Automated Quantification of Dimensions on Tomographic Reconstructions of Semiconductor Devices View Full Text


Ontology type: schema:Chapter     


Chapter Info

DATE

2008

AUTHORS

A Kalio , O Richard , E Sourty , H Bender

ABSTRACT

Electron tomography analysis allows a detailed structural investigation of nano-devices. The development of software to deduce quantitative metrological information about the structures is discussed.

PAGES

387-390

Book

TITLE

Microscopy of Semiconducting Materials 2007

ISBN

978-1-4020-8614-4
978-1-4020-8615-1

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/978-1-4020-8615-1_83

DOI

http://dx.doi.org/10.1007/978-1-4020-8615-1_83

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1052193773


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