TEM investigation of Si/Ge multilayer structure incorporated into MBE grown Si whiskers View Full Text


Ontology type: schema:Chapter     


Chapter Info

DATE

2005-01-01

AUTHORS

N Zakharov , P Werner , G Gerth , L Schubert , L Sokolov , U Gösele

ABSTRACT

The TEM was used to monitor the composition of thin Ge layers incorporated into Si nanowhiskers grown by molecular beam epitaxy (MBE) on a <111> Si substrate. The method of chemical analysis was developed for this particular case. It has been found that doping of Si whiskers by Ge slows down the whisker growth and can even result in their dissolution. This phenomenon is interpreted in terms of additional elastic energy introduced by the Ge atoms into Si nanowhisker. More... »

PAGES

103-106

Book

TITLE

Microscopy of Semiconducting Materials

ISBN

978-3-540-31914-6
978-3-540-31915-3

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/3-540-31915-8_21

DOI

http://dx.doi.org/10.1007/3-540-31915-8_21

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1023780670


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Materials Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Max-Planck-Institute of Microstructure Physics, Weinberg 2, D-06120, Halle(Saale), Germany", 
          "id": "http://www.grid.ac/institutes/grid.450270.4", 
          "name": [
            "Max-Planck-Institute of Microstructure Physics, Weinberg 2, D-06120, Halle(Saale), Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Zakharov", 
        "givenName": "N", 
        "id": "sg:person.010544170161.07", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010544170161.07"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Max-Planck-Institute of Microstructure Physics, Weinberg 2, D-06120, Halle(Saale), Germany", 
          "id": "http://www.grid.ac/institutes/grid.450270.4", 
          "name": [
            "Max-Planck-Institute of Microstructure Physics, Weinberg 2, D-06120, Halle(Saale), Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Werner", 
        "givenName": "P", 
        "id": "sg:person.0703230070.47", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0703230070.47"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Max-Planck-Institute of Microstructure Physics, Weinberg 2, D-06120, Halle(Saale), Germany", 
          "id": "http://www.grid.ac/institutes/grid.450270.4", 
          "name": [
            "Max-Planck-Institute of Microstructure Physics, Weinberg 2, D-06120, Halle(Saale), Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Gerth", 
        "givenName": "G", 
        "id": "sg:person.016657652147.00", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016657652147.00"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Max-Planck-Institute of Microstructure Physics, Weinberg 2, D-06120, Halle(Saale), Germany", 
          "id": "http://www.grid.ac/institutes/grid.450270.4", 
          "name": [
            "Max-Planck-Institute of Microstructure Physics, Weinberg 2, D-06120, Halle(Saale), Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Schubert", 
        "givenName": "L", 
        "id": "sg:person.010756022447.55", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010756022447.55"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Max-Planck-Institute of Microstructure Physics, Weinberg 2, D-06120, Halle(Saale), Germany", 
          "id": "http://www.grid.ac/institutes/grid.450270.4", 
          "name": [
            "Max-Planck-Institute of Microstructure Physics, Weinberg 2, D-06120, Halle(Saale), Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Sokolov", 
        "givenName": "L", 
        "id": "sg:person.011746115551.28", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011746115551.28"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Max-Planck-Institute of Microstructure Physics, Weinberg 2, D-06120, Halle(Saale), Germany", 
          "id": "http://www.grid.ac/institutes/grid.450270.4", 
          "name": [
            "Max-Planck-Institute of Microstructure Physics, Weinberg 2, D-06120, Halle(Saale), Germany"
          ], 
          "type": "Organization"
        }, 
        "familyName": "G\u00f6sele", 
        "givenName": "U", 
        "id": "sg:person.01135264674.11", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01135264674.11"
        ], 
        "type": "Person"
      }
    ], 
    "datePublished": "2005-01-01", 
    "datePublishedReg": "2005-01-01", 
    "description": "The TEM was used to monitor the composition of thin Ge layers incorporated into Si nanowhiskers grown by molecular beam epitaxy (MBE) on a <111> Si substrate. The method of chemical analysis was developed for this particular case. It has been found that doping of Si whiskers by Ge slows down the whisker growth and can even result in their dissolution. This phenomenon is interpreted in terms of additional elastic energy introduced by the Ge atoms into Si nanowhisker.", 
    "editor": [
      {
        "familyName": "Cullis", 
        "givenName": "A. G.", 
        "type": "Person"
      }, 
      {
        "familyName": "Hutchison", 
        "givenName": "J. L.", 
        "type": "Person"
      }
    ], 
    "genre": "chapter", 
    "id": "sg:pub.10.1007/3-540-31915-8_21", 
    "inLanguage": "en", 
    "isAccessibleForFree": false, 
    "isPartOf": {
      "isbn": [
        "978-3-540-31914-6", 
        "978-3-540-31915-3"
      ], 
      "name": "Microscopy of Semiconducting Materials", 
      "type": "Book"
    }, 
    "keywords": [
      "molecular beam epitaxy", 
      "Si whiskers", 
      "Si/Ge multilayer structures", 
      "thin Ge layer", 
      "additional elastic energy", 
      "Si nanowhiskers", 
      "Ge layer", 
      "Si substrate", 
      "multilayer structure", 
      "TEM investigations", 
      "elastic energy", 
      "whisker growth", 
      "nanowhiskers", 
      "whiskers", 
      "beam epitaxy", 
      "Ge", 
      "layer", 
      "dissolution", 
      "epitaxy", 
      "TEM", 
      "doping", 
      "substrate", 
      "energy", 
      "chemical analysis", 
      "particular case", 
      "structure", 
      "phenomenon", 
      "investigation", 
      "method", 
      "composition", 
      "terms", 
      "analysis", 
      "growth", 
      "cases", 
      "Ge multilayer structure"
    ], 
    "name": "TEM investigation of Si/Ge multilayer structure incorporated into MBE grown Si whiskers", 
    "pagination": "103-106", 
    "productId": [
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1023780670"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/3-540-31915-8_21"
        ]
      }
    ], 
    "publisher": {
      "name": "Springer Nature", 
      "type": "Organisation"
    }, 
    "sameAs": [
      "https://doi.org/10.1007/3-540-31915-8_21", 
      "https://app.dimensions.ai/details/publication/pub.1023780670"
    ], 
    "sdDataset": "chapters", 
    "sdDatePublished": "2021-12-01T19:57", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-springernature-scigraph/baseset/20211201/entities/gbq_results/chapter/chapter_154.jsonl", 
    "type": "Chapter", 
    "url": "https://doi.org/10.1007/3-540-31915-8_21"
  }
]
 

