Lead Zirconate Titanate (PZT) for M/NEMS View Full Text


Ontology type: schema:Chapter     


Chapter Info

DATE

2017

AUTHORS

Ronald G. Polcawich , Jeffrey S. Pulskamp

ABSTRACT

This section concentrates on the leading ferroelectric material used in thin-film piezoelectric MEMS: lead zirconate titanate (PbZr x Ti1−x O3) or PZT. PZT-based MEMS technology has been explored extensively for a variety of actuator applications [1] but has received less attention for RF MEMS resonator and filter applications. Despite the long and successful history of bulk PZT resonators [2], the process complexity/compatibility issues and high mechanical losses have discouraged the exploitation of this strong piezoelectric for these applications. However, for select MEMS resonator and filter applications, thin-film PZT offers many unique advantages due to the high electromechanical coupling factors, permittivity, piezoelectric stress constants, and the DC-bias electric field dependence of these properties. Significant progress has also been made in developing materials deposition and processing technologies that address the fabrication challenges with PZT thin films. The goals of this section include an analysis of the deposition of these materials, patterning techniques, identification of device design and processing concerns, and finally a detailed subsection covering examples of how PZT thin films have been incorporated into resonant-based devices. More... »

PAGES

39-71

References to SciGraph publications

  • 2011-01-07. Additive Processes for Piezoelectric Materials: Piezoelectric MEMS in MEMS MATERIALS AND PROCESSES HANDBOOK
  • 2004-07. Recent Developments on MOCVD of Ferroelectric Thin Films in JOURNAL OF ELECTROCERAMICS
  • 2004-01. Thin Film Piezoelectrics for MEMS in JOURNAL OF ELECTROCERAMICS
  • Book

    TITLE

    Piezoelectric MEMS Resonators

    ISBN

    978-3-319-28686-0
    978-3-319-28688-4

    Identifiers

    URI

    http://scigraph.springernature.com/pub.10.1007/978-3-319-28688-4_2

    DOI

    http://dx.doi.org/10.1007/978-3-319-28688-4_2

    DIMENSIONS

    https://app.dimensions.ai/details/publication/pub.1052757040


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