Can Leis Spectra Contain Information On Surface Electronic Structure Of High-K Dielectrics? View Full Text


Ontology type: schema:Chapter     


Chapter Info

DATE

2006

AUTHORS

Y. LEBEDINSKII , A. ZENKEVICH , M. PUSHKIN , N. BARANTSEV , V. TROYAN , V. NEVOLIN

ABSTRACT

While investigating the surface composition of thin layers containing Hf with low energy ion spectroscopy (LEIS) utilizing He+ ions with energy E 0=300÷800 eV, the fine structure of Hf line was observed. Hf spectrum consists of several narrow lines on top of a broad asymmetric peak. The number of lines and their separation does not depend on He+ incident energy, but rather on the chemical composition of the surface layer: spectrum of metallic Hf is remarkably different from that of HfO2, and, on the contrary, is very similar to HfSix. The observed effect is explained in terms of single electronic excitations due to promotion of Hf-He+ molecular orbitals during impact which leads to the inelastic energy loss of He+. Since LEIS is sensitive to the utmost surface layer, the observed effect can be potentially utilized to probe the surface electronic structure of compounds containing Hf. More... »

PAGES

323-330

Book

TITLE

Defects in High-k Gate Dielectric Stacks

ISBN

1-4020-4365-1

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/1-4020-4367-8_25

DOI

http://dx.doi.org/10.1007/1-4020-4367-8_25

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1009397554


Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
Incoming Citations Browse incoming citations for this publication using opencitations.net

