Synthesis and Properties of TiB2/TiN and TiB2/B4C Films View Full Text


Ontology type: schema:Chapter     


Chapter Info

DATE

2004

AUTHORS

R.A. Andrievski , G.V. Kalinnikov

ABSTRACT

The TiB2/TiN and TiB2/B4C films with a thickness of approximately 1–2 μm were prepared by magnetron non-reactive d.c./r.f. sputtering on Si and stainless steel substrates. Sintered and hot-pressed targets of the individual compounds (TiB2, TiN and B4C) and their mixtures (25/75, 50/50 and 75/25 in weight percents) were used in the film preparation. These films were deposited without and with additional external magnetic fields. The films were characterized by means of their chemical composition, structure, grain size and microhardness. The main result of the experiments is the increase of hardness by 15–65% as revealed both for crystalline films and amorphous ones. The AFM images also showed a more fine-grained morphology for the film deposited with external magnetic field. In the case of crystalline films, the decrease of grain size and especially of standard deviation of the grain size values were also fixed. Some samples were vacuum-annealed up to 1000°C. More... »

PAGES

175-182

Book

TITLE

Nanostructured Thin Films and Nanodispersion Strengthened Coatings

ISBN

978-1-4020-2220-3
978-1-4020-2222-7

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/1-4020-2222-0_17

DOI

http://dx.doi.org/10.1007/1-4020-2222-0_17

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1017474466


Indexing Status Check whether this publication has been indexed by Scopus and Web Of Science using the SN Indexing Status Tool
Incoming Citations Browse incoming citations for this publication using opencitations.net

JSON-LD is the canonical representation for SciGraph data.

TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Engineering", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0912", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Materials Engineering", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Institute of Problems of Chemical Physics, Russian Academy of Sciences, 142432, Chernogolovka, Moscow Region, Russia", 
          "id": "http://www.grid.ac/institutes/grid.418949.9", 
          "name": [
            "Institute of Problems of Chemical Physics, Russian Academy of Sciences, 142432, Chernogolovka, Moscow Region, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Andrievski", 
        "givenName": "R.A.", 
        "id": "sg:person.013433153367.30", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013433153367.30"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Institute of Problems of Chemical Physics, Russian Academy of Sciences, 142432, Chernogolovka, Moscow Region, Russia", 
          "id": "http://www.grid.ac/institutes/grid.418949.9", 
          "name": [
            "Institute of Problems of Chemical Physics, Russian Academy of Sciences, 142432, Chernogolovka, Moscow Region, Russia"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Kalinnikov", 
        "givenName": "G.V.", 
        "id": "sg:person.011112713506.66", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011112713506.66"
        ], 
        "type": "Person"
      }
    ], 
    "datePublished": "2004", 
    "datePublishedReg": "2004-01-01", 
    "description": "The TiB2/TiN and TiB2/B4C films with a thickness of approximately 1\u20132 \u03bcm were prepared by magnetron non-reactive d.c./r.f. sputtering on Si and stainless steel substrates. Sintered and hot-pressed targets of the individual compounds (TiB2, TiN and B4C) and their mixtures (25/75, 50/50 and 75/25 in weight percents) were used in the film preparation. These films were deposited without and with additional external magnetic fields. The films were characterized by means of their chemical composition, structure, grain size and microhardness. The main result of the experiments is the increase of hardness by 15\u201365% as revealed both for crystalline films and amorphous ones. The AFM images also showed a more fine-grained morphology for the film deposited with external magnetic field. In the case of crystalline films, the decrease of grain size and especially of standard deviation of the grain size values were also fixed. Some samples were vacuum-annealed up to 1000\u00b0C.", 
    "editor": [
      {
        "familyName": "Voevodin", 
        "givenName": "Andrey A.", 
        "type": "Person"
      }, 
      {
        "familyName": "Shtansky", 
        "givenName": "Dmitry V.", 
        "type": "Person"
      }, 
      {
        "familyName": "Levashov", 
        "givenName": "Evgeny A.", 
        "type": "Person"
      }, 
      {
        "familyName": "Moore", 
        "givenName": "John J.", 
        "type": "Person"
      }
    ], 
    "genre": "chapter", 
    "id": "sg:pub.10.1007/1-4020-2222-0_17", 
    "inLanguage": "en", 
    "isAccessibleForFree": false, 
    "isPartOf": {
      "isbn": [
        "978-1-4020-2220-3", 
        "978-1-4020-2222-7"
      ], 
      "name": "Nanostructured Thin Films and Nanodispersion Strengthened Coatings", 
      "type": "Book"
    }, 
    "keywords": [
      "TiB2/TiN", 
      "B4C films", 
      "grain size", 
      "stainless steel substrates", 
      "additional external magnetic field", 
      "crystalline films", 
      "increase of hardness", 
      "external magnetic field", 
      "grain size values", 
      "steel substrate", 
      "pressed target", 
      "film preparation", 
      "magnetic field", 
      "films", 
      "amorphous ones", 
      "tin", 
      "AFM images", 
      "size values", 
      "microhardness", 
      "magnetron", 
      "hardness", 
      "chemical composition", 
      "Si", 
      "thickness", 
      "field", 
      "substrate", 
      "properties", 
      "size", 
      "morphology", 
      "standard deviation", 
      "mixture", 
      "structure", 
      "experiments", 
      "composition", 
      "preparation", 
      "deviation", 
      "images", 
      "results", 
      "means", 
      "values", 
      "increase", 
      "one", 
      "decrease", 
      "samples", 
      "main results", 
      "synthesis", 
      "cases", 
      "compounds", 
      "individual compounds", 
      "target", 
      "TiB2/B4C films"
    ], 
    "name": "Synthesis and Properties of TiB2/TiN and TiB2/B4C Films", 
    "pagination": "175-182", 
    "productId": [
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1017474466"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/1-4020-2222-0_17"
        ]
      }
    ], 
    "publisher": {
      "name": "Springer Nature", 
      "type": "Organisation"
    }, 
    "sameAs": [
      "https://doi.org/10.1007/1-4020-2222-0_17", 
      "https://app.dimensions.ai/details/publication/pub.1017474466"
    ], 
    "sdDataset": "chapters", 
    "sdDatePublished": "2022-01-01T19:10", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-springernature-scigraph/baseset/20220101/entities/gbq_results/chapter/chapter_17.jsonl", 
    "type": "Chapter", 
    "url": "https://doi.org/10.1007/1-4020-2222-0_17"
  }
]
 

