Electro-Optic Component, Use And Production Of Said Component


Ontology type: sgo:Patent     


Patent Info

DATE

N/A

AUTHORS

WÄCHTER, Markus , MATHEISEN, CHRISTOPHER , NAGEL, MICHAEL , KURZ, HEINRICH , BOLTEN, JENS , WAHLBRINK, THORSTEN

ABSTRACT

The invention relates to an electro-optic component (1, 2, 3, 4, 5, 6) - in particular a radiation source, a detector, and/or a modulator - for optically generating a signal and modulating and/or detecting in the millimeter wavelength range, terahertz (THz) frequency range, and/or infrared range. The electro-optic component comprises an arrangement (100, 200, 300, 400, 500, 600), preferably a waveguide arrangement, based on silicon and/or germanium. According to the invention, the arrangement (100, 200, 300, 400, 500, 600) based on silicon and/or germanium has a silicon and/or germanium material (102, 202, 302, 402, 502, 602) with a surface (101, 201, 301, 401, 501, 601). The surface (101, 201, 301, 401, 501, 601 ) is chemically modified by a halogen enrichment and is electro-optically activated with the silicon and/or germanium material (102, 202, 302, 402, 502, 602). More... »

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