Synthesis and Properties of TiB2/TiN and TiB2/B4C Films View Full Text


Ontology type: schema:Chapter     


Chapter Info

DATE

2004

AUTHORS

R.A. Andrievski , G.V. Kalinnikov

ABSTRACT

The TiB2/TiN and TiB2/B4C films with a thickness of approximately 1–2 μm were prepared by magnetron non-reactive d.c./r.f. sputtering on Si and stainless steel substrates. Sintered and hot-pressed targets of the individual compounds (TiB2, TiN and B4C) and their mixtures (25/75, 50/50 and 75/25 in weight percents) were used in the film preparation. These films were deposited without and with additional external magnetic fields. The films were characterized by means of their chemical composition, structure, grain size and microhardness. The main result of the experiments is the increase of hardness by 15–65% as revealed both for crystalline films and amorphous ones. The AFM images also showed a more fine-grained morphology for the film deposited with external magnetic field. In the case of crystalline films, the decrease of grain size and especially of standard deviation of the grain size values were also fixed. Some samples were vacuum-annealed up to 1000°C. More... »

PAGES

175-182

Book

TITLE

Nanostructured Thin Films and Nanodispersion Strengthened Coatings

ISBN

978-1-4020-2220-3
978-1-4020-2222-7

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/1-4020-2222-0_17

DOI

http://dx.doi.org/10.1007/1-4020-2222-0_17

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1017474466


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Materials Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Institute of Problems of Chemical Physics, Russian Academy of Sciences, 142432, Chernogolovka, Moscow Region, Russia", 
          "id": "http://www.grid.ac/institutes/grid.418949.9", 
          "name": [
            "Institute of Problems of Chemical Physics, Russian Academy of Sciences, 142432, Chernogolovka, Moscow Region, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Andrievski", 
        "givenName": "R.A.", 
        "id": "sg:person.013433153367.30", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013433153367.30"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Institute of Problems of Chemical Physics, Russian Academy of Sciences, 142432, Chernogolovka, Moscow Region, Russia", 
          "id": "http://www.grid.ac/institutes/grid.418949.9", 
          "name": [
            "Institute of Problems of Chemical Physics, Russian Academy of Sciences, 142432, Chernogolovka, Moscow Region, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Kalinnikov", 
        "givenName": "G.V.", 
        "id": "sg:person.011112713506.66", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011112713506.66"
        ], 
        "type": "Person"
      }
    ], 
    "datePublished": "2004", 
    "datePublishedReg": "2004-01-01", 
    "description": "The TiB2/TiN and TiB2/B4C films with a thickness of approximately 1\u20132 \u03bcm were prepared by magnetron non-reactive d.c./r.f. sputtering on Si and stainless steel substrates. Sintered and hot-pressed targets of the individual compounds (TiB2, TiN and B4C) and their mixtures (25/75, 50/50 and 75/25 in weight percents) were used in the film preparation. These films were deposited without and with additional external magnetic fields. The films were characterized by means of their chemical composition, structure, grain size and microhardness. The main result of the experiments is the increase of hardness by 15\u201365% as revealed both for crystalline films and amorphous ones. The AFM images also showed a more fine-grained morphology for the film deposited with external magnetic field. In the case of crystalline films, the decrease of grain size and especially of standard deviation of the grain size values were also fixed. Some samples were vacuum-annealed up to 1000\u00b0C.", 
    "editor": [
      {
        "familyName": "Voevodin", 
        "givenName": "Andrey A.", 
        "type": "Person"
      }, 
      {
        "familyName": "Shtansky", 
        "givenName": "Dmitry V.", 
        "type": "Person"
      }, 
      {
        "familyName": "Levashov", 
        "givenName": "Evgeny A.", 
        "type": "Person"
      }, 
      {
        "familyName": "Moore", 
        "givenName": "John J.", 
        "type": "Person"
      }
    ], 
    "genre": "chapter", 
    "id": "sg:pub.10.1007/1-4020-2222-0_17", 
    "inLanguage": "en", 
    "isAccessibleForFree": false, 
    "isPartOf": {
      "isbn": [
        "978-1-4020-2220-3", 
        "978-1-4020-2222-7"
      ], 
      "name": "Nanostructured Thin Films and Nanodispersion Strengthened Coatings", 
      "type": "Book"
    }, 
    "keywords": [
      "B4C films", 
      "grain size", 
      "crystalline films", 
      "stainless steel substrates", 
      "additional external magnetic field", 
      "external magnetic field", 
      "increase of hardness", 
      "grain size values", 
      "steel substrate", 
      "pressed target", 
      "film preparation", 
      "magnetic field", 
      "amorphous ones", 
      "films", 
      "AFM images", 
      "tin", 
      "size values", 
      "microhardness", 
      "magnetron", 
      "chemical composition", 
      "hardness", 
      "Si", 
      "thickness", 
      "field", 
      "standard deviation", 
      "substrate", 
      "size", 
      "properties", 
      "morphology", 
      "mixture", 
      "structure", 
      "experiments", 
      "deviation", 
      "composition", 
      "preparation", 
      "images", 
      "results", 
      "values", 
      "means", 
      "increase", 
      "one", 
      "samples", 
      "decrease", 
      "main results", 
      "synthesis", 
      "individual compounds", 
      "cases", 
      "compounds", 
      "target"
    ], 
    "name": "Synthesis and Properties of TiB2/TiN and TiB2/B4C Films", 
    "pagination": "175-182", 
    "productId": [
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1017474466"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/1-4020-2222-0_17"
        ]
      }
    ], 
    "publisher": {
      "name": "Springer Nature", 
      "type": "Organisation"
    }, 
    "sameAs": [
      "https://doi.org/10.1007/1-4020-2222-0_17", 
      "https://app.dimensions.ai/details/publication/pub.1017474466"
    ], 
    "sdDataset": "chapters", 
    "sdDatePublished": "2022-05-20T07:42", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-springernature-scigraph/baseset/20220519/entities/gbq_results/chapter/chapter_180.jsonl", 
    "type": "Chapter", 
    "url": "https://doi.org/10.1007/1-4020-2222-0_17"
  }
]
 

