Method for manufacturing high density non-volatile magnetic memory


Ontology type: sgo:Patent     


Patent Info

DATE

N/A

AUTHORS

Roger Klas Malmhall , Kimihiro Satoh , Jing Zhang , Parviz Keshtbod , Rajiv Yadav Ranjan

ABSTRACT

Methods of fabricating MTJ arrays using two orthogonal line patterning steps are described. Embodiments are described that use a self-aligned double patterning method for one or both orthogonal line patterning steps to achieve dense arrays of MTJs with feature dimensions one half of the minimum photo lithography feature size (F). In one set of embodiments, the materials and thicknesses of the stack of layers that provide the masking function are selected so that after the initial set of mask pads have been patterned, a sequence of etching steps progressively transfers the mask pad shape through the multiple mask layer and down through all of the MTJ cell layers to the form the complete MTJ pillars. In another set of embodiments, the MTJ/BE stack is patterned into parallel lines before the top electrode layer is deposited. More... »

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    [
      {
        "@context": "https://springernature.github.io/scigraph/jsonld/sgcontext.json", 
        "about": [
          {
            "id": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/2447", 
            "inDefinedTermSet": "http://purl.org/au-research/vocabulary/anzsrc-for/2008/", 
            "type": "DefinedTerm"
          }
        ], 
        "author": [
          {
            "name": "Roger Klas Malmhall", 
            "type": "Person"
          }, 
          {
            "name": "Kimihiro Satoh", 
            "type": "Person"
          }, 
          {
            "name": "Jing Zhang", 
            "type": "Person"
          }, 
          {
            "name": "Parviz Keshtbod", 
            "type": "Person"
          }, 
          {
            "name": "Rajiv Yadav Ranjan", 
            "type": "Person"
          }
        ], 
        "citation": [
          {
            "id": "https://doi.org/10.1088/0022-3727/40/5/s06", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1001456059"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0022-3727/40/5/s03", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1001882959"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1103/physrevlett.84.3149", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1002331710"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1063/1.1389522", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1004873237"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1103/revmodphys.76.323", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1007326605"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/s11664-002-0033-7", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1008827522", 
              "https://doi.org/10.1007/s11664-002-0033-7"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1038/nmat1905", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1010406824", 
              "https://doi.org/10.1038/nmat1905"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0022-3727/40/13/012", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1011326133"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1038/nmat1917", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1013488732", 
              "https://doi.org/10.1038/nmat1917"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1063/1.1757638", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1014262225"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1103/physrevb.62.12317", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1014278815"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0022-3727/40/10/031", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1014889797"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1007/s11664-997-0076-x", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1016839367", 
              "https://doi.org/10.1007/s11664-997-0076-x"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0022-3727/40/10/s03", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1020105724"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1209/epl/i2004-10452-6", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1021678993"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1038/nature04035", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1022805974", 
              "https://doi.org/10.1038/nature04035"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.physleta.2006.01.091", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1023293958"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1103/physrevb.60.6137", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1023870634"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/s0304-8853(02)00898-3", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1024214014"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.jmmm.2006.10.507", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1024750224"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1063/1.1707228", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1026652974"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1038/nphys618", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1027549338", 
              "https://doi.org/10.1038/nphys618"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1038/nature03009", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1028432339", 
              "https://doi.org/10.1038/nature03009"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/1742-6596/61/1/022", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1029375830"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0022-3727/40/10/021", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1029461898"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1038/nature04036", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1032484610", 
              "https://doi.org/10.1038/nature04036"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.jmmm.2005.04.005", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1033377077"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.jcrysgro.2004.07.021", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1039661187"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1038/nmat1120", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1039970430", 
              "https://doi.org/10.1038/nmat1120"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1080/14786430500380142", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1040630496"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0022-3727/40/10/s02", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1040896349"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1088/0957-4484/16/6/062", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1041941330"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1038/nmat1595", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1042288684", 
              "https://doi.org/10.1038/nmat1595"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1038/nature05093", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1044280391", 
              "https://doi.org/10.1038/nature05093"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1038/nphys619", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1045332202", 
              "https://doi.org/10.1038/nphys619"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1038/nmat1257", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1047761572", 
              "https://doi.org/10.1038/nmat1257"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1063/1.1507820", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1052777383"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1016/j.jmmm.2007.03.164", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1052965812"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "sg:pub.10.1038/nmat1256", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1053403072", 
              "https://doi.org/10.1038/nmat1256"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1063/1.1330562", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1057695558"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1063/1.1374230", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1057700290"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1063/1.1447498", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1057707208"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1063/1.1447533", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1057707242"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1063/1.1453328", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1057708108"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1063/1.1476706", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1057710427"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1063/1.1555771", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1057719217"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1063/1.1556168", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1057719364"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1063/1.1556982", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1057719553"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1063/1.1586478", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1057723057"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1063/1.1586479", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1057723058"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1063/1.1629150", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1057727578"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1063/1.1629155", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1057727583"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1063/1.1667413", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1057744989"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1063/1.1688535", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1057763066"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1063/1.1769605", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1057818317"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1063/1.1829140", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1057825282"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1103/physrevb.39.6995", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1060549900"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1103/physrevb.54.9353", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1060582968"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1103/physrevlett.66.1918", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1060802304"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1103/physrevlett.80.4281", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1060817457"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1103/physrevlett.82.616", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1060819713"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/16.661228", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061095878"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/20.800991", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061118199"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/20.800992", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061118200"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/jssc.2003.810048", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061328493"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/jssc.2005.859315", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061329319"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/jssc.2007.914328", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061329927"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/jssc.2008.917502", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061330145"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/ted.2007.894365", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061592453"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/ted.2007.894366", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061592454"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/ted.2007.894370", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061592455"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/ted.2007.894371", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061592456"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/ted.2007.894373", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061592458"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/ted.2007.894374", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061592459"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/ted.2007.894375", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061592460"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/ted.2007.894376", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061592461"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/ted.2007.894617", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061592474"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/ted.2007.894938", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061592477"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2002.1017774", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061674823"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2002.802434", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061675037"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2004.838075", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061677127"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2004.840847", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061677253"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2005.854666", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061677629"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2005.855295", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678094"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2005.855348", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678145"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2005.861742", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678222"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2005.861782", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678241"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2005.861786", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678244"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2005.861788", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678245"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2006.877743", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678600"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2006.878637", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678665"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2006.878658", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678686"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2006.878659", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678687"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2006.878817", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678728"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2006.878853", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678739"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2006.878855", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678741"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2006.878858", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678744"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2006.878859", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678745"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2006.878861", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678747"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2006.878862", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678748"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2006.878865", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678750"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2006.879572", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678839"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2006.879721", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678883"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2006.879732", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678894"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2006.879733", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678895"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2006.879736", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678898"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2006.879737", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678899"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2006.879739", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678901"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2006.880081", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061678972"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2006.884833", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061679108"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2006.888507", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061679299"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2007.892329", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061679484"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2007.892330", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061679485"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1109/tmag.2007.892587", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1061679564"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1126/science.285.5429.867", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1062566192"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1143/jjap.45.5542", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1063077192"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1147/rd.501.0025", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1063182881"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1147/rd.501.0041", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1063182882"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1147/rd.501.0055", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1063182883"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1147/rd.501.0069", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1063182884"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1147/rd.501.0081", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1063182885"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1147/rd.501.0101", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1063182886"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1147/rd.501.0111", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1063182887"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1557/mrs2007.62", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1067969359"
            ], 
            "type": "CreativeWork"
          }, 
          {
            "id": "https://doi.org/10.1557/mrs2007.63", 
            "sameAs": [
              "https://app.dimensions.ai/details/publication/pub.1067969360"
            ], 
            "type": "CreativeWork"
          }
        ], 
        "description": "

