Novel MEMS Fluidic Integrated Circuit Technology with ‘MOSFET-Like Microvalve Elements’ View Full Text


Ontology type: schema:Chapter     


Chapter Info

DATE

2006

AUTHORS

Hidekuni Takao , Makoto Ishida

ABSTRACT

In this chapter, we consider about novel applications of microvalves fabricated by MEMS technology in innovative micro devices and systems. By the remarkable advance of recent MEMS technology and demand to microvalve in the biotechnology field, microvalves realized by MEMS technology have been developed in the field at a stretch. MEMS microvalve is a digital fluidic control device to switch fluid flow between ON and OFF. MEMS microvalve is an analog fluidic control device to control fluid medium by analog control signal. According to the required function, operation mode and design of microvalves change. The most major application of microvalves in MEMS field is “Micro Total Analysis Systems (micro-TAS)”. MEMS microvalves are one of essential elements in micro-TAS to handle the liquid sample in micro channels. Figure 1 shows a concept diagram of a micro-TAS, integrated blood-test system, including plural microvalves [1] and integrated sensors [2]. In the system, microvalves are electrically controlled and used to switch liquid sample flow. Figure 2 shows the configuration of the blood test system showing the function of integrated microvalves. In the system, a mechanical pump is used to generate large pressure difference from atmosphere. Across each microvalve, pressure difference is applied, and microvalves are used only to open or close fluid flow circuit in the system. Controlling the electronic signal, the start timing of liquid sample flow are directly controlled. This is one of typical applications of microvalve in micro-TAS. FIGURE 1Concept diagram of integrated blood-test system including plural microvalves and monolithically integrated sensors. Concept diagram of integrated blood-test system including plural microvalves and monolithically integrated sensors. More... »

PAGES

444-472

References to SciGraph publications

  • 2001. A Pneumatically-Actuated Silicon Microvalve and its Application to Functional Fluidic Integrated Circuits in TRANSDUCERS ’01 EUROSENSORS XV
  • 1998-11-09. Fluids for Sensor Systems in MICROSYSTEM TECHNOLOGY IN CHEMISTRY AND LIFE SCIENCE
  • 2001. The Optimized SMA Micro Pump Chip Applicable to Liquids and Gases in TRANSDUCERS ’01 EUROSENSORS XV
  • Book

    TITLE

    MEMS/NEMS

    ISBN

    978-0-387-24520-1

    Identifiers

    URI

    http://scigraph.springernature.com/pub.10.1007/0-387-25786-1_13

    DOI

    http://dx.doi.org/10.1007/0-387-25786-1_13

    DIMENSIONS

    https://app.dimensions.ai/details/publication/pub.1011191621


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    TIP: You can open this SciGraph record using an external JSON-LD service: JSON-LD Playground Google SDTT

