Methods of manufacturing large-area sputtering targets using interlocking joints


Ontology type: sgo:Patent     


Patent Info

DATE

N/A

AUTHORS

Scott Jeffrey VOLCHKO , William Loewenthal , Stefan Zimmermann , Mark Gaydos , Steven Alfred Miller

ABSTRACT

In various embodiments, joined sputtering targets are formed at least in part by spray deposition of the sputtering material and/or welding.

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