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This table displays all metadata directly associated to this object as RDF triples.

135 TRIPLES      23 PREDICATES      60 URIs      53 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/3-540-31915-8_21 schema:about anzsrc-for:09
2 anzsrc-for:0912
3 schema:author N34b2b48f1cea4a9a9804628b4769386b
4 schema:datePublished 2005-01-01
5 schema:datePublishedReg 2005-01-01
6 schema:description The TEM was used to monitor the composition of thin Ge layers incorporated into Si nanowhiskers grown by molecular beam epitaxy (MBE) on a <111> Si substrate. The method of chemical analysis was developed for this particular case. It has been found that doping of Si whiskers by Ge slows down the whisker growth and can even result in their dissolution. This phenomenon is interpreted in terms of additional elastic energy introduced by the Ge atoms into Si nanowhisker.
7 schema:editor Nd98e8b5d089b4f98b218f56413dc9cd2
8 schema:genre chapter
9 schema:inLanguage en
10 schema:isAccessibleForFree false
11 schema:isPartOf Nb01b458c14a7412da3ecdc73e2958dc2
12 schema:keywords Ge
13 Ge layer
14 Ge multilayer structure
15 Si nanowhiskers
16 Si substrate
17 Si whiskers
18 Si/Ge multilayer structures
19 TEM
20 TEM investigations
21 additional elastic energy
22 analysis
23 beam epitaxy
24 cases
25 chemical analysis
26 composition
27 dissolution
28 doping
29 elastic energy
30 energy
31 epitaxy
32 growth
33 investigation
34 layer
35 method
36 molecular beam epitaxy
37 multilayer structure
38 nanowhiskers
39 particular case
40 phenomenon
41 structure
42 substrate
43 terms
44 thin Ge layer
45 whisker growth
46 whiskers
47 schema:name TEM investigation of Si/Ge multilayer structure incorporated into MBE grown Si whiskers
48 schema:pagination 103-106
49 schema:productId N1377849b4b994a67bd15bd7f08d1a8a2
50 N5d3055ed1c64457c960b1392e750d2df
51 schema:publisher N3db302372fbd455a85e20d26741332ea
52 schema:sameAs https://app.dimensions.ai/details/publication/pub.1023780670
53 https://doi.org/10.1007/3-540-31915-8_21
54 schema:sdDatePublished 2021-12-01T19:57
55 schema:sdLicense https://scigraph.springernature.com/explorer/license/
56 schema:sdPublisher N67bad2b675614861a6cf456a566c2a3f
57 schema:url https://doi.org/10.1007/3-540-31915-8_21
58 sgo:license sg:explorer/license/
59 sgo:sdDataset chapters
60 rdf:type schema:Chapter
61 N1377849b4b994a67bd15bd7f08d1a8a2 schema:name dimensions_id
62 schema:value pub.1023780670
63 rdf:type schema:PropertyValue
64 N236df728b3f94c8daec465551877c039 rdf:first sg:person.010756022447.55
65 rdf:rest Ndea5efbd7ffb40d0bc514e4fcf4454de
66 N292e3768c80a45eea1d0633a5b924200 rdf:first sg:person.01135264674.11
67 rdf:rest rdf:nil
68 N34b2b48f1cea4a9a9804628b4769386b rdf:first sg:person.010544170161.07
69 rdf:rest Nd4e8d0defcfe488ba0c540bcb14f47a4
70 N3db302372fbd455a85e20d26741332ea schema:name Springer Nature
71 rdf:type schema:Organisation
72 N3e651b119bed48ada34361b0a102a472 rdf:first sg:person.016657652147.00
73 rdf:rest N236df728b3f94c8daec465551877c039
