Fabrication Of Large-Area Hexagonal Boron Nitride Thin Films


Ontology type: sgo:Patent     


Patent Info

DATE

2011-10-13T00:00

AUTHORS

SHI, YUMENG , KONG, JING , HAMSEN, CHRISTOPH , LI, LAIN-JONG

ABSTRACT

A hexagonal boron nitride thin film is grown on a metal surface of a growth substrate and then annealed. The hexagonal boron nitride thin film is coated with a protective support layer and released from the metal surface. The boron nitride thin film together with the protective support layer can then be transferred to any of a variety of arbitrary substrates. More... »

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