Depth Profiling Biaxial Stresses in Sputter Deposited Molybdenum Films; Use of the Cos2ϕ Method View Full Text


Ontology type: schema:Chapter     


Chapter Info

DATE

1997

AUTHORS

B. L. Ballard , P. K. Predecki , T. R. Watkins , K. J. Kozaczek , D. N. Braski , C. R. Hubbard

ABSTRACT

N/A

PAGES

363-370

Book

TITLE

Advances in X-Ray Analysis

ISBN

978-0-306-45803-3
978-1-4615-5377-9

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/978-1-4615-5377-9_40

DOI

http://dx.doi.org/10.1007/978-1-4615-5377-9_40

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1089521318


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "author": [
      {
        "familyName": "Ballard", 
        "givenName": "B. L.", 
        "id": "sg:person.011622133131.23", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011622133131.23"
        ], 
        "type": "Person"
      }, 
      {
        "familyName": "Predecki", 
        "givenName": "P. K.", 
        "id": "sg:person.012203161513.83", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012203161513.83"
        ], 
        "type": "Person"
      }, 
      {
        "familyName": "Watkins", 
        "givenName": "T. R.", 
        "id": "sg:person.013673441243.96", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013673441243.96"
        ], 
        "type": "Person"
      }, 
      {
        "familyName": "Kozaczek", 
        "givenName": "K. J.", 
        "id": "sg:person.0732246311.91", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0732246311.91"
        ], 
        "type": "Person"
      }, 
      {
        "familyName": "Braski", 
        "givenName": "D. N.", 
        "id": "sg:person.014305001461.88", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014305001461.88"
        ], 
        "type": "Person"
      }, 
      {
        "familyName": "Hubbard", 
        "givenName": "C. R.", 
        "id": "sg:person.07414725377.43", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07414725377.43"
        ], 
        "type": "Person"
      }
    ], 
    "datePublished": "1997", 
    "datePublishedReg": "1997-01-01", 
    "editor": [
      {
        "familyName": "Gilfrich", 
        "givenName": "John V.", 
        "type": "Person"
      }, 
      {
        "familyName": "Jenkins", 
        "givenName": "Ron", 
        "type": "Person"
      }, 
      {
        "familyName": "Snyder", 
        "givenName": "Robert L.", 
        "type": "Person"
      }, 
      {
        "familyName": "Zaitz", 
        "givenName": "Mary Ann", 
        "type": "Person"
      }, 
      {
        "familyName": "Noyan", 
        "givenName": "I. Cev", 
        "type": "Person"
      }, 
      {
        "familyName": "Huang", 
        "givenName": "Ting C.", 
        "type": "Person"
      }, 
      {
        "familyName": "Smith", 
        "givenName": "Deane K.", 
        "type": "Person"
      }, 
      {
        "familyName": "Predecki", 
        "givenName": "Paul K.", 
        "type": "Person"
      }
    ], 
    "genre": "chapter", 
    "id": "sg:pub.10.1007/978-1-4615-5377-9_40", 
    "inLanguage": "en", 
    "isAccessibleForFree": false, 
    "isPartOf": {
      "isbn": [
        "978-0-306-45803-3", 
        "978-1-4615-5377-9"
      ], 
      "name": "Advances in X-Ray Analysis", 
      "type": "Book"
    }, 
    "keywords": [
      "use", 
      "stress", 
      "method", 
      "films", 
      "biaxial stress", 
      "molybdenum films"
    ], 
    "name": "Depth Profiling Biaxial Stresses in Sputter Deposited Molybdenum Films; Use of the Cos2\u03d5 Method", 
    "pagination": "363-370", 
    "productId": [
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1089521318"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/978-1-4615-5377-9_40"
        ]
      }
    ], 
    "publisher": {
      "name": "Springer Nature", 
      "type": "Organisation"
    }, 
    "sameAs": [
      "https://doi.org/10.1007/978-1-4615-5377-9_40", 
      "https://app.dimensions.ai/details/publication/pub.1089521318"
    ], 
    "sdDataset": "chapters", 
    "sdDatePublished": "2022-05-20T07:43", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-springernature-scigraph/baseset/20220519/entities/gbq_results/chapter/chapter_178.jsonl", 
    "type": "Chapter", 
    "url": "https://doi.org/10.1007/978-1-4615-5377-9_40"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

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This table displays all metadata directly associated to this object as RDF triples.

