A New Type of Transducer for Gas and Bio-Sensors View Full Text


Ontology type: schema:Chapter     


Chapter Info

DATE

2004

AUTHORS

V. V. Il’chenko , L. G. Il’chenko , A. I. Kravchenko , V. T. Grinchenko

ABSTRACT

A very promising way in solid-state gas and bio-sensors creation is the use of well developed silicon technology for the manufacturing of the gas sensors. It will allow to unify the processes of the sensor production with the processes of the manufacture of the information processing circuit. This approach promises the essential abatement of the cost of devices and significant advantages in creation of the matrix sensors. The metal-silicon contacts perform the certain interest in such researches because they are the cheapest among semiconductor sensors. At the same time they provide sensitivity to gas environment due to strong dependence of their characteristics on the outside environment. In this work we present results of the usage of non-linear properties of the current-voltage characteristics diode-like structures which allow to extend capabilities of the described above approach for creation new type of sensors structures. More... »

PAGES

81-83

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/978-3-642-18727-8_11

DOI

http://dx.doi.org/10.1007/978-3-642-18727-8_11

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1035757983


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