Reactively Sputter-Deposited Solid Electrolytes and Their Applications View Full Text


Ontology type: schema:Chapter     


Chapter Info

DATE

2008

AUTHORS

Pascal Briois , Frédéric Lapostolle , Alain Billard

ABSTRACT

To complete this rapid overview of the main trends of reactive sputtering, let us mention that methods based on optical emission spectroscopy (OES) developed for plasma emission monitoring (PEM) [35] can also be advantageously used to in situ investigate the chemical properties of sputter deposited coatings [12, 37], as well as those of growing transparent coatings by optical transmittance interferometry (OTI) [38, 39]. The strong improvement during the three past decades in the understanding of the mechanisms of reactive sputtering mentioned above and developed in details in previous chapters of this book have allowed the development of numerous applications in the fields of energy and environment applications. This is particularly true for inorganic solid electrolytes which exclusively concern oxide coatings, i.e. the most difficult materials to be high rate deposited using magnetron sputtering.In this paper, we first review the basic crystallographic properties of the most common electrolytes and mixed conductor materials available for energy and environment applications. Section 11.2 is ascribed to the description of different applications where ionic or mixed conductor coatings should be advantageously grown by PVD processes. For each application, we first describe the principle and requirements for the electrolyte. Then we review the literature where such coatings have already been synthesized by sputter deposition. More... »

PAGES

367-411

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/978-3-540-76664-3_11

DOI

http://dx.doi.org/10.1007/978-3-540-76664-3_11

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1000017971


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