    Methods of fabricating MTJ arrays using two orthogonal line patterning steps are described. Embodiments are described that use a self-aligned double patterning method for one or both orthogonal line patterning steps to achieve dense arrays of MTJs with feature dimensions one half of the minimum photo lithography feature size (F). In one set of embodiments, the materials and thicknesses of the stack of layers that provide the masking function are selected so that after the initial set of mask pads have been patterned, a sequence of etching steps progressively transfers the mask pad shape through the multiple mask layer and down through all of the MTJ cell layers to the form the complete MTJ pillars. In another set of embodiments, the MTJ/BE stack is patterned into parallel lines before the top electrode layer is deposited.

    ", "id": "sg:patent.US-8802451-B2", "keywords": [ "method", "magnetic memory", "fabricating", "patterning", "embodiment", "dense array", "dimension one", "feature size", "thickness", "layer", "masking", "initial set", "mask", "sequence", "etching", "transfer", "shape", "cell layer", "pillar", "parallel line", "electrode" ], "name": "Method for manufacturing high density non-volatile magnetic memory", "sameAs": [ "https://app.dimensions.ai/details/patent/US-8802451-B2" ], "sdDataset": "patents", "sdDatePublished": "2019-03-07T15:33", "sdLicense": "https://scigraph.springernature.com/explorer/license/", "sdPublisher": { "name": "Springer Nature - SN SciGraph project", "type": "Organization" }, "sdSource": "s3://com.uberresearch.data.dev.patents-pipeline/full_run_10/sn-export/5eb3e5a348d7f117b22cc85fb0b02730/0000100128-0000348334/json_export_2f12e043.jsonl", "type": "Patent" } ]
     

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    This table displays all metadata directly associated to this object as RDF triples.