    [
      {
        "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
        "about": [
          {
            "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0915", 
            "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
            "name": "Interdisciplinary Engineering", 
            "type": "DefinedTerm"
          }, 
          {
            "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/09", 
            "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
            "name": "Engineering", 
            "type": "DefinedTerm"
          }
        ], 
        "author": [
          {
            "affiliation": {
              "alternateName": "Toyohashi University of Technology", 
              "id": "https://www.grid.ac/institutes/grid.412804.b", 
              "name": [
                "Department of Electrical and Electronic Engineering, Toyohashi University of Technology, 1-1, Hibarigaoka, Tempaku-cho, 441-8580, Toyohashi, Japan"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Takao", 
            "givenName": "Hidekuni", 
            "id": "sg:person.01325342171.02", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01325342171.02"
            ], 
            "type": "Person"
          }, 
          {
            "affiliation": {
              "alternateName": "Toyohashi University of Technology", 
              "id": "https://www.grid.ac/institutes/grid.412804.b", 
              "name": [
                "Department of Electrical and Electronic Engineering, Toyohashi University of Technology, 1-1, Hibarigaoka, Tempaku-cho, 441-8580, Toyohashi, Japan"
              ], 
              "type": "Organization"
            }, 
            "familyName": "Ishida", 
            "givenName": "Makoto", 
            "id": "sg:person.011406773521.22", 
            "sameAs": [
              "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011406773521.22"
            ], 
            "type": "Person"
          }
        ], 
        "citation": [
          {
            "id": "https://doi.org/10.1016/s0925-4005(01)01045-0", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1003700855"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/s0925-4005(01)01045-0", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1003700855"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/3-540-69544-3_7", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1012215321", 
              "https://doi.org/10.1007/3-540-69544-3_7"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/3-540-69544-3_7", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1012215321", 
              "https://doi.org/10.1007/3-540-69544-3_7"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/0924-4247(93)80116-x", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1022433743"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/978-3-642-59497-7_217", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1038556552", 
              "https://doi.org/10.1007/978-3-642-59497-7_217"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/978-3-642-59497-7_210", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1039208915", 
              "https://doi.org/10.1007/978-3-642-59497-7_210"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/s0924-4247(98)80058-7", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1053022212"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/84.735347", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061240655"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/84.846698", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061240746"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/jmems.2002.803414", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061289721"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/jmems.2003.815838", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061289802"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/jssc.1978.1051062", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061326614"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1115/1.3139669", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1062102978"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/memsys.1990.110255", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1086317171"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/sensor.2003.1215272", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1094501404"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/memsys.2003.1189717", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1095300267"
