Susumu Sugiyama

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Publications in SciGraph latest 50 shown

  • 2012-08-31 Highly-sensitive fluorescence detection and imaging with microfabricated total internal reflection (TIR)-based devices in JOURNAL OF MICRO-BIO ROBOTICS
  • 2012-07-06 Influence of developer temperature on the shape of structures fabricated by deep X-ray lithography in MICROSYSTEM TECHNOLOGIES
  • 2012-07-03 Fabrication of 3-D PTFE microstructures utilising change of etching rate with respect to exposure time in MICROSYSTEM TECHNOLOGIES
  • 2010-10-19 Designing of a Si-MEMS device with an integrated skeletal muscle cell-based bio-actuator in BIOMEDICAL MICRODEVICES
  • 2010-06-30 Measurement of mechanical and thermal properties of co-sputtered WSi thin film for MEMS applications in MICROSYSTEM TECHNOLOGIES
  • 2010-02-12 Study on fabrication of 3-D microstructures by synchrotron radiation based on pixels exposed lithography in MICROSYSTEM TECHNOLOGIES
  • 2009-12-23 Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for space X-ray telescopes in MICROSYSTEM TECHNOLOGIES
  • 2009-08-22 Fabrication of optically smooth, through-wafer silicon molds for PDMS total internal reflection-based devices in MICROSYSTEM TECHNOLOGIES
  • 2009-04-12 A micro electromagnetic low level vibration energy harvester based on MEMS technology in MICROSYSTEM TECHNOLOGIES
  • 2009-01-01 Design and Fabrication of a Miniaturized Three-Degree-of-Freedom Piezoresistive Acceleration Sensor Based on MEMS Technology Using Deep Reactive Ion Etching in PHYSICS AND ENGINEERING OF NEW MATERIALS
  • 2008-03-04 3-D PTFE microstructure fabricated using synchrotoron radiation etching in MICROSYSTEM TECHNOLOGIES
  • 2007-06-22 Transcriptome analysis device based on liquid phase detection by fluorescently labeled nucleic acid probes in BIOMEDICAL MICRODEVICES
  • 2006-06-27 Fabrication of high aspect ratio nano gratings using SR lithography in MICROSYSTEM TECHNOLOGIES
  • 2006-06-10 Fabrication of microgratings on PMMA plate and curved surface by using copper mesh as X-ray lithography mask in MICROSYSTEM TECHNOLOGIES
  • 2006-05-30 Geometrical strengthening and tip-sharpening of a microneedle array fabricated by X-ray lithography in MICROSYSTEM TECHNOLOGIES
  • 2006-05-25 Mask design compensation for sloped sidewall structures fabricated by X-ray lithography in MICROSYSTEM TECHNOLOGIES
  • 2005-04 Micro-Structures of TiC/Ti5Si3 composite produced by powder metallurgy and LIGA process in MICROSYSTEM TECHNOLOGIES
  • 2002-11 Study on three-dimensional micromachining using synchrotron radiation etching in MICROSYSTEM TECHNOLOGIES
  • 2001 n-Type β-SiC Piezoresistance Analysis Under High Temperature and High Impurity Concentration in TRANSDUCERS ’01 EUROSENSORS XV
  • 2001 Novel Shaped Microstructures Processed by Deep X-Ray Lithography in TRANSDUCERS ’01 EUROSENSORS XV
  • 2001 Single Crystalline Silicon Nano Wire Piezoresistors for Mechanical Sensors in TRANSDUCERS ’01 EUROSENSORS XV
  • 2000-11 Fabrication of sub-micron structures for MEMS using deep X-ray lithography in MICROSYSTEM TECHNOLOGIES
  • 2000-11 High aspect ratio electrostatic micro actuators using LIGA process in MICROSYSTEM TECHNOLOGIES
  • 1998-12 Fabrication of micro-parts by high aspect ratio structuring and metal injection molding using the supercritical debinding method in MICROSYSTEM TECHNOLOGIES
  • 1998-02 Study on fabrication of high aspect ratio MEMS microparts using a compact SR beamline in MICROSYSTEM TECHNOLOGIES
  • 1993 Integrated Pyroelectric Infrared Sensor Using Pvdf thin Film Deposited by Electro-Spray Method in MRS ADVANCES
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