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0306", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Chemistry (incl. Structural)", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/03", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Chemical Sciences", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Moscow Engineering Physics Institute", 
          "id": "https://www.grid.ac/institutes/grid.183446.c", 
          "name": [
            "Moscow Engineering Physics Institute, State University, Moscow, 115409, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "LEBEDINSKII", 
        "givenName": "Y.", 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Moscow Engineering Physics Institute", 
          "id": "https://www.grid.ac/institutes/grid.183446.c", 
          "name": [
            "Moscow Engineering Physics Institute, State University, Moscow, 115409, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "ZENKEVICH", 
        "givenName": "A.", 
        "id": "sg:person.013634775250.33", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013634775250.33"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Moscow Engineering Physics Institute", 
          "id": "https://www.grid.ac/institutes/grid.183446.c", 
          "name": [
            "Moscow Engineering Physics Institute, State University, Moscow, 115409, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "PUSHKIN", 
        "givenName": "M.", 
        "id": "sg:person.07367503323.09", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07367503323.09"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Moscow Engineering Physics Institute", 
          "id": "https://www.grid.ac/institutes/grid.183446.c", 
          "name": [
            "Moscow Engineering Physics Institute, State University, Moscow, 115409, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "BARANTSEV", 
        "givenName": "N.", 
        "id": "sg:person.012215303747.81", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012215303747.81"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Moscow Engineering Physics Institute", 
          "id": "https://www.grid.ac/institutes/grid.183446.c", 
          "name": [
            "Moscow Engineering Physics Institute, State University, Moscow, 115409, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "TROYAN", 
        "givenName": "V.", 
        "id": "sg:person.01217757422.71", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01217757422.71"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Moscow Engineering Physics Institute", 
          "id": "https://www.grid.ac/institutes/grid.183446.c", 
          "name": [
            "Moscow Engineering Physics Institute, State University, Moscow, 115409, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "NEVOLIN", 
        "givenName": "V.", 
        "id": "sg:person.012476536477.36", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012476536477.36"
        ], 
        "type": "Person"
      }
    ], 
    "citation": [
      {
        "id": "https://doi.org/10.1088/0022-3719/3/2/010", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1039537197"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1361065", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057698974"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1063/1.1521517", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1057715934"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrev.164.131", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060436922"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrev.164.131", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060436922"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.16.2613", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060522907"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.16.2613", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060522907"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.40.4119", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060551900"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.40.4119", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060551900"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.48.17255", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060568012"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.48.17255", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060568012"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.51.4463", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060576205"
        ], 
        "type": "CreativeWork"
      }, 
      {
        "id": "https://doi.org/10.1103/physrevb.51.4463", 
        "sameAs": [
          "https://app.dimensions.ai/details/publication/pub.1060576205"
        ], 
        "type": "CreativeWork"
      }
    ], 
    "datePublished": "2006", 
    "datePublishedReg": "2006-01-01", 
    "description": "While investigating the surface composition of thin layers containing Hf with low energy ion spectroscopy (LEIS) utilizing He+ ions with energy E 0=300\u00f7800 eV, the fine structure of Hf line was observed. Hf spectrum consists of several narrow lines on top of a broad asymmetric peak. The number of lines and their separation does not depend on He+ incident energy, but rather on the chemical composition of the surface layer: spectrum of metallic Hf is remarkably different from that of HfO2, and, on the contrary, is very similar to HfSix. The observed effect is explained in terms of single electronic excitations due to promotion of Hf-He+ molecular orbitals during impact which leads to the inelastic energy loss of He+. Since LEIS is sensitive to the utmost surface layer, the observed effect can be potentially utilized to probe the surface electronic structure of compounds containing Hf.", 
    "editor": [
      {
        "familyName": "Gusev", 
        "givenName": "Evgeni", 
        "type": "Person"
      }
    ], 
    "genre": "chapter", 
    "id": "sg:pub.10.1007/1-4020-4367-8_25", 
    "inLanguage": [
      "en"
    ], 
    "isAccessibleForFree": false, 
    "isPartOf": {
      "isbn": [
        "1-4020-4365-1"
      ], 
      "name": "Defects in High-k Gate Dielectric Stacks", 
      "type": "Book"
    }, 
    "name": "CAN LEIS SPECTRA CONTAIN INFORMATION ON SURFACE ELECTRONIC STRUCTURE OF HIGH-K DIELECTRICS?", 
    "pagination": "323-330", 
    "productId": [
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/1-4020-4367-8_25"
        ]
      }, 
      {
        "name": "readcube_id", 
        "type": "PropertyValue", 
        "value": [
          "2cc454fc605cec13865e79293d8c6f6dd82813ec14bd4f909d2d6518cabbb457"
        ]
      }, 
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1009397554"
        ]
      }
    ], 
    "publisher": {
      "location": "Dordrecht", 
      "name": "Kluwer Academic Publishers", 
      "type": "Organisation"
    }, 
    "sameAs": [
      "https://doi.org/10.1007/1-4020-4367-8_25", 
      "https://app.dimensions.ai/details/publication/pub.1009397554"
    ], 
    "sdDataset": "chapters", 
    "sdDatePublished": "2019-04-15T11:32", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000001_0000000264/records_8660_00000248.jsonl", 
    "type": "Chapter", 
    "url": "http://link.springer.com/10.1007/1-4020-4367-8_25"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1007/1-4020-4367-8_25'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1007/1-4020-4367-8_25'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1007/1-4020-4367-8_25'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1007/1-4020-4367-8_25'


 

This table displays all metadata directly associated to this object as RDF triples.