            ], 
            "type": "CreativeWork"
          }
        ], 
        "datePublished": "2006", 
        "datePublishedReg": "2006-01-01", 
        "description": "In this chapter, we consider about novel applications of microvalves fabricated by MEMS technology in innovative micro devices and systems. By the remarkable advance of recent MEMS technology and demand to microvalve in the biotechnology field, microvalves realized by MEMS technology have been developed in the field at a stretch. MEMS microvalve is a digital fluidic control device to switch fluid flow between ON and OFF. MEMS microvalve is an analog fluidic control device to control fluid medium by analog control signal. According to the required function, operation mode and design of microvalves change. The most major application of microvalves in MEMS field is \u201cMicro Total Analysis Systems (micro-TAS)\u201d. MEMS microvalves are one of essential elements in micro-TAS to handle the liquid sample in micro channels. Figure 1 shows a concept diagram of a micro-TAS, integrated blood-test system, including plural microvalves [1] and integrated sensors [2]. In the system, microvalves are electrically controlled and used to switch liquid sample flow. Figure 2 shows the configuration of the blood test system showing the function of integrated microvalves. In the system, a mechanical pump is used to generate large pressure difference from atmosphere. Across each microvalve, pressure difference is applied, and microvalves are used only to open or close fluid flow circuit in the system. Controlling the electronic signal, the start timing of liquid sample flow are directly controlled. This is one of typical applications of microvalve in micro-TAS. FIGURE 1Concept diagram of integrated blood-test system including plural microvalves and monolithically integrated sensors. Concept diagram of integrated blood-test system including plural microvalves and monolithically integrated sensors.", 
        "editor": [
          {
            "familyName": "Leondes", 
            "givenName": "Cornelius T.", 
            "type": "Person"
          }
        ], 
        "genre": "chapter", 
        "id": "sg:pub.10.1007/0-387-25786-1_13", 
        "inLanguage": [
          "en"
        ], 
        "isAccessibleForFree": false, 
        "isPartOf": {
          "isbn": [
            "978-0-387-24520-1"
          ], 
          "name": "MEMS/NEMS", 
          "type": "Book"
        }, 
        "name": "Novel MEMS Fluidic Integrated Circuit Technology with \u2018MOSFET-Like Microvalve Elements\u2019", 
        "pagination": "444-472", 
        "productId": [
          {
            "name": "doi", 
            "type": "PropertyValue", 
            "value": [
              "10.1007/0-387-25786-1_13"
            ]
          }, 
          {
            "name": "readcube_id", 
            "type": "PropertyValue", 
            "value": [
              "35522951e01cb13e5d181c86f7cac848a6283cc2982e32b90f988596f5be6246"
            ]
          }, 
          {
            "name": "dimensions_id", 
            "type": "PropertyValue", 
            "value": [
              "pub.1011191621"
            ]
          }
        ], 
        "publisher": {
          "location": "Boston, MA", 
          "name": "Springer US", 
          "type": "Organisation"
        }, 
        "sameAs": [
          "https://doi.org/10.1007/0-387-25786-1_13", 
          "https://app.dimensions.ai/details/publication/pub.1011191621"
        ], 
        "sdDataset": "chapters", 
        "sdDatePublished": "2019-04-16T05:31", 
        "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
        "sdPublisher": {
          "name": "Springer Nature - SN SciGraph project", 
          "type": "Organization"
        }, 
        "sdSource": "s3://com-uberresearch-data-dimensions-target-20181106-alternative/cleanup/v134/2549eaecd7973599484d7c17b260dba0a4ecb94b/merge/v9/a6c9fde33151104705d4d7ff012ea9563521a3ce/jats-lookup/v90/0000000346_0000000346/records_99809_00000000.jsonl", 
        "type": "Chapter", 
        "url": "https://link.springer.com/10.1007%2F0-387-25786-1_13"
      }
    ]
     

