The Physical Formation Processes of Thin Films, Their Characterization by XPS, AES and SIMS and Their Applications in Microbatteries View Full Text


Ontology type: schema:Chapter     


Chapter Info

DATE

1990

AUTHORS

Alain Levasseur , G. Meunier , R. Dormoy , M. Menetrier

ABSTRACT

Deposition of thin films with controlled properties requires an operating environment that interferes as little as possible with the process of film formation. To minimize the interaction between residual gases and the surface of growing films one has to operate under vacuum.

PAGES

59-97

Book

TITLE

Solid State Microbatteries

ISBN

978-1-4899-2265-6
978-1-4899-2263-2

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/978-1-4899-2263-2_3

DOI

http://dx.doi.org/10.1007/978-1-4899-2263-2_3

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1038151298


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