName": "Makoto", 
            "id": "sg:person.011406773521.22", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011406773521.22"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "Toyohashi University of Technology", 
              "id": "https://www.grid.ac/institutes/grid.412804.b", 
              "name": [
                "Department of Electrical and Electronic Engineering, Toyohashi University of Technology"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Sawada", 
            "givenName": "Kazuaki", 
            "id": "sg:person.012271467225.40", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012271467225.40"
            ], 
            "type": "Person"
          }
        ], 
        "citation": [
          {
            "id": "sg:pub.10.1007/3-540-69544-3_7", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1012215321", 
              "https://doi.org/10.1007/3-540-69544-3_7"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/3-540-69544-3_7", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1012215321", 
              "https://doi.org/10.1007/3-540-69544-3_7"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/s0924-4247(98)80058-7", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1053022212"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/84.735347", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061240655"
            ], 
            "type": "CreativeWork"
          }
        ], 
        "datePublished": "2001", 
        "datePublishedReg": "2001-01-01", 
        "description": "In this paper, a pneumatically-actuated in-channel silicon microvalve applicable to micro fluidic systems, and its novel application to functional fluidic integrated circuits are presented. This microvalve works as transistor like device in fluidic integrated circuits by means of its pneumatic inlet port connected to a front-side fluid channel. Fabricated microvalves showed good performance for fluid flow control. The \u201cpressure inverter amplifier\u201d was also fabricated as an example of fluidic integrated circuit using this microvalve. The measured pressure gain of the amplifier reached about 40. Many kinds of functional fluidic circuits can be realized with the new concept presented in this article.", 
        "editor": [
          {
            "familyName": "Obermeier", 
            "givenName": "Ernst", 
            "type": "Person"
          }
        ], 
        "genre": "chapter", 
        "id": "sg:pub.10.1007/978-3-642-59497-7_217", 
        "inLanguage": [
          "en"
        ], 
        "isAccessibleForFree": false, 
        "isPartOf": {
          "isbn": [
            "978-3-540-42150-4", 
            "978-3-642-59497-7"
          ], 
          "name": "Transducers \u201901 Eurosensors XV", 
          "type": "Book"
        }, 
        "name": "A Pneumatically-Actuated Silicon Microvalve and its Application to Functional Fluidic Integrated Circuits", 
        "pagination": "918-921", 
        "productId": [
          {
            "name": "doi", 
            "type": "PropertyValue", 
            "value": [
              "10.1007/978-3-642-59497-7_217"
            ]
          }, 
          {
            "name": "readcube_id", 
            "type": "PropertyValue", 
            "value": [
              "b7ab01634a3b250a08fa997c38129bce8ef6482882135a44ceb0dcb14197a9ca"
            ]
          }, 
          {
            "name": "dimensions_id", 
            "type": "PropertyValue", 
            "value": [
              "pub.1038556552"
            ]
          }
        ], 
        "publisher": {
          "location": "Berlin, Heidelberg", 
          "name": "Springer Berlin Heidelberg", 
          "type": "Organisation"
        }, 
        "sameAs": [
          "https://doi.org/10.1007/978-3-642-59497-7_217", 
          "https://app.dimensions.ai/details/publication/pub.1038556552"
        ], 
        "sdDataset": "chapters", 
        "sdDatePublished": "2019-04-15T16:18", 
        "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
        "sdPublisher": {
          "name": "Springer Nature - SN SciGraph project", 
          "type": "Organization"
        }, 
        "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8675_00000267.jsonl", 
        "type": "Chapter", 
        "url": "http://link.springer.com/10.1007/978-3-642-59497-7_217"
      }
    ]
     

    Download the RDF metadata as:  json-ld nt turtle xml License info

    HOW TO GET THIS DATA PROGRAMMATICALLY:

    JSON-LD is a popular format for linked data which is fully compatible with JSON.

    curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1007/978-3-642-59497-7_217'

    N-Triples is a line-based linked data format ideal for batch operations.

    curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1007/978-3-642-59497-7_217'

    Turtle is a human-readable linked data format.

    curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1007/978-3-642-59497-7_217'

    RDF/XML is a standard XML format for linked data.

    curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1007/978-3-642-59497-7_217'


     

    This table displays all metadata directly associated to this object as RDF triples.