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This table displays all metadata directly associated to this object as RDF triples.

131 TRIPLES      23 PREDICATES      75 URIs      68 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/1-4020-2222-0_17 schema:about anzsrc-for:09
2 anzsrc-for:0912
3 schema:author N5be42c4af893418aa14fcd2d2bb91133
4 schema:datePublished 2004
5 schema:datePublishedReg 2004-01-01
6 schema:description The TiB2/TiN and TiB2/B4C films with a thickness of approximately 1–2 μm were prepared by magnetron non-reactive d.c./r.f. sputtering on Si and stainless steel substrates. Sintered and hot-pressed targets of the individual compounds (TiB2, TiN and B4C) and their mixtures (25/75, 50/50 and 75/25 in weight percents) were used in the film preparation. These films were deposited without and with additional external magnetic fields. The films were characterized by means of their chemical composition, structure, grain size and microhardness. The main result of the experiments is the increase of hardness by 15–65% as revealed both for crystalline films and amorphous ones. The AFM images also showed a more fine-grained morphology for the film deposited with external magnetic field. In the case of crystalline films, the decrease of grain size and especially of standard deviation of the grain size values were also fixed. Some samples were vacuum-annealed up to 1000°C.
7 schema:editor N4797023249b74c908a998f06d6fd891d
8 schema:genre chapter
9 schema:inLanguage en
10 schema:isAccessibleForFree false
11 schema:isPartOf N4f42025fb8014af9876a40bcce1a08f2
12 schema:keywords AFM images
13 B4C films
14 Si
15 additional external magnetic field
16 amorphous ones
17 cases
18 chemical composition
19 composition
20 compounds
21 crystalline films
22 decrease
23 deviation
24 experiments
25 external magnetic field
26 field
27 film preparation
28 films
29 grain size
30 grain size values
31 hardness
32 images
33 increase
34 increase of hardness
35 individual compounds
36 magnetic field
37 magnetron
38 main results
39 means
40 microhardness
41 mixture
42 morphology
43 one
44 preparation
45 pressed target
46 properties
47 results
48 samples
49 size
50 size values
51 stainless steel substrates
52 standard deviation
53 steel substrate
54 structure
55 substrate
56 synthesis
57 target
58 thickness
59 tin
60 values
61 schema:name Synthesis and Properties of TiB2/TiN and TiB2/B4C Films
62 schema:pagination 175-182
63 schema:productId N5cd8666fd1ff400889162a2b1959552e
64 Nb14dd28dfb7340deb55c4a6583b7731d
65 schema:publisher Nfdb81645f7684a5cb00ffa1ce3721fa6
66 schema:sameAs https://app.dimensions.ai/details/publication/pub.1017474466
67 https://doi.org/10.1007/1-4020-2222-0_17
68 schema:sdDatePublished 2022-05-20T07:42
69 schema:sdLicense https://scigraph.springernature.com/explorer/license/
70 schema:sdPublisher N15eb42ac5c124f06b031a5bdc400461f
71 schema:url https://doi.org/10.1007/1-4020-2222-0_17
72 sgo:license sg:explorer/license/
73 sgo:sdDataset chapters
