Scientific and Technological Issues Related to Rare Earth Oxides: An Introduction View Full Text


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Chapter Info

DATE

2006

AUTHORS

Giovanna Scarel , Axel Svane , Marco Fanciulli

ABSTRACT

Significant research effort is currently being devoted to study deposition, dielectric, and electronic properties of binary rare earth oxides, as well as of complex oxides based on rare earth elements. Most of the motivations justifying this effort are found in the field of microelectronics – especially in the search of high dielectric constant oxides as candidates to substitute SiO2 – and these will be mostly discussed. Open problems and issues from the scientific and technological point of view are discussed, and applications in fields other than microelectronics (such as spintronics) are also mentioned. More... »

PAGES

1-14

References to SciGraph publications

Book

TITLE

Rare Earth Oxide Thin Films

ISBN

978-3-540-35796-4

Author Affiliations

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/11499893_1

DOI

http://dx.doi.org/10.1007/11499893_1

DIMENSIONS

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