122 TRIPLES      23 PREDICATES      35 URIs      20 LITERALS      8 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/1-4020-4367-8_25 schema:about anzsrc-for:03
2 anzsrc-for:0306
3 schema:author N211250a12ca9475e85ef80d520124306
4 schema:citation https://doi.org/10.1063/1.1361065
5 https://doi.org/10.1063/1.1521517
6 https://doi.org/10.1088/0022-3719/3/2/010
7 https://doi.org/10.1103/physrev.164.131
8 https://doi.org/10.1103/physrevb.16.2613
9 https://doi.org/10.1103/physrevb.40.4119
10 https://doi.org/10.1103/physrevb.48.17255
11 https://doi.org/10.1103/physrevb.51.4463
12 schema:datePublished 2006
13 schema:datePublishedReg 2006-01-01
14 schema:description While investigating the surface composition of thin layers containing Hf with low energy ion spectroscopy (LEIS) utilizing He+ ions with energy E 0=300÷800 eV, the fine structure of Hf line was observed. Hf spectrum consists of several narrow lines on top of a broad asymmetric peak. The number of lines and their separation does not depend on He+ incident energy, but rather on the chemical composition of the surface layer: spectrum of metallic Hf is remarkably different from that of HfO2, and, on the contrary, is very similar to HfSix. The observed effect is explained in terms of single electronic excitations due to promotion of Hf-He+ molecular orbitals during impact which leads to the inelastic energy loss of He+. Since LEIS is sensitive to the utmost surface layer, the observed effect can be potentially utilized to probe the surface electronic structure of compounds containing Hf.
15 schema:editor N9ea0fe909b134998a33055510e3fe984
16 schema:genre chapter
17 schema:inLanguage en
18 schema:isAccessibleForFree false
19 schema:isPartOf Nc7f17f7b4ef645b797dd6f31fba004bb
20 schema:name CAN LEIS SPECTRA CONTAIN INFORMATION ON SURFACE ELECTRONIC STRUCTURE OF HIGH-K DIELECTRICS?
21 schema:pagination 323-330
22 schema:productId Nbe83cbd91e5c4001b8b99f8b3fc3e036
23 Nd0b0230dea9741a89070a6451b91316a
24 Nde26b1796f3444e1ba6d962a5a26b1c6
25 schema:publisher N76a4028b57004e8caed1ce30b7288126
26 schema:sameAs https://app.dimensions.ai/details/publication/pub.1009397554
27 https://doi.org/10.1007/1-4020-4367-8_25
28 schema:sdDatePublished 2019-04-15T11:32
29 schema:sdLicense https://scigraph.springernature.com/explorer/license/
30 schema:sdPublisher N04abfe3d21274846b8cac4aeed63f968
31 schema:url http://link.springer.com/10.1007/1-4020-4367-8_25
32 sgo:license sg:explorer/license/
33 sgo:sdDataset chapters
34 rdf:type schema:Chapter
35 N04abfe3d21274846b8cac4aeed63f968 schema:name Springer Nature - SN SciGraph project
36 rdf:type schema:Organization
37 N211250a12ca9475e85ef80d520124306 rdf:first N84c5b4c7109c40c19807066d4279c2d1
38 rdf:rest Nd5bf9c602198400c8564fe50a43c390d
39 N467065cba0c3403e879799b25078d691 rdf:first sg:person.012215303747.81
40 rdf:rest Ne4c74434a17e44bf8334cd4f761bb830
41 N55801e126610479296df4f1a75620a2d rdf:first sg:person.07367503323.09
42 rdf:rest N467065cba0c3403e879799b25078d691
43 N76a4028b57004e8caed1ce30b7288126 schema:location Dordrecht
44 schema:name Kluwer Academic Publishers
45 rdf:type schema:Organisation
46 N84c5b4c7109c40c19807066d4279c2d1 schema:affiliation https://www.grid.ac/institutes/grid.183446.c
47 schema:familyName LEBEDINSKII
48 schema:givenName Y.
49 rdf:type schema:Person
50 N9d8fcd25761a42f1ae5d3aee2019d0aa rdf:first sg:person.012476536477.36
51 rdf:rest rdf:nil
52 N9ea0fe909b134998a33055510e3fe984 rdf:first Na35d0ba506f045ef82c8061380faac86
53 rdf:rest rdf:nil
54 Na35d0ba506f045ef82c8061380faac86 schema:familyName Gusev
55 schema:givenName Evgeni
56 rdf:type schema:Person
57 Nbe83cbd91e5c4001b8b99f8b3fc3e036 schema:name doi
