Carbon nanotubes grown in contact holes for nano electronic applications: how to prepare TEM samples by FIB? View Full Text


Ontology type: schema:Chapter     


Chapter Info

DATE

2008

AUTHORS

X. Ke , S. Bals , A. Romo Negreira , T. Hantschel , H. Bender , G. Van Tendeloo

ABSTRACT

Carbon nanotubes (CNT’s) grown on silicon-based substrates are of great importance because of their potential use as an interconnect material in next-generation device technologies [1]. Samples in this study consist of layered structures on a silicon substrate, where arrays of so-called “contact holes” are present. CNT’s are then grown inside the contact holes after catalyst particles have been deposited in the contacts. In order to investigate the structure of CNT’s grown inside the contact holes, transmission electron microscopy (TEM) is used. More... »

PAGES

673-674

Book

TITLE

EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany

ISBN

978-3-540-85154-7
978-3-540-85156-1

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/978-3-540-85156-1_337

DOI

http://dx.doi.org/10.1007/978-3-540-85156-1_337

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1049348170


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