    Download the RDF metadata as:  json-ld nt turtle xml License info

    HOW TO GET THIS DATA PROGRAMMATICALLY:

    JSON-LD is a popular format for linked data which is fully compatible with JSON.

    curl -H 'Accept: application/ld+json' 'https://scigraph.springernature.com/pub.10.1007/0-387-25786-1_13'

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    curl -H 'Accept: application/n-triples' 'https://scigraph.springernature.com/pub.10.1007/0-387-25786-1_13'

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    This table displays all metadata directly associated to this object as RDF triples.

    119 TRIPLES      23 PREDICATES      42 URIs      20 LITERALS      8 BLANK NODES

    Subject Predicate Object
    1 sg:pub.10.1007/0-387-25786-1_13 schema:about anzsrc-for:09
    2 anzsrc-for:0915
    3 schema:author N5a749d0a48444803bd1f5ef90a436503
    4 schema:citation sg:pub.10.1007/3-540-69544-3_7
    5 sg:pub.10.1007/978-3-642-59497-7_210
    6 sg:pub.10.1007/978-3-642-59497-7_217
    7 https://doi.org/10.1016/0924-4247(93)80116-x
    8 https://doi.org/10.1016/s0924-4247(98)80058-7
    9 https://doi.org/10.1016/s0925-4005(01)01045-0
    10 https://doi.org/10.1109/84.735347
    11 https://doi.org/10.1109/84.846698
    12 https://doi.org/10.1109/jmems.2002.803414
    13 https://doi.org/10.1109/jmems.2003.815838
    14 https://doi.org/10.1109/jssc.1978.1051062
    15 https://doi.org/10.1109/memsys.1990.110255
    16 https://doi.org/10.1109/memsys.2003.1189717
    17 https://doi.org/10.1109/sensor.2003.1215272
    18 https://doi.org/10.1115/1.3139669
    19 schema:datePublished 2006
    20 schema:datePublishedReg 2006-01-01
    21 schema:description In this chapter, we consider about novel applications of microvalves fabricated by MEMS technology in innovative micro devices and systems. By the remarkable advance of recent MEMS technology and demand to microvalve in the biotechnology field, microvalves realized by MEMS technology have been developed in the field at a stretch. MEMS microvalve is a digital fluidic control device to switch fluid flow between ON and OFF. MEMS microvalve is an analog fluidic control device to control fluid medium by analog control signal. According to the required function, operation mode and design of microvalves change. The most major application of microvalves in MEMS field is “Micro Total Analysis Systems (micro-TAS)”. MEMS microvalves are one of essential elements in micro-TAS to handle the liquid sample in micro channels. Figure 1 shows a concept diagram of a micro-TAS, integrated blood-test system, including plural microvalves [1] and integrated sensors [2]. In the system, microvalves are electrically controlled and used to switch liquid sample flow. Figure 2 shows the configuration of the blood test system showing the function of integrated microvalves. In the system, a mechanical pump is used to generate large pressure difference from atmosphere. Across each microvalve, pressure difference is applied, and microvalves are used only to open or close fluid flow circuit in the system. Controlling the electronic signal, the start timing of liquid sample flow are directly controlled. This is one of typical applications of microvalve in micro-TAS. FIGURE 1Concept diagram of integrated blood-test system including plural microvalves and monolithically integrated sensors. Concept diagram of integrated blood-test system including plural microvalves and monolithically integrated sensors.
    22 schema:editor N13b88b884ff6471d8e990d90ccb89af8
    23 schema:genre chapter
    24 schema:inLanguage en
    25 schema:isAccessibleForFree false
    26 schema:isPartOf N91e59de825bd4e3bbf4c2f0bc95d8236
    27 schema:name Novel MEMS Fluidic Integrated Circuit Technology with ‘MOSFET-Like Microvalve Elements’
    28 schema:pagination 444-472
    29 schema:productId N41de811a22e244d2b7cdf2a0df689cd2
    30 N7bb4e2ef044e4cf5b9121375cc394ed3
    31 Nefcbcbada20f45e788dfec78438a1222
    32 schema:publisher Nf1053f02dfad428bb416d4dd52028009
    33 schema:sameAs https://app.dimensions.ai/details/publication/pub.1011191621
    34 https://doi.org/10.1007/0-387-25786-1_13
    35 schema:sdDatePublished 2019-04-16T05:31
    36 schema:sdLicense https://scigraph.springernature.com/explorer/license/
    37 schema:sdPublisher N821ca241593a49c791a3bae802e2d8ca
    38 schema:url https://link.springer.com/10.1007%2F0-387-25786-1_13
    39 sgo:license sg:explorer/license/
    40 sgo:sdDataset chapters
    41 rdf:type schema:Chapter
    42 N13b88b884ff6471d8e990d90ccb89af8 rdf:first N269ab5525a8d41cb99a612f61ef153ce
    43 rdf:rest rdf:nil
    44 N269ab5525a8d41cb99a612f61ef153ce schema:familyName Leondes
    45 schema:givenName Cornelius T.
