Chemical sensing and/or measuring devices and methods


Ontology type: sgo:Patent     


Patent Info

DATE

N/A

AUTHORS

Andrew P. Homyk , Michael D. Henry , Axel Scherer , Sameer WALAVALKAR

ABSTRACT

Methods for fabricating silicon nanowire chemical sensing devices, devices thus obtained, and methods for utilizing devices for sensing and measuring chemical concentration of selected species in a fluid are described. Devices may comprise a metal-oxide-semiconductor field-effect transistor (MOSFET) structure.

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