118 TRIPLES      21 PREDICATES      29 URIs      24 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/978-1-4615-5377-9_40 schema:author Na60916c81b9545c7b8038f54028af283
2 schema:datePublished 1997
3 schema:datePublishedReg 1997-01-01
4 schema:editor Ndfc1ae1244374ed0a09ed4b8aa40685e
5 schema:genre chapter
6 schema:inLanguage en
7 schema:isAccessibleForFree false
8 schema:isPartOf N3bedcabdec384f668bef1b81aa035a5f
9 schema:keywords biaxial stress
10 films
11 method
12 molybdenum films
13 stress
14 use
15 schema:name Depth Profiling Biaxial Stresses in Sputter Deposited Molybdenum Films; Use of the Cos2ϕ Method
16 schema:pagination 363-370
17 schema:productId N37bc87e7d1a6496dac2f0f52a0ae6afd
18 N90a50b0de22c459d88cf61e5111ec1de
19 schema:publisher N529fc2b3bb444db79fd6f553aa14d737
20 schema:sameAs https://app.dimensions.ai/details/publication/pub.1089521318
21 https://doi.org/10.1007/978-1-4615-5377-9_40
22 schema:sdDatePublished 2022-05-20T07:43
23 schema:sdLicense https://scigraph.springernature.com/explorer/license/
24 schema:sdPublisher N2178cee704a24940ba3addd27535484a
25 schema:url https://doi.org/10.1007/978-1-4615-5377-9_40
26 sgo:license sg:explorer/license/
27 sgo:sdDataset chapters
28 rdf:type schema:Chapter
29 N15324ef96d254ab59dafd68ad47f595b schema:familyName Noyan
30 schema:givenName I. Cev
31 rdf:type schema:Person
32 N19360840a4004a7da8492b7bd94cdafa rdf:first N5261fe036bc34c77a7532158657ebd4c
33 rdf:rest N817621d95f95424a883640997262eb77
34 N2178cee704a24940ba3addd27535484a schema:name Springer Nature - SN SciGraph project
35 rdf:type schema:Organization
36 N2aa7e7bea6204bc3a397115c6eb5cfc6 schema:familyName Jenkins
37 schema:givenName Ron
38 rdf:type schema:Person
39 N317e41f877b14c4cb926db518bd58b33 schema:familyName Gilfrich
40 schema:givenName John V.
41 rdf:type schema:Person
42 N362836856954439ab1e773d52ce4724b rdf:first N2aa7e7bea6204bc3a397115c6eb5cfc6
43 rdf:rest N9cb49e52757947eb91e8995c9cd9bd12
44 N37bc87e7d1a6496dac2f0f52a0ae6afd schema:name doi
45 schema:value 10.1007/978-1-4615-5377-9_40
46 rdf:type schema:PropertyValue
47 N3bedcabdec384f668bef1b81aa035a5f schema:isbn 978-0-306-45803-3
48 978-1-4615-5377-9
49 schema:name Advances in X-Ray Analysis
50 rdf:type schema:Book
51 N4131161814eb447396837197e39a07d0 rdf:first N15324ef96d254ab59dafd68ad47f595b
52 rdf:rest N19360840a4004a7da8492b7bd94cdafa
53 N5261fe036bc34c77a7532158657ebd4c schema:familyName Huang
54 schema:givenName Ting C.
55 rdf:type schema:Person
56 N529fc2b3bb444db79fd6f553aa14d737 schema:name Springer Nature
57 rdf:type schema:Organisation
58 N5314fc7df402417883049d2a649992a3 schema:familyName Zaitz
59 schema:givenName Mary Ann
60 rdf:type schema:Person
61 N58f4e1c9755943faa7db9a823308b596 rdf:first sg:person.012203161513.83
62 rdf:rest Ne74aa83f0cfb457dba003d994039781e