58 schema:value 10.1007/1-4020-4367-8_25
59 rdf:type schema:PropertyValue
60 Nc7f17f7b4ef645b797dd6f31fba004bb schema:isbn 1-4020-4365-1
61 schema:name Defects in High-k Gate Dielectric Stacks
62 rdf:type schema:Book
63 Nd0b0230dea9741a89070a6451b91316a schema:name dimensions_id
64 schema:value pub.1009397554
65 rdf:type schema:PropertyValue
66 Nd5bf9c602198400c8564fe50a43c390d rdf:first sg:person.013634775250.33
67 rdf:rest N55801e126610479296df4f1a75620a2d
68 Nde26b1796f3444e1ba6d962a5a26b1c6 schema:name readcube_id
69 schema:value 2cc454fc605cec13865e79293d8c6f6dd82813ec14bd4f909d2d6518cabbb457
70 rdf:type schema:PropertyValue
71 Ne4c74434a17e44bf8334cd4f761bb830 rdf:first sg:person.01217757422.71
72 rdf:rest N9d8fcd25761a42f1ae5d3aee2019d0aa
73 anzsrc-for:03 schema:inDefinedTermSet anzsrc-for:
74 schema:name Chemical Sciences
75 rdf:type schema:DefinedTerm
76 anzsrc-for:0306 schema:inDefinedTermSet anzsrc-for:
77 schema:name Physical Chemistry (incl. Structural)
78 rdf:type schema:DefinedTerm
79 sg:person.01217757422.71 schema:affiliation https://www.grid.ac/institutes/grid.183446.c
80 schema:familyName TROYAN
81 schema:givenName V.
82 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01217757422.71
83 rdf:type schema:Person
84 sg:person.012215303747.81 schema:affiliation https://www.grid.ac/institutes/grid.183446.c
85 schema:familyName BARANTSEV
86 schema:givenName N.
87 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012215303747.81
88 rdf:type schema:Person
89 sg:person.012476536477.36 schema:affiliation https://www.grid.ac/institutes/grid.183446.c
90 schema:familyName NEVOLIN
91 schema:givenName V.
92 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.012476536477.36
93 rdf:type schema:Person
94 sg:person.013634775250.33 schema:affiliation https://www.grid.ac/institutes/grid.183446.c
95 schema:familyName ZENKEVICH
96 schema:givenName A.
97 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013634775250.33
98 rdf:type schema:Person
99 sg:person.07367503323.09 schema:affiliation https://www.grid.ac/institutes/grid.183446.c
100 schema:familyName PUSHKIN
101 schema:givenName M.
102 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07367503323.09
103 rdf:type schema:Person
104 https://doi.org/10.1063/1.1361065 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057698974
105 rdf:type schema:CreativeWork
106 https://doi.org/10.1063/1.1521517 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057715934
107 rdf:type schema:CreativeWork
108 https://doi.org/10.1088/0022-3719/3/2/010 schema:sameAs https://app.dimensions.ai/details/publication/pub.1039537197
109 rdf:type schema:CreativeWork
110 https://doi.org/10.1103/physrev.164.131 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060436922
111 rdf:type schema:CreativeWork
112 https://doi.org/10.1103/physrevb.16.2613 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060522907
113 rdf:type schema:CreativeWork
114 https://doi.org/10.1103/physrevb.40.4119 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060551900
115 rdf:type schema:CreativeWork
116 https://doi.org/10.1103/physrevb.48.17255 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060568012
117 rdf:type schema:CreativeWork
118 https://doi.org/10.1103/physrevb.51.4463 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060576205
119 rdf:type schema:CreativeWork
120 https://www.grid.ac/institutes/grid.183446.c schema:alternateName Moscow Engineering Physics Institute
121 schema:name Moscow Engineering Physics Institute, State University, Moscow, 115409, Russia
122 rdf:type schema:Organization
 




Preview window. Press ESC to close (or click here)


...