Chemical sensors with consistent sensor surface areas


Ontology type: sgo:Patent     


Patent Info

DATE

N/A

AUTHORS

Keith G. Fife , Jordan Owens , Shifeng Li , James Bustillo

ABSTRACT

In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A material defines an opening extending to the upper surface of the floating gate conductor. The material comprises a first dielectric underlying a second dielectric. A conductive element contacts the upper surface of the floating gate conductor and extends a distance along a sidewall of the opening, the distance defined by a thickness of the first dielectric. More... »

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