    445 TRIPLES      13 PREDICATES      158 URIs      28 LITERALS      2 BLANK NODES

    Subject Predicate Object
    1 sg:patent.US-8802451-B2 schema:about anzsrc-for:2447
    2 schema:author N49ecc483788340baa136d4673e525c0b
    3 schema:citation sg:pub.10.1007/s11664-002-0033-7
    4 sg:pub.10.1007/s11664-997-0076-x
    5 sg:pub.10.1038/nature03009
    6 sg:pub.10.1038/nature04035
    7 sg:pub.10.1038/nature04036
    8 sg:pub.10.1038/nature05093
    9 sg:pub.10.1038/nmat1120
    10 sg:pub.10.1038/nmat1256
    11 sg:pub.10.1038/nmat1257
    12 sg:pub.10.1038/nmat1595
    13 sg:pub.10.1038/nmat1905
    14 sg:pub.10.1038/nmat1917
    15 sg:pub.10.1038/nphys618
    16 sg:pub.10.1038/nphys619
    17 https://doi.org/10.1016/j.jcrysgro.2004.07.021
    18 https://doi.org/10.1016/j.jmmm.2005.04.005
    19 https://doi.org/10.1016/j.jmmm.2006.10.507
    20 https://doi.org/10.1016/j.jmmm.2007.03.164
    21 https://doi.org/10.1016/j.physleta.2006.01.091
    22 https://doi.org/10.1016/s0304-8853(02)00898-3
    23 https://doi.org/10.1063/1.1330562
    24 https://doi.org/10.1063/1.1374230
    25 https://doi.org/10.1063/1.1389522
    26 https://doi.org/10.1063/1.1447498
    27 https://doi.org/10.1063/1.1447533
    28 https://doi.org/10.1063/1.1453328
    29 https://doi.org/10.1063/1.1476706
    30 https://doi.org/10.1063/1.1507820
    31 https://doi.org/10.1063/1.1555771
    32 https://doi.org/10.1063/1.1556168
    33 https://doi.org/10.1063/1.1556982
    34 https://doi.org/10.1063/1.1586478
    35 https://doi.org/10.1063/1.1586479
    36 https://doi.org/10.1063/1.1629150
    37 https://doi.org/10.1063/1.1629155
    38 https://doi.org/10.1063/1.1667413
    39 https://doi.org/10.1063/1.1688535
    40 https://doi.org/10.1063/1.1707228
    41 https://doi.org/10.1063/1.1757638
    42 https://doi.org/10.1063/1.1769605
    43 https://doi.org/10.1063/1.1829140
    44 https://doi.org/10.1080/14786430500380142
    45 https://doi.org/10.1088/0022-3727/40/10/021
    46 https://doi.org/10.1088/0022-3727/40/10/031
    47 https://doi.org/10.1088/0022-3727/40/10/s02
    48 https://doi.org/10.1088/0022-3727/40/10/s03
    49 https://doi.org/10.1088/0022-3727/40/13/012
    50 https://doi.org/10.1088/0022-3727/40/5/s03
    51 https://doi.org/10.1088/0022-3727/40/5/s06
    52 https://doi.org/10.1088/0957-4484/16/6/062
    53 https://doi.org/10.1088/1742-6596/61/1/022
    54 https://doi.org/10.1103/physrevb.39.6995
    55 https://doi.org/10.1103/physrevb.54.9353
    56 https://doi.org/10.1103/physrevb.60.6137
    57 https://doi.org/10.1103/physrevb.62.12317
    58 https://doi.org/10.1103/physrevlett.66.1918
    59 https://doi.org/10.1103/physrevlett.80.4281
    60 https://doi.org/10.1103/physrevlett.82.616
    61 https://doi.org/10.1103/physrevlett.84.3149
    62 https://doi.org/10.1103/revmodphys.76.323
    63 https://doi.org/10.1109/16.661228
    64 https://doi.org/10.1109/20.800991
    65 https://doi.org/10.1109/20.800992
    66 https://doi.org/10.1109/jssc.2003.810048
    67 https://doi.org/10.1109/jssc.2005.859315
    68 https://doi.org/10.1109/jssc.2007.914328
    69 https://doi.org/10.1109/jssc.2008.917502
    70 https://doi.org/10.1109/ted.2007.894365
    71 https://doi.org/10.1109/ted.2007.894366
    72 https://doi.org/10.1109/ted.2007.894370
    73 https://doi.org/10.1109/ted.2007.894371
    74 https://doi.org/10.1109/ted.2007.894373
    75 https://doi.org/10.1109/ted.2007.894374
    76 https://doi.org/10.1109/ted.2007.894375
    77 https://doi.org/10.1109/ted.2007.894376
    78 https://doi.org/10.1109/ted.2007.894617
    79 https://doi.org/10.1109/ted.2007.894938
    80 https://doi.org/10.1109/tmag.2002.1017774
    81 https://doi.org/10.1109/tmag.2002.802434
    82 https://doi.org/10.1109/tmag.2004.838075
    83 https://doi.org/10.1109/tmag.2004.840847
    84 https://doi.org/10.1109/tmag.2005.854666
    85 https://doi.org/10.1109/tmag.2005.855295
