Systems and methods for enhancing mobility of atomic or molecular species on a substrate at reduced bulk temperature using acoustic ...


Ontology type: sgo:Patent     


Patent Info

DATE

2018-04-17T00:00

AUTHORS

Henry Helvajian

ABSTRACT

Under one aspect, a structure is provided that includes a substrate including a first material having a threshold temperature above which the first material is damaged and a layer consisting essentially of a second material molecularly bonded to the first material of the substrate. The second material is formed on the substrate at a reaction temperature that is higher than the threshold temperature of the first material. An interface between the substrate and the second material is a substantially defect-free surface. More... »

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