74 rdf:type schema:Chapter
75 N15eb42ac5c124f06b031a5bdc400461f schema:name Springer Nature - SN SciGraph project
76 rdf:type schema:Organization
77 N1c60603230384bff9c7c79011c35e318 rdf:first Nec3904e6009a48f59c92f6e385c0c4e4
78 rdf:rest Na0ee671fb3204232a09963cae136c795
79 N223f3bde2027499e9ce2943f689de99c schema:familyName Moore
80 schema:givenName John J.
81 rdf:type schema:Person
82 N38a75a68631e41adb03502119dc17db2 rdf:first sg:person.011112713506.66
83 rdf:rest rdf:nil
84 N4797023249b74c908a998f06d6fd891d rdf:first Nedf2cf6e0a4e41f683301f965d790190
85 rdf:rest N1c60603230384bff9c7c79011c35e318
86 N4f42025fb8014af9876a40bcce1a08f2 schema:isbn 978-1-4020-2220-3
87 978-1-4020-2222-7
88 schema:name Nanostructured Thin Films and Nanodispersion Strengthened Coatings
89 rdf:type schema:Book
90 N5be42c4af893418aa14fcd2d2bb91133 rdf:first sg:person.013433153367.30
91 rdf:rest N38a75a68631e41adb03502119dc17db2
92 N5cd8666fd1ff400889162a2b1959552e schema:name dimensions_id
93 schema:value pub.1017474466
94 rdf:type schema:PropertyValue
95 N7021d6eb149e4bb997a8bbad98b35c1a schema:familyName Levashov
96 schema:givenName Evgeny A.
97 rdf:type schema:Person
98 Na0ee671fb3204232a09963cae136c795 rdf:first N7021d6eb149e4bb997a8bbad98b35c1a
99 rdf:rest Nd1993224872740079e6669cd178201a7
100 Nb14dd28dfb7340deb55c4a6583b7731d schema:name doi
101 schema:value 10.1007/1-4020-2222-0_17
102 rdf:type schema:PropertyValue
103 Nd1993224872740079e6669cd178201a7 rdf:first N223f3bde2027499e9ce2943f689de99c
104 rdf:rest rdf:nil
105 Nec3904e6009a48f59c92f6e385c0c4e4 schema:familyName Shtansky
106 schema:givenName Dmitry V.
107 rdf:type schema:Person
108 Nedf2cf6e0a4e41f683301f965d790190 schema:familyName Voevodin
109 schema:givenName Andrey A.
110 rdf:type schema:Person
111 Nfdb81645f7684a5cb00ffa1ce3721fa6 schema:name Springer Nature
112 rdf:type schema:Organisation
113 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
114 schema:name Engineering
115 rdf:type schema:DefinedTerm
116 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
117 schema:name Materials Engineering
118 rdf:type schema:DefinedTerm
119 sg:person.011112713506.66 schema:affiliation grid-institutes:grid.418949.9
120 schema:familyName Kalinnikov
121 schema:givenName G.V.
122 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011112713506.66
123 rdf:type schema:Person
124 sg:person.013433153367.30 schema:affiliation grid-institutes:grid.418949.9
125 schema:familyName Andrievski
126 schema:givenName R.A.
127 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013433153367.30
128 rdf:type schema:Person
129 grid-institutes:grid.418949.9 schema:alternateName Institute of Problems of Chemical Physics, Russian Academy of Sciences, 142432, Chernogolovka, Moscow Region, Russia
130 schema:name Institute of Problems of Chemical Physics, Russian Academy of Sciences, 142432, Chernogolovka, Moscow Region, Russia
131 rdf:type schema:Organization
 




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