    46 rdf:type schema:Person
    47 N35386b9cef644d9ea2c3c2f677c27bfc rdf:first sg:person.011406773521.22
    48 rdf:rest rdf:nil
    49 N41de811a22e244d2b7cdf2a0df689cd2 schema:name doi
    50 schema:value 10.1007/0-387-25786-1_13
    51 rdf:type schema:PropertyValue
    52 N5a749d0a48444803bd1f5ef90a436503 rdf:first sg:person.01325342171.02
    53 rdf:rest N35386b9cef644d9ea2c3c2f677c27bfc
    54 N7bb4e2ef044e4cf5b9121375cc394ed3 schema:name readcube_id
    55 schema:value 35522951e01cb13e5d181c86f7cac848a6283cc2982e32b90f988596f5be6246
    56 rdf:type schema:PropertyValue
    57 N821ca241593a49c791a3bae802e2d8ca schema:name Springer Nature - SN SciGraph project
    58 rdf:type schema:Organization
    59 N91e59de825bd4e3bbf4c2f0bc95d8236 schema:isbn 978-0-387-24520-1
    60 schema:name MEMS/NEMS
    61 rdf:type schema:Book
    62 Nefcbcbada20f45e788dfec78438a1222 schema:name dimensions_id
    63 schema:value pub.1011191621
    64 rdf:type schema:PropertyValue
    65 Nf1053f02dfad428bb416d4dd52028009 schema:location Boston, MA
    66 schema:name Springer US
    67 rdf:type schema:Organisation
    68 anzsrc-for:09 schema:inDefinedTermSet anzsrc-for:
    69 schema:name Engineering
    70 rdf:type schema:DefinedTerm
    71 anzsrc-for:0915 schema:inDefinedTermSet anzsrc-for:
    72 schema:name Interdisciplinary Engineering
    73 rdf:type schema:DefinedTerm
    74 sg:person.011406773521.22 schema:affiliation https://www.grid.ac/institutes/grid.412804.b
    75 schema:familyName Ishida
    76 schema:givenName Makoto
    77 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011406773521.22
    78 rdf:type schema:Person
    79 sg:person.01325342171.02 schema:affiliation https://www.grid.ac/institutes/grid.412804.b
    80 schema:familyName Takao
    81 schema:givenName Hidekuni
    82 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01325342171.02
    83 rdf:type schema:Person
    84 sg:pub.10.1007/3-540-69544-3_7 schema:sameAs https://app.dimensions.ai/details/publication/pub.1012215321
    85 https://doi.org/10.1007/3-540-69544-3_7
    86 rdf:type schema:CreativeWork
    87 sg:pub.10.1007/978-3-642-59497-7_210 schema:sameAs https://app.dimensions.ai/details/publication/pub.1039208915
    88 https://doi.org/10.1007/978-3-642-59497-7_210
    89 rdf:type schema:CreativeWork
    90 sg:pub.10.1007/978-3-642-59497-7_217 schema:sameAs https://app.dimensions.ai/details/publication/pub.1038556552
    91 https://doi.org/10.1007/978-3-642-59497-7_217
    92 rdf:type schema:CreativeWork
    93 https://doi.org/10.1016/0924-4247(93)80116-x schema:sameAs https://app.dimensions.ai/details/publication/pub.1022433743
    94 rdf:type schema:CreativeWork
    95 https://doi.org/10.1016/s0924-4247(98)80058-7 schema:sameAs https://app.dimensions.ai/details/publication/pub.1053022212
    96 rdf:type schema:CreativeWork
    97 https://doi.org/10.1016/s0925-4005(01)01045-0 schema:sameAs https://app.dimensions.ai/details/publication/pub.1003700855
    98 rdf:type schema:CreativeWork
    99 https://doi.org/10.1109/84.735347 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061240655
    100 rdf:type schema:CreativeWork
    101 https://doi.org/10.1109/84.846698 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061240746
    102 rdf:type schema:CreativeWork
    103 https://doi.org/10.1109/jmems.2002.803414 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061289721
    104 rdf:type schema:CreativeWork
    105 https://doi.org/10.1109/jmems.2003.815838 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061289802
    106 rdf:type schema:CreativeWork
    107 https://doi.org/10.1109/jssc.1978.1051062 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061326614
    108 rdf:type schema:CreativeWork
    109 https://doi.org/10.1109/memsys.1990.110255 schema:sameAs https://app.dimensions.ai/details/publication/pub.1086317171
    110 rdf:type schema:CreativeWork
    111 https://doi.org/10.1109/memsys.2003.1189717 schema:sameAs https://app.dimensions.ai/details/publication/pub.1095300267
    112 rdf:type schema:CreativeWork
    113 https://doi.org/10.1109/sensor.2003.1215272 schema:sameAs https://app.dimensions.ai/details/publication/pub.1094501404
    114 rdf:type schema:CreativeWork
    115 https://doi.org/10.1115/1.3139669 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062102978
    116 rdf:type schema:CreativeWork
    117 https://www.grid.ac/institutes/grid.412804.b schema:alternateName Toyohashi University of Technology
    118 schema:name Department of Electrical and Electronic Engineering, Toyohashi University of Technology, 1-1, Hibarigaoka, Tempaku-cho, 441-8580, Toyohashi, Japan
    119 rdf:type schema:Organization
     




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