Quantum Lithography View Full Text


Ontology type: schema:Chapter     


Chapter Info

DATE

2002-01-01

AUTHORS

Pieter Kok , Samuel L. Braunstein , Agedi N. Boto , Daniel S. Abrams , Colin P. Williams , Jonathan P. Dowling

ABSTRACT

As demonstrated in Boto et al. [quant-ph/9912052], quantum lithography offers an increase in resolution without an upper bound. This procedure makes use of the entangled state (|n,0〉+einϕ|0,n〉)/√2. It allows us to write evenly spaced lines with sub-wavelength resolution. Here we generalise this procedure in such a way that it enables us to create arbitrary patterns in one dimension. We distinguish two methods: the ‘Fourier method’ and ‘the superposition method’. The Fourier method is conceptually easier since it depends on Fourier series, but it also involves a minimal finite amount of unwanted exposure of the substrate. The superposition method gets around this problem and gives generally better results, but lacks the intuitive clarity of the Fourier method. More... »

PAGES

391-397

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/0-306-47114-0_59

DOI

http://dx.doi.org/10.1007/0-306-47114-0_59

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1003474068


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[
  {
    "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
    "about": [
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/02", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Physical Sciences", 
        "type": "DefinedTerm"
      }, 
      {
        "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/0206", 
        "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
        "name": "Quantum Physics", 
        "type": "DefinedTerm"
      }
    ], 
    "author": [
      {
        "affiliation": {
          "alternateName": "Informatics, University of Wales, LL57 1UT, Bangor, UK", 
          "id": "http://www.grid.ac/institutes/grid.8155.9", 
          "name": [
            "Informatics, University of Wales, LL57 1UT, Bangor, UK"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Kok", 
        "givenName": "Pieter", 
        "id": "sg:person.01337574224.16", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01337574224.16"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Informatics, University of Wales, LL57 1UT, Bangor, UK", 
          "id": "http://www.grid.ac/institutes/grid.8155.9", 
          "name": [
            "Informatics, University of Wales, LL57 1UT, Bangor, UK"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Braunstein", 
        "givenName": "Samuel L.", 
        "id": "sg:person.0666766367.22", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0666766367.22"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Jet Propulsion Laboratory, California Institute of Technology, 4800, Oak Grove Drive, Mail Stop 126-347, 91109, Pasadena, California", 
          "id": "http://www.grid.ac/institutes/grid.20861.3d", 
          "name": [
            "Jet Propulsion Laboratory, California Institute of Technology, 4800, Oak Grove Drive, Mail Stop 126-347, 91109, Pasadena, California"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Boto", 
        "givenName": "Agedi N.", 
        "id": "sg:person.01310025664.48", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01310025664.48"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Jet Propulsion Laboratory, California Institute of Technology, 4800, Oak Grove Drive, Mail Stop 126-347, 91109, Pasadena, California", 
          "id": "http://www.grid.ac/institutes/grid.20861.3d", 
          "name": [
            "Jet Propulsion Laboratory, California Institute of Technology, 4800, Oak Grove Drive, Mail Stop 126-347, 91109, Pasadena, California"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Abrams", 
        "givenName": "Daniel S.", 
        "id": "sg:person.011133514607.76", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011133514607.76"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Jet Propulsion Laboratory, California Institute of Technology, 4800, Oak Grove Drive, Mail Stop 126-347, 91109, Pasadena, California", 
          "id": "http://www.grid.ac/institutes/grid.20861.3d", 
          "name": [
            "Jet Propulsion Laboratory, California Institute of Technology, 4800, Oak Grove Drive, Mail Stop 126-347, 91109, Pasadena, California"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Williams", 
