Methods for fabricating high aspect ratio probes and deforming high aspect ratio nanopillars and micropillars


Ontology type: sgo:Patent     


Patent Info

DATE

N/A

AUTHORS

Michael D. Henry , Andrew P. Homyk , Axel Scherer , Thomas A. Tombrello , Sameer WALAVALKAR

ABSTRACT

Methods for fabricating of high aspect ratio probes and deforming micropillars and nanopillars are described. Use of polymers in deforming nanopillars and micropillars is also described.

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