Evaluation of Stages of Nano-CMM View Full Text


Ontology type: schema:Chapter      Open Access: True


Chapter Info

DATE

2002

AUTHORS

M. Fujiwara , A. Yamaguchi , K. Takamasu , S. Ozono

ABSTRACT

The Coordinate Measuring Machines (CMMs) are widely used for the three-dimensional measurements of workpieces. For solving the limits and the drawbacks of the traditional CMMs, we have started developing nano-CMM that measures three dimensional parts in nanometer resolution. In this article, we evaluate the repeatability and the straightness of stages of nano-CMM. More... »

PAGES

634-638

Book

TITLE

Initiatives of Precision Engineering at the Beginning of a Millennium

ISBN

0-7923-7414-2

Author Affiliations

Identifiers

URI

http://scigraph.springernature.com/pub.10.1007/0-306-47000-4_124

DOI

http://dx.doi.org/10.1007/0-306-47000-4_124

DIMENSIONS

https://app.dimensions.ai/details/publication/pub.1028069277


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