        "givenName": "Colin P.", 
        "id": "sg:person.011455062257.14", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011455062257.14"
        ], 
        "type": "Person"
      }, 
      {
        "affiliation": {
          "alternateName": "Jet Propulsion Laboratory, California Institute of Technology, 4800, Oak Grove Drive, Mail Stop 126-347, 91109, Pasadena, California", 
          "id": "http://www.grid.ac/institutes/grid.20861.3d", 
          "name": [
            "Jet Propulsion Laboratory, California Institute of Technology, 4800, Oak Grove Drive, Mail Stop 126-347, 91109, Pasadena, California"
          ], 
          "type": "Organization"
        }, 
        "familyName": "Dowling", 
        "givenName": "Jonathan P.", 
        "id": "sg:person.07724164277.22", 
        "sameAs": [
          "https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07724164277.22"
        ], 
        "type": "Person"
      }
    ], 
    "datePublished": "2002-01-01", 
    "datePublishedReg": "2002-01-01", 
    "description": "As demonstrated in Boto et al. [quant-ph/9912052], quantum lithography offers an increase in resolution without an upper bound. This procedure makes use of the entangled state (|n,0\u3009+ein\u03d5|0,n\u3009)/\u221a2. It allows us to write evenly spaced lines with sub-wavelength resolution. Here we generalise this procedure in such a way that it enables us to create arbitrary patterns in one dimension. We distinguish two methods: the \u2018Fourier method\u2019 and \u2018the superposition method\u2019. The Fourier method is conceptually easier since it depends on Fourier series, but it also involves a minimal finite amount of unwanted exposure of the substrate. The superposition method gets around this problem and gives generally better results, but lacks the intuitive clarity of the Fourier method.", 
    "editor": [
      {
        "familyName": "Tombesi", 
        "givenName": "Paolo", 
        "type": "Person"
      }, 
      {
        "familyName": "Hirota", 
        "givenName": "Osamu", 
        "type": "Person"
      }
    ], 
    "genre": "chapter", 
    "id": "sg:pub.10.1007/0-306-47114-0_59", 
    "inLanguage": "en", 
    "isAccessibleForFree": false, 
    "isPartOf": {
      "isbn": [
        "978-0-306-46609-0", 
        "978-0-306-47114-8"
      ], 
      "name": "Quantum Communication, Computing, and Measurement 3", 
      "type": "Book"
    }, 
    "keywords": [
      "Fourier methods", 
      "superposition method", 
      "Fourier series", 
      "finite amount", 
      "intuitive clarity", 
      "procedure", 
      "arbitrary patterns", 
      "dimensions", 
      "problem", 
      "good results", 
      "al", 
      "quantum lithography", 
      "lithography", 
      "increase", 
      "resolution", 
      "use", 
      "state", 
      "lines", 
      "sub-wavelength resolution", 
      "way", 
      "patterns", 
      "series", 
      "amount", 
      "results", 
      "clarity", 
      "botos", 
      "method", 
      "minimal finite amount", 
      "unwanted exposure", 
      "exposure", 
      "substrate"
    ], 
    "name": "Quantum Lithography", 
    "pagination": "391-397", 
    "productId": [
      {
        "name": "dimensions_id", 
        "type": "PropertyValue", 
        "value": [
          "pub.1003474068"
        ]
      }, 
      {
        "name": "doi", 
        "type": "PropertyValue", 
        "value": [
          "10.1007/0-306-47114-0_59"
        ]
      }
    ], 
    "publisher": {
      "name": "Springer Nature", 
      "type": "Organisation"
    }, 
    "sameAs": [
      "https://doi.org/10.1007/0-306-47114-0_59", 
      "https://app.dimensions.ai/details/publication/pub.1003474068"
    ], 
    "sdDataset": "chapters", 
    "sdDatePublished": "2021-12-01T20:07", 
    "sdLicense": "https://scigraph.springernature.com/explorer/license/", 
    "sdPublisher": {
      "name": "Springer Nature - SN SciGraph project", 
      "type": "Organization"
    }, 
    "sdSource": "s3://com-springernature-scigraph/baseset/20211201/entities/gbq_results/chapter/chapter_378.jsonl", 
    "type": "Chapter", 
    "url": "https://doi.org/10.1007/0-306-47114-0_59"
  }
]
 

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This table displays all metadata directly associated to this object as RDF triples.

134 TRIPLES      23 PREDICATES      56 URIs      49 LITERALS      7 BLANK NODES

Subject Predicate Object
1 sg:pub.10.1007/0-306-47114-0_59 schema:about anzsrc-for:02
2 anzsrc-for:0206
3 schema:author N3edb7a977dd24197a35c46863069a2d4
4 schema:datePublished 2002-01-01
5 schema:datePublishedReg 2002-01-01
6 schema:description As demonstrated in Boto et al. [quant-ph/9912052], quantum lithography offers an increase in resolution without an upper bound. This procedure makes use of the entangled state (|n,0〉+einϕ|0,n〉)/√2. It allows us to write evenly spaced lines with sub-wavelength resolution. Here we generalise this procedure in such a way that it enables us to create arbitrary patterns in one dimension. We distinguish two methods: the ‘Fourier method’ and ‘the superposition method’. The Fourier method is conceptually easier since it depends on Fourier series, but it also involves a minimal finite amount of unwanted exposure of the substrate. The superposition method gets around this problem and gives generally better results, but lacks the intuitive clarity of the Fourier method.
7 schema:editor N9d6abb08d6264fbd86c105c1081f29d1
8 schema:genre chapter
9 schema:inLanguage en
10 schema:isAccessibleForFree false
11 schema:isPartOf N5a5368c3b254493c84487fc0e25dc204
12 schema:keywords Fourier methods
13 Fourier series
14 al
15 amount
16 arbitrary patterns
17 botos
18 clarity
19 dimensions
20 exposure
21 finite amount
22 good results
23 increase
24 intuitive clarity
25 lines
26 lithography
27 method
28 minimal finite amount
29 patterns
30 problem
31 procedure
32 quantum lithography
33 resolution
34 results
35 series
36 state
37 sub-wavelength resolution
38 substrate
39 superposition method
40 unwanted exposure
41 use
42 way
43 schema:name Quantum Lithography
44 schema:pagination 391-397
45 schema:productId N4c2b3cb7c40a4ff8899d11cbc127c2d7
46 N8f6da62a119b436eb5691002eedbf760
47 schema:publisher Nd9a53a0c117045eaac523392fbb8730b
48 schema:sameAs https://app.dimensions.ai/details/publication/pub.1003474068
49 https://doi.org/10.1007/0-306-47114-0_59
50 schema:sdDatePublished 2021-12-01T20:07
51 schema:sdLicense https://scigraph.springernature.com/explorer/license/
52 schema:sdPublisher N9b28434d1ecb4239873c3ade99f5c422
53 schema:url https://doi.org/10.1007/0-306-47114-0_59
54 sgo:license sg:explorer/license/
55 sgo:sdDataset chapters
56 rdf:type schema:Chapter
57 N2cf6d64b450c4fb8939b0ba0461ab36c rdf:first sg:person.011455062257.14
58 rdf:rest Ndc6398b58f224c498585c7b5b62a825a
59 N3afb1e1da42744399ee55b13b0def8f4 schema:familyName Hirota
60 schema:givenName Osamu
61 rdf:type schema:Person
62 N3edb7a977dd24197a35c46863069a2d4 rdf:first sg:person.01337574224.16
63 rdf:rest N8ad33b8706964e38a023f6d6f07ad481
64 N4c2b3cb7c40a4ff8899d11cbc127c2d7 schema:name doi
65 schema:value 10.1007/0-306-47114-0_59
66 rdf:type schema:PropertyValue
67 N5a5368c3b254493c84487fc0e25dc204 schema:isbn 978-0-306-46609-0
68 978-0-306-47114-8
69 schema:name Quantum Communication, Computing, and Measurement 3
70 rdf:type schema:Book
71 N66b5d0784cb945bdadf782e476efe563 schema:familyName Tombesi
72 schema:givenName Paolo
73 rdf:type schema:Person
74 N8ad33b8706964e38a023f6d6f07ad481 rdf:first sg:person.0666766367.22
75 rdf:rest Nd32f1e688f4844608d6502226357baa1
76 N8f6da62a119b436eb5691002eedbf760 schema:name dimensions_id
77 schema:value pub.1003474068
78 rdf:type schema:PropertyValue
79 N9b28434d1ecb4239873c3ade99f5c422 schema:name Springer Nature - SN SciGraph project
80 rdf:type schema:Organization
81 N9d6abb08d6264fbd86c105c1081f29d1 rdf:first N66b5d0784cb945bdadf782e476efe563
82 rdf:rest Nad8f3b43a2804cb58cfcfe281dd508f8
83 Nad8f3b43a2804cb58cfcfe281dd508f8 rdf:first N3afb1e1da42744399ee55b13b0def8f4
84 rdf:rest rdf:nil
85 Nd32f1e688f4844608d6502226357baa1 rdf:first sg:person.01310025664.48
86 rdf:rest Nd7f9e98c77ff4109b655ea8c41082ff8
87 Nd7f9e98c77ff4109b655ea8c41082ff8 rdf:first sg:person.011133514607.76
88 rdf:rest N2cf6d64b450c4fb8939b0ba0461ab36c
89 Nd9a53a0c117045eaac523392fbb8730b schema:name Springer Nature
90 rdf:type schema:Organisation
91 Ndc6398b58f224c498585c7b5b62a825a rdf:first sg:person.07724164277.22
92 rdf:rest rdf:nil
93 anzsrc-for:02 schema:inDefinedTermSet anzsrc-for:
94 schema:name Physical Sciences
95 rdf:type schema:DefinedTerm
96 anzsrc-for:0206 schema:inDefinedTermSet anzsrc-for:
97 schema:name Quantum Physics
98 rdf:type schema:DefinedTerm
99 sg:person.011133514607.76 schema:affiliation grid-institutes:grid.20861.3d
100 schema:familyName Abrams
101 schema:givenName Daniel S.
102 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011133514607.76
103 rdf:type schema:Person
104 sg:person.011455062257.14 schema:affiliation grid-institutes:grid.20861.3d
105 schema:familyName Williams
106 schema:givenName Colin P.
107 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.011455062257.14
108 rdf:type schema:Person
109 sg:person.01310025664.48 schema:affiliation grid-institutes:grid.20861.3d
110 schema:familyName Boto
111 schema:givenName Agedi N.
112 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01310025664.48
113 rdf:type schema:Person
114 sg:person.01337574224.16 schema:affiliation grid-institutes:grid.8155.9
115 schema:familyName Kok
116 schema:givenName Pieter
117 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.01337574224.16
118 rdf:type schema:Person
119 sg:person.0666766367.22 schema:affiliation grid-institutes:grid.8155.9
120 schema:familyName Braunstein
121 schema:givenName Samuel L.
122 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.0666766367.22
123 rdf:type schema:Person
124 sg:person.07724164277.22 schema:affiliation grid-institutes:grid.20861.3d
125 schema:familyName Dowling
126 schema:givenName Jonathan P.
127 schema:sameAs https://app.dimensions.ai/discover/publication?and_facet_researcher=ur.07724164277.22
128 rdf:type schema:Person
129 grid-institutes:grid.20861.3d schema:alternateName Jet Propulsion Laboratory, California Institute of Technology, 4800, Oak Grove Drive, Mail Stop 126-347, 91109, Pasadena, California
130 schema:name Jet Propulsion Laboratory, California Institute of Technology, 4800, Oak Grove Drive, Mail Stop 126-347, 91109, Pasadena, California
131 rdf:type schema:Organization
132 grid-institutes:grid.8155.9 schema:alternateName Informatics, University of Wales, LL57 1UT, Bangor, UK
133 schema:name Informatics, University of Wales, LL57 1UT, Bangor, UK
134 rdf:type schema:Organization
 




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