Chemical analysis of nickel silicides with high spatial resolution by combined EDS and EELS (ELNES) View Full Text


Ontology type: schema:Chapter     


Chapter Info

DATE

2008

AUTHORS

E. Verleysen , O. Richard , H. Bender , D. Schryvers , W. Vandervorst

ABSTRACT

The continuous scaling in semiconductor technology has made accurate characterization of transistor compounds more challenging. Often, the main difficulty is to obtain both high spatial resolution and information on the chemical composition of the material. In this context, Ni-silicides are selected as a test-vehicle to examine the combination of quantification and spatial resolution, by using different analytical TEM techniques in parallel. More... »

PAGES

455-456

Book

TITLE

EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany

ISBN

978-3-540-85154-7
978-3-540-85156-1

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/978-3-540-85156-1_228

DOI

http://dx.doi.org/10.1007/978-3-540-85156-1_228

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1015216364


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0301", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Analytical Chemistry", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/03", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Chemical Sciences", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Interuniversity Microelectronics Centre", 
          "id": "https://www.grid.ac/institutes/grid.15762.37", 
          "name": [
            "IMEC, Kapeldreef 75, 3001\u00a0Leuven, Belgium"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Verleysen", 
        "givenName": "E.", 
        "id": "sg:person.016440216720.73", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016440216720.73"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Interuniversity Microelectronics Centre", 
          "id": "https://www.grid.ac/institutes/grid.15762.37", 
          "name": [
            "IMEC, Kapeldreef 75, 3001\u00a0Leuven, Belgium"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Richard", 
        "givenName": "O.", 
        "id": "sg:person.01166136521.16", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01166136521.16"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Interuniversity Microelectronics Centre", 
          "id": "https://www.grid.ac/institutes/grid.15762.37", 
          "name": [
            "IMEC, Kapeldreef 75, 3001\u00a0Leuven, Belgium"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Bender", 
        "givenName": "H.", 
        "id": "sg:person.0604421701.46", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0604421701.46"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "University of Antwerp", 
          "id": "https://www.grid.ac/institutes/grid.5284.b", 
          "name": [
            "EMAT, Universiteit Antwerpen, Groenenborgerlaan 171, 2020\u00a0Antwerpen, Belgium"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Schryvers", 
        "givenName": "D.", 
        "id": "sg:person.013773701247.34", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013773701247.34"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Interuniversity Microelectronics Centre", 
          "id": "https://www.grid.ac/institutes/grid.15762.37", 
          "name": [
            "IMEC, Kapeldreef 75, 3001\u00a0Leuven, Belgium"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Vandervorst", 
        "givenName": "W.", 
        "id": "sg:person.01027075473.22", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01027075473.22"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1016/j.ultramic.2004.06.004", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1029651739"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2008", 
    "datePublishedReg": "2008-01-01", 
    "description": "The continuous scaling in semiconductor technology has made accurate characterization of transistor compounds more challenging. Often, the main difficulty is to obtain both high spatial resolution and information on the chemical composition of the material. In this context, Ni-silicides are selected as a test-vehicle to examine the combination of quantification and spatial resolution, by using different analytical TEM techniques in parallel.", 
    "editor": [
      {
        "familyName": "Luysberg", 
        "givenName": "Martina", 
        "type": "Person"
      }, 
      {
        "familyName": "Tillmann", 
        "givenName": "Karsten", 
        "type": "Person"
      }, 
      {
        "familyName": "Weirich", 
        "givenName": "Thomas", 
        "type": "Person"
      }
    ], 
    "genre": "chapter", 
    "id": "sg:pub.10.1007/978-3-540-85156-1_228", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": {
      "isbn": [
        "978-3-540-85154-7", 
        "978-3-540-85156-1"
      ], 
      "name": "EMC 2008 14th European Microscopy Congress 1\u20135 September 2008, Aachen, Germany", 
      "type": "Book"
    }, 
    "name": "Chemical analysis of nickel silicides with high spatial resolution by combined EDS and EELS (ELNES)", 
    "pagination": "455-456", 
    "productId": [
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/978-3-540-85156-1_228"
        ]
      }, 
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "487f08fc09cdc4a11a42bcb1e96dfb75a84844ea8851c6dcacf09ae918a7971f"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1015216364"
        ]
      }
    ], 
    "publisher": {
      "location": "Berlin, Heidelberg", 
      "name": "Springer Berlin Heidelberg", 
      "type": "Organisation"
    }, 
    "sameAs": [
      "https://doi.org/10.1007/978-3-540-85156-1_228", 
      "https://app.dimensions.ai/details/publication/pub.1015216364"
    ], 
    "sdDataset": "chapters", 
    "sdDatePublished": "2019-04-15T21:00", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8690_00000252.jsonl", 
    "type": "Chapter", 
    "url": "http://link.springer.com/10.1007/978-3-540-85156-1_228"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

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This table displays all metadata directly associated to this object as RDF triples.

109 TRIPLES      23 PREDICATES      28 URIs      20 LITERALS      8 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/978-3-540-85156-1_228 schema:about anzsrc-for:03
2 anzsrc-for:0301
3 schema:author Nc18d113da65f4142a78553daf08daa90
4 schema:citation https://doi.org/10.1016/j.ultramic.2004.06.004
5 schema:datePublished 2008
6 schema:datePublishedReg 2008-01-01
7 schema:description The continuous scaling in semiconductor technology has made accurate characterization of transistor compounds more challenging. Often, the main difficulty is to obtain both high spatial resolution and information on the chemical composition of the material. In this context, Ni-silicides are selected as a test-vehicle to examine the combination of quantification and spatial resolution, by using different analytical TEM techniques in parallel.
8 schema:editor Nc8752afb65ed4c02801ec0b4a0741438
9 schema:genre chapter
10 schema:inLanguage en
11 schema:isAccessibleForFree false
12 schema:isPartOf N180f825a3a0a4e04b95057141097c29a
13 schema:name Chemical analysis of nickel silicides with high spatial resolution by combined EDS and EELS (ELNES)
14 schema:pagination 455-456
15 schema:productId N50cda5754f9040e1a945d7ec1cbe530f
16 N51ab2d1c453743f99d49777f30e8a308
17 N5291780c4d6548f49c66cc362d0aac4e
18 schema:publisher Nc7ccb96185614dac86307d1ed643a01f
19 schema:sameAs https://app.dimensions.ai/details/publication/pub.1015216364
20 https://doi.org/10.1007/978-3-540-85156-1_228
21 schema:sdDatePublished 2019-04-15T21:00
22 schema:sdLicense https://scigraph.springernature.com/explorer/license/
23 schema:sdPublisher N581f47ae1602428e898eed3d713e90f8
24 schema:url http://link.springer.com/10.1007/978-3-540-85156-1_228
25 sgo:license sg:explorer/license/
26 sgo:sdDataset chapters
27 rdf:type schema:Chapter
28 N15f7f3339e8c43e6a81803e391a09d67 rdf:first sg:person.013773701247.34
29 rdf:rest N50dcb2eda431420ba41d1fb65ac47d7b
30 N180f825a3a0a4e04b95057141097c29a schema:isbn 978-3-540-85154-7
31 978-3-540-85156-1
32 schema:name EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany
33 rdf:type schema:Book
34 N1f4c04b0a653465fb68f5add572773ef schema:familyName Luysberg
35 schema:givenName Martina
36 rdf:type schema:Person
37 N47271ab901804c2fb7dc7f8497bef501 schema:familyName Weirich
38 schema:givenName Thomas
39 rdf:type schema:Person
40 N50cda5754f9040e1a945d7ec1cbe530f schema:name doi
41 schema:value 10.1007/978-3-540-85156-1_228
42 rdf:type schema:PropertyValue
43 N50dcb2eda431420ba41d1fb65ac47d7b rdf:first sg:person.01027075473.22
44 rdf:rest rdf:nil
45 N51ab2d1c453743f99d49777f30e8a308 schema:name readcube_id
46 schema:value 487f08fc09cdc4a11a42bcb1e96dfb75a84844ea8851c6dcacf09ae918a7971f
47 rdf:type schema:PropertyValue
48 N5291780c4d6548f49c66cc362d0aac4e schema:name dimensions_id
49 schema:value pub.1015216364
50 rdf:type schema:PropertyValue
51 N581f47ae1602428e898eed3d713e90f8 schema:name Springer Nature - SN SciGraph project
52 rdf:type schema:Organization
53 N87d729caf37e413dbc9ec62fa291bf66 rdf:first N47271ab901804c2fb7dc7f8497bef501
54 rdf:rest rdf:nil
55 N8efc640517b1404bb81d233a6b37f984 schema:familyName Tillmann
56 schema:givenName Karsten
57 rdf:type schema:Person
58 N9290ddd82b554e5c9cb79b3539963667 rdf:first sg:person.01166136521.16
59 rdf:rest Nff1d3083c99447e998a805f45eb61754
60 Nc18d113da65f4142a78553daf08daa90 rdf:first sg:person.016440216720.73
61 rdf:rest N9290ddd82b554e5c9cb79b3539963667
62 Nc7ccb96185614dac86307d1ed643a01f schema:location Berlin, Heidelberg
63 schema:name Springer Berlin Heidelberg
64 rdf:type schema:Organisation
65 Nc8752afb65ed4c02801ec0b4a0741438 rdf:first N1f4c04b0a653465fb68f5add572773ef
66 rdf:rest Nca135d11d14b48bb81f66a955adf0d51
67 Nca135d11d14b48bb81f66a955adf0d51 rdf:first N8efc640517b1404bb81d233a6b37f984
68 rdf:rest N87d729caf37e413dbc9ec62fa291bf66
69 Nff1d3083c99447e998a805f45eb61754 rdf:first sg:person.0604421701.46
70 rdf:rest N15f7f3339e8c43e6a81803e391a09d67
71 anzsrc-for:03 schema:inDefinedTermSet anzsrc-for:
72 schema:name Chemical Sciences
73 rdf:type schema:DefinedTerm
74 anzsrc-for:0301 schema:inDefinedTermSet anzsrc-for:
75 schema:name Analytical Chemistry
76 rdf:type schema:DefinedTerm
77 sg:person.01027075473.22 schema:affiliation https://www.grid.ac/institutes/grid.15762.37
78 schema:familyName Vandervorst
79 schema:givenName W.
80 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01027075473.22
81 rdf:type schema:Person
82 sg:person.01166136521.16 schema:affiliation https://www.grid.ac/institutes/grid.15762.37
83 schema:familyName Richard
84 schema:givenName O.
85 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01166136521.16
86 rdf:type schema:Person
87 sg:person.013773701247.34 schema:affiliation https://www.grid.ac/institutes/grid.5284.b
88 schema:familyName Schryvers
89 schema:givenName D.
90 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013773701247.34
91 rdf:type schema:Person
92 sg:person.016440216720.73 schema:affiliation https://www.grid.ac/institutes/grid.15762.37
93 schema:familyName Verleysen
94 schema:givenName E.
95 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016440216720.73
96 rdf:type schema:Person
97 sg:person.0604421701.46 schema:affiliation https://www.grid.ac/institutes/grid.15762.37
98 schema:familyName Bender
99 schema:givenName H.
100 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0604421701.46
101 rdf:type schema:Person
102 https://doi.org/10.1016/j.ultramic.2004.06.004 schema:sameAs https://app.dimensions.ai/details/publication/pub.1029651739
103 rdf:type schema:CreativeWork
104 https://www.grid.ac/institutes/grid.15762.37 schema:alternateName Interuniversity Microelectronics Centre
105 schema:name IMEC, Kapeldreef 75, 3001 Leuven, Belgium
106 rdf:type schema:Organization
107 https://www.grid.ac/institutes/grid.5284.b schema:alternateName University of Antwerp
108 schema:name EMAT, Universiteit Antwerpen, Groenenborgerlaan 171, 2020 Antwerpen, Belgium
109 rdf:type schema:Organization
 




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