63 N817621d95f95424a883640997262eb77 rdf:first Nc6415255657744d385d19c44c6168299
64 rdf:rest N917bfe15a93d4bc188fb20c09254dc77
65 N90a50b0de22c459d88cf61e5111ec1de schema:name dimensions_id
66 schema:value pub.1089521318
67 rdf:type schema:PropertyValue
68 N917bfe15a93d4bc188fb20c09254dc77 rdf:first Ne09fed1440c2448d9865cb37e8ec5030
69 rdf:rest rdf:nil
70 N9cb49e52757947eb91e8995c9cd9bd12 rdf:first Nbf01996ad40240d8af09f05936c52f13
71 rdf:rest Nf65b61a6f8654e3e91b1e4e845ebcb41
72 Na543fe0e97d64e588f10910ac6027af9 rdf:first sg:person.0732246311.91
73 rdf:rest Nfd729e3a538448808cb9b56893d59947
74 Na60916c81b9545c7b8038f54028af283 rdf:first sg:person.011622133131.23
75 rdf:rest N58f4e1c9755943faa7db9a823308b596
76 Nb35cd8d6db3b4c3a9bb7a71bc41f8b0c rdf:first sg:person.07414725377.43
77 rdf:rest rdf:nil
78 Nbf01996ad40240d8af09f05936c52f13 schema:familyName Snyder
79 schema:givenName Robert L.
80 rdf:type schema:Person
81 Nc6415255657744d385d19c44c6168299 schema:familyName Smith
82 schema:givenName Deane K.
83 rdf:type schema:Person
84 Ndfc1ae1244374ed0a09ed4b8aa40685e rdf:first N317e41f877b14c4cb926db518bd58b33
85 rdf:rest N362836856954439ab1e773d52ce4724b
86 Ne09fed1440c2448d9865cb37e8ec5030 schema:familyName Predecki
87 schema:givenName Paul K.
88 rdf:type schema:Person
89 Ne74aa83f0cfb457dba003d994039781e rdf:first sg:person.013673441243.96
90 rdf:rest Na543fe0e97d64e588f10910ac6027af9
91 Nf65b61a6f8654e3e91b1e4e845ebcb41 rdf:first N5314fc7df402417883049d2a649992a3
92 rdf:rest N4131161814eb447396837197e39a07d0
93 Nfd729e3a538448808cb9b56893d59947 rdf:first sg:person.014305001461.88
94 rdf:rest Nb35cd8d6db3b4c3a9bb7a71bc41f8b0c
95 sg:person.011622133131.23 schema:familyName Ballard
96 schema:givenName B. L.
97 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011622133131.23
98 rdf:type schema:Person
99 sg:person.012203161513.83 schema:familyName Predecki
100 schema:givenName P. K.
101 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012203161513.83
102 rdf:type schema:Person
103 sg:person.013673441243.96 schema:familyName Watkins
104 schema:givenName T. R.
105 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013673441243.96
106 rdf:type schema:Person
107 sg:person.014305001461.88 schema:familyName Braski
108 schema:givenName D. N.
109 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.014305001461.88
110 rdf:type schema:Person
111 sg:person.0732246311.91 schema:familyName Kozaczek
112 schema:givenName K. J.
113 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0732246311.91
114 rdf:type schema:Person
115 sg:person.07414725377.43 schema:familyName Hubbard
116 schema:givenName C. R.
117 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07414725377.43
118 rdf:type schema:Person
 




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