    86 https://doi.org/10.1109/tmag.2005.855348
    87 https://doi.org/10.1109/tmag.2005.861742
    88 https://doi.org/10.1109/tmag.2005.861782
    89 https://doi.org/10.1109/tmag.2005.861786
    90 https://doi.org/10.1109/tmag.2005.861788
    91 https://doi.org/10.1109/tmag.2006.877743
    92 https://doi.org/10.1109/tmag.2006.878637
    93 https://doi.org/10.1109/tmag.2006.878658
    94 https://doi.org/10.1109/tmag.2006.878659
    95 https://doi.org/10.1109/tmag.2006.878817
    96 https://doi.org/10.1109/tmag.2006.878853
    97 https://doi.org/10.1109/tmag.2006.878855
    98 https://doi.org/10.1109/tmag.2006.878858
    99 https://doi.org/10.1109/tmag.2006.878859
    100 https://doi.org/10.1109/tmag.2006.878861
    101 https://doi.org/10.1109/tmag.2006.878862
    102 https://doi.org/10.1109/tmag.2006.878865
    103 https://doi.org/10.1109/tmag.2006.879572
    104 https://doi.org/10.1109/tmag.2006.879721
    105 https://doi.org/10.1109/tmag.2006.879732
    106 https://doi.org/10.1109/tmag.2006.879733
    107 https://doi.org/10.1109/tmag.2006.879736
    108 https://doi.org/10.1109/tmag.2006.879737
    109 https://doi.org/10.1109/tmag.2006.879739
    110 https://doi.org/10.1109/tmag.2006.880081
    111 https://doi.org/10.1109/tmag.2006.884833
    112 https://doi.org/10.1109/tmag.2006.888507
    113 https://doi.org/10.1109/tmag.2007.892329
    114 https://doi.org/10.1109/tmag.2007.892330
    115 https://doi.org/10.1109/tmag.2007.892587
    116 https://doi.org/10.1126/science.285.5429.867
    117 https://doi.org/10.1143/jjap.45.5542
    118 https://doi.org/10.1147/rd.501.0025
    119 https://doi.org/10.1147/rd.501.0041
    120 https://doi.org/10.1147/rd.501.0055
    121 https://doi.org/10.1147/rd.501.0069
    122 https://doi.org/10.1147/rd.501.0081
    123 https://doi.org/10.1147/rd.501.0101
    124 https://doi.org/10.1147/rd.501.0111
    125 https://doi.org/10.1209/epl/i2004-10452-6
    126 https://doi.org/10.1557/mrs2007.62
    127 https://doi.org/10.1557/mrs2007.63
    128 schema:description <p num="p-0001">Methods of fabricating MTJ arrays using two orthogonal line patterning steps are described. Embodiments are described that use a self-aligned double patterning method for one or both orthogonal line patterning steps to achieve dense arrays of MTJs with feature dimensions one half of the minimum photo lithography feature size (F). In one set of embodiments, the materials and thicknesses of the stack of layers that provide the masking function are selected so that after the initial set of mask pads have been patterned, a sequence of etching steps progressively transfers the mask pad shape through the multiple mask layer and down through all of the MTJ cell layers to the form the complete MTJ pillars. In another set of embodiments, the MTJ/BE stack is patterned into parallel lines before the top electrode layer is deposited.</p>
    129 schema:keywords cell layer
    130 dense array
    131 dimension one
    132 electrode
    133 embodiment
    134 etching
    135 fabricating
    136 feature size
    137 initial set
    138 layer
    139 magnetic memory
    140 mask
    141 masking
    142 method
    143 parallel line
    144 patterning
    145 pillar
    146 sequence
    147 shape
    148 thickness
    149 transfer
    150 schema:name Method for manufacturing high density non-volatile magnetic memory
    151 schema:sameAs https://app.dimensions.ai/details/patent/US-8802451-B2
    152 schema:sdDatePublished 2019-03-07T15:33
    153 schema:sdLicense https://scigraph.springernature.com/explorer/license/
    154 schema:sdPublisher N434b8373f0734b0286ea9d989abb8b17
    155 sgo:license sg:explorer/license/
    156 sgo:sdDataset patents
    157 rdf:type sgo:Patent
    158 N02f18706cc2943a98256165fb42b7484 rdf:first Nc54ae853c4f74cc4af1308c0fe659e6a
    159 rdf:rest rdf:nil
    160 N03ce26f90d4a4447873df4e458609af8 schema:name Kimihiro Satoh
    161 rdf:type schