Ontology type: schema:Chapter
2008
AUTHORSE. Verleysen , O. Richard , H. Bender , D. Schryvers , W. Vandervorst
ABSTRACTThe continuous scaling in semiconductor technology has made accurate characterization of transistor compounds more challenging. Often, the main difficulty is to obtain both high spatial resolution and information on the chemical composition of the material. In this context, Ni-silicides are selected as a test-vehicle to examine the combination of quantification and spatial resolution, by using different analytical TEM techniques in parallel. More... »
PAGES455-456
EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany
ISBN
978-3-540-85154-7
978-3-540-85156-1
http://scigraph.springernature.com/pub.10.1007/978-3-540-85156-1_228
DOIhttp://dx.doi.org/10.1007/978-3-540-85156-1_228
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