    89 TRIPLES      23 PREDICATES      30 URIs      20 LITERALS      8 BLANK NODES

    Subject Predicate Object
    1 sg:pub.10.1007/978-3-642-59497-7_217 schema:about anzsrc-for:09
    2 anzsrc-for:0915
    3 schema:author Ne7430f2e446f444f9fb9a512bba87402
    4 schema:citation sg:pub.10.1007/3-540-69544-3_7
    5 https://doi.org/10.1016/s0924-4247(98)80058-7
    6 https://doi.org/10.1109/84.735347
    7 schema:datePublished 2001
    8 schema:datePublishedReg 2001-01-01
    9 schema:description In this paper, a pneumatically-actuated in-channel silicon microvalve applicable to micro fluidic systems, and its novel application to functional fluidic integrated circuits are presented. This microvalve works as transistor like device in fluidic integrated circuits by means of its pneumatic inlet port connected to a front-side fluid channel. Fabricated microvalves showed good performance for fluid flow control. The “pressure inverter amplifier” was also fabricated as an example of fluidic integrated circuit using this microvalve. The measured pressure gain of the amplifier reached about 40. Many kinds of functional fluidic circuits can be realized with the new concept presented in this article.
    10 schema:editor N6c75205ad0154f6689a24504ca0de9f9
    11 schema:genre chapter
    12 schema:inLanguage en
    13 schema:isAccessibleForFree false
    14 schema:isPartOf N1d6eaa169985460fa635df7cee2f022a
    15 schema:name A Pneumatically-Actuated Silicon Microvalve and its Application to Functional Fluidic Integrated Circuits
    16 schema:pagination 918-921
    17 schema:productId N077370afd6e04560a07759a2629c54dd
    18 N353ebbe80705430fbe3f56018c297c87
    19 Nb0c9fbe459f64a8b94af0197234a58a0
    20 schema:publisher N9fbe16b3e9a741468b441ddc78aba4e2
    21 schema:sameAs https://app.dimensions.ai/details/publication/pub.1038556552
    22 https://doi.org/10.1007/978-3-642-59497-7_217
    23 schema:sdDatePublished 2019-04-15T16:18
    24 schema:sdLicense https://scigraph.springernature.com/explorer/license/
    25 schema:sdPublisher N5ad0148025534e7f9bcea00d728c283c
    26 schema:url http://link.springer.com/10.1007/978-3-642-59497-7_217
    27 sgo:license sg:explorer/license/
    28 sgo:sdDataset chapters
    29 rdf:type schema:Chapter
    30 N077370afd6e04560a07759a2629c54dd schema:name readcube_id
    31 schema:value b7ab01634a3b250a08fa997c38129bce8ef6482882135a44ceb0dcb14197a9ca
    32 rdf:type schema:PropertyValue
    33 N1d6eaa169985460fa635df7cee2f022a schema:isbn 978-3-540-42150-4
    34 978-3-642-59497-7
    35 schema:name Transducers ’01 Eurosensors XV
    36 rdf:type schema:Book
    37 N353ebbe80705430fbe3f56018c297c87 schema:name dimensions_id
    38 schema:value pub.1038556552
    39 rdf:type schema:PropertyValue
    40 N5ad0148025534e7f9bcea00d728c283c schema:name Springer Nature - SN SciGraph project
    41 rdf:type schema:Organization
    42 N5fa909cc29b846d98d5d75921c467b2b rdf:first sg:person.012271467225.40
    43 rdf:rest rdf:nil
    44 N654d688ee1b7433c8d6d57947474bcad rdf:first sg:person.011406773521.22
    45 rdf:rest N5fa909cc29b846d98d5d75921c467b2b
    46 N6c75205ad0154f6689a24504ca0de9f9 rdf:first Naef3b6866f264c6ea6861e2b460231ea
    47 rdf:rest rdf:nil
    48 N9fbe16b3e9a741468b441ddc78aba4e2 schema:location Berlin, Heidelberg
    49 schema:name Springer Berlin Heidelberg
    50 rdf:type schema:Organisation
    51 Naef3b6866f264c6ea6861e2b460231ea schema:familyName Obermeier
    52 schema:givenName Ernst
    53 rdf:type schema:Person
    54 Nb0c9fbe459f64a8b94af0197234a58a0 schema:name doi
    55 schema:value 10.1007/978-3-642-59497-7_217
    56 rdf:type schema:PropertyValue
    57 Ne7430f2e446f444f9fb9a512bba87402 rdf:first sg:person.01325342171.02
    58 rdf:rest N654d688ee1b7433c8d6d57947474bcad
    59 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
    60 schema:name Engineering
    61 rdf:type schema:DefinedTerm
    62 anzsrc-for:0915 schema:inDefinedTermSet anzsrc-for:
    63 schema:name Interdisciplinary Engineering
    64 rdf:type schema:DefinedTerm
    65 sg:person.011406773521.22 schema:affiliation https://www.grid.ac/institutes/grid.412804.b
    66 schema:familyName Ishida
    67 schema:givenName Makoto
    68 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011406773521.22
    69 rdf:type schema:Person
    70 sg:person.012271467225.40 schema:affiliation https://www.grid.ac/institutes/grid.412804.b
    71 schema:familyName Sawada
    72 schema:givenName Kazuaki
    73 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012271467225.40
    74 rdf:type schema:Person
    75 sg:person.01325342171.02 schema:affiliation https://www.grid.ac/institutes/grid.412804.b
    76 schema:familyName Takao
    77 schema:givenName Hidekuni
    78 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01325342171.02
    79 rdf:type schema:Person
    80 sg:pub.10.1007/3-540-69544-3_7 schema:sameAs https://app.dimensions.ai/details/publication/pub.1012215321
    81 https://doi.org/10.1007/3-540-69544-3_7
    82 rdf:type schema:CreativeWork
    83 https://doi.org/10.1016/s0924-4247(98)80058-7 schema:sameAs https://app.dimensions.ai/details/publication/pub.1053022212
    84 rdf:type schema:CreativeWork
    85 https://doi.org/10.1109/84.735347 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061240655
    86 rdf:type schema:CreativeWork
    87 https://www.grid.ac/institutes/grid.412804.b schema:alternateName Toyohashi University of Technology
    88 schema:name Department of Electrical and Electronic Engineering, Toyohashi University of Technology
    89 rdf:type schema:Organization
     




    Preview window. Press ESC to close (or click here)


    ...