Download the RDF metadata as:  json-ld nt turtle xml License info

HOW TO GET THIS DATA PROGRAMMATICALLY:

JSON-LD is a popular format for linked data which is fully compatible with JSON.

curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1007/1-4020-2222-0_17'

N-Triples is a line-based linked data format ideal for batch operations.

curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1007/1-4020-2222-0_17'

Turtle is a human-readable linked data format.

curl -H 'Accept: text/turtle' 'https://scigraph.springernature.com/pub.10.1007/1-4020-2222-0_17'

RDF/XML is a standard XML format for linked data.

curl -H 'Accept: application/rdf+xml' 'https://scigraph.springernature.com/pub.10.1007/1-4020-2222-0_17'


 

This table displays all metadata directly associated to this object as RDF triples.

133 TRIPLES      23 PREDICATES      77 URIs      70 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/1-4020-2222-0_17 schema:about anzsrc-for:09
2 anzsrc-for:0912
3 schema:author N139364d79f1349a58a088ae2ed8ba015
4 schema:datePublished 2004
5 schema:datePublishedReg 2004-01-01
6 schema:description The TiB2/TiN and TiB2/B4C films with a thickness of approximately 1–2 μm were prepared by magnetron non-reactive d.c./r.f. sputtering on Si and stainless steel substrates. Sintered and hot-pressed targets of the individual compounds (TiB2, TiN and B4C) and their mixtures (25/75, 50/50 and 75/25 in weight percents) were used in the film preparation. These films were deposited without and with additional external magnetic fields. The films were characterized by means of their chemical composition, structure, grain size and microhardness. The main result of the experiments is the increase of hardness by 15–65% as revealed both for crystalline films and amorphous ones. The AFM images also showed a more fine-grained morphology for the film deposited with external magnetic field. In the case of crystalline films, the decrease of grain size and especially of standard deviation of the grain size values were also fixed. Some samples were vacuum-annealed up to 1000°C.
7 schema:editor N667a2880db5f442f99e80342eb9f4ab8
8 schema:genre chapter
9 schema:inLanguage en
10 schema:isAccessibleForFree false
11 schema:isPartOf N8e3888a9d5db437289fb42f31f4ba5bd
12 schema:keywords AFM images
13 B4C films
14 Si
15 TiB2/B4C films
16 TiB2/TiN
17 additional external magnetic field
18 amorphous ones
19 cases
20 chemical composition
21 composition
22 compounds
23 crystalline films
24 decrease
25 deviation
26 experiments
27 external magnetic field
28 field
29 film preparation
30 films
31 grain size
32 grain size values
33 hardness
34 images
35 increase
36 increase of hardness
37 individual compounds
38 magnetic field
39 magnetron
40 main results
41 means
42 microhardness
43 mixture
44 morphology
45 one
46 preparation
47 pressed target
48 properties
49 results
50 samples
51 size
52 size values
53 stainless steel substrates
54 standard deviation
55 steel substrate
56 structure
57 substrate
58 synthesis
59 target
60 thickness
61 tin
62 values
63 schema:name Synthesis and Properties of TiB2/TiN and TiB2/B4C Films
64 schema:pagination 175-182
65 schema:productId N14d2797074034f93ac9a6cdba2c9af3a
66 N591a803723754bbdacdbbc547b455109
67 schema:publisher N02516164b7e54ab9aecfbf3fa47c6f09
68 schema:sameAs https://app.dimensions.ai/details/publication/pub.1017474466
