Large-area sputtering targets


Ontology type: sgo:Patent     


Patent Info

DATE

2016-08-09T00:00

AUTHORS

Francois-Charles Dary , Mark Gaydos , William Loewenthal , Steven A. Miller , Gary Rozak , Scott Jeffrey VOLCHKO , Stefan Zimmermann , Michael Thomas Stawovy

ABSTRACT

In various embodiments, joined sputtering targets are formed at least in part by spray deposition of the sputtering material and/or welding.

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