74 N5d3055ed1c64457c960b1392e750d2df schema:name doi
75 schema:value 10.1007/3-540-31915-8_21
76 rdf:type schema:PropertyValue
77 N67bad2b675614861a6cf456a566c2a3f schema:name Springer Nature - SN SciGraph project
78 rdf:type schema:Organization
79 N9dad783c3aeb4f39a72268a69d6d5877 schema:familyName Cullis
80 schema:givenName A. G.
81 rdf:type schema:Person
82 Nb01b458c14a7412da3ecdc73e2958dc2 schema:isbn 978-3-540-31914-6
83 978-3-540-31915-3
84 schema:name Microscopy of Semiconducting Materials
85 rdf:type schema:Book
86 Nd4e8d0defcfe488ba0c540bcb14f47a4 rdf:first sg:person.0703230070.47
87 rdf:rest N3e651b119bed48ada34361b0a102a472
88 Nd98e8b5d089b4f98b218f56413dc9cd2 rdf:first N9dad783c3aeb4f39a72268a69d6d5877
89 rdf:rest Nef7a526ba0764689bc32979a0c552e0f
90 Ndea5efbd7ffb40d0bc514e4fcf4454de rdf:first sg:person.011746115551.28
91 rdf:rest N292e3768c80a45eea1d0633a5b924200
92 Nef7a526ba0764689bc32979a0c552e0f rdf:first Nf78089aa3c5f4f49b1a89687149289a1
93 rdf:rest rdf:nil
94 Nf78089aa3c5f4f49b1a89687149289a1 schema:familyName Hutchison
95 schema:givenName J. L.
96 rdf:type schema:Person
97 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
98 schema:name Engineering
99 rdf:type schema:DefinedTerm
100 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
101 schema:name Materials Engineering
102 rdf:type schema:DefinedTerm
103 sg:person.010544170161.07 schema:affiliation grid-institutes:grid.450270.4
104 schema:familyName Zakharov
105 schema:givenName N
106 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010544170161.07
107 rdf:type schema:Person
108 sg:person.010756022447.55 schema:affiliation grid-institutes:grid.450270.4
109 schema:familyName Schubert
110 schema:givenName L
111 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.010756022447.55
112 rdf:type schema:Person
113 sg:person.01135264674.11 schema:affiliation grid-institutes:grid.450270.4
114 schema:familyName Gösele
115 schema:givenName U
116 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01135264674.11
117 rdf:type schema:Person
118 sg:person.011746115551.28 schema:affiliation grid-institutes:grid.450270.4
119 schema:familyName Sokolov
120 schema:givenName L
121 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011746115551.28
122 rdf:type schema:Person
123 sg:person.016657652147.00 schema:affiliation grid-institutes:grid.450270.4
124 schema:familyName Gerth
125 schema:givenName G
126 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.016657652147.00
127 rdf:type schema:Person
128 sg:person.0703230070.47 schema:affiliation grid-institutes:grid.450270.4
129 schema:familyName Werner
130 schema:givenName P
131 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0703230070.47
132 rdf:type schema:Person
133 grid-institutes:grid.450270.4 schema:alternateName Max-Planck-Institute of Microstructure Physics, Weinberg 2, D-06120, Halle(Saale), Germany
134 schema:name Max-Planck-Institute of Microstructure Physics, Weinberg 2, D-06120, Halle(Saale), Germany
135 rdf:type schema:Organization
 




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