69 https://doi.org/10.1007/1-4020-2222-0_17
70 schema:sdDatePublished 2022-01-01T19:10
71 schema:sdLicense https://scigraph.springernature.com/explorer/license/
72 schema:sdPublisher N14f803ca876542c4bee0d749e743f0a0
73 schema:url https://doi.org/10.1007/1-4020-2222-0_17
74 sgo:license sg:explorer/license/
75 sgo:sdDataset chapters
76 rdf:type schema:Chapter
77 N02516164b7e54ab9aecfbf3fa47c6f09 schema:name Springer Nature
78 rdf:type schema:Organisation
79 N03631afcdd79481784453658bc3d36bf rdf:first Nd7c1da55d103402ba642b14f7d6912c2
80 rdf:rest Naf47f8e3598b488a92f70c8a65ab248c
81 N05925dc4b8df426ab103bf53ab2b18bc schema:familyName Moore
82 schema:givenName John J.
83 rdf:type schema:Person
84 N139364d79f1349a58a088ae2ed8ba015 rdf:first sg:person.013433153367.30
85 rdf:rest N68349a2892c34818b9a50069b895a7c9
86 N14d2797074034f93ac9a6cdba2c9af3a schema:name doi
87 schema:value 10.1007/1-4020-2222-0_17
88 rdf:type schema:PropertyValue
89 N14f803ca876542c4bee0d749e743f0a0 schema:name Springer Nature - SN SciGraph project
90 rdf:type schema:Organization
91 N591a803723754bbdacdbbc547b455109 schema:name dimensions_id
92 schema:value pub.1017474466
93 rdf:type schema:PropertyValue
94 N667a2880db5f442f99e80342eb9f4ab8 rdf:first N9eda4d8ea723435dae9f01de8c19dfd1
95 rdf:rest N03631afcdd79481784453658bc3d36bf
96 N68349a2892c34818b9a50069b895a7c9 rdf:first sg:person.011112713506.66
97 rdf:rest rdf:nil
98 N8e3888a9d5db437289fb42f31f4ba5bd schema:isbn 978-1-4020-2220-3
99 978-1-4020-2222-7
100 schema:name Nanostructured Thin Films and Nanodispersion Strengthened Coatings
101 rdf:type schema:Book
102 N9eda4d8ea723435dae9f01de8c19dfd1 schema:familyName Voevodin
103 schema:givenName Andrey A.
104 rdf:type schema:Person
105 Naf47f8e3598b488a92f70c8a65ab248c rdf:first Nfd9b2497b5a44b9a8c1235fed9385c9a
106 rdf:rest Nca4e325165ee4410a9f8dd5623c2a17c
107 Nca4e325165ee4410a9f8dd5623c2a17c rdf:first N05925dc4b8df426ab103bf53ab2b18bc
108 rdf:rest rdf:nil
109 Nd7c1da55d103402ba642b14f7d6912c2 schema:familyName Shtansky
110 schema:givenName Dmitry V.
111 rdf:type schema:Person
112 Nfd9b2497b5a44b9a8c1235fed9385c9a schema:familyName Levashov
113 schema:givenName Evgeny A.
114 rdf:type schema:Person
115 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
116 schema:name Engineering
117 rdf:type schema:DefinedTerm
118 anzsrc-for:0912 schema:inDefinedTermSet anzsrc-for:
119 schema:name Materials Engineering
120 rdf:type schema:DefinedTerm
121 sg:person.011112713506.66 schema:affiliation grid-institutes:grid.418949.9
122 schema:familyName Kalinnikov
123 schema:givenName G.V.
124 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011112713506.66
125 rdf:type schema:Person
126 sg:person.013433153367.30 schema:affiliation grid-institutes:grid.418949.9
127 schema:familyName Andrievski
128 schema:givenName R.A.
129 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.013433153367.30
130 rdf:type schema:Person
131 grid-institutes:grid.418949.9 schema:alternateName Institute of Problems of Chemical Physics, Russian Academy of Sciences, 142432, Chernogolovka, Moscow Region, Russia
132 schema:name Institute of Problems of Chemical Physics, Russian Academy of Sciences, 142432, Chernogolovka, Moscow Region, Russia
133 rdf:type schema:Organization
 




Preview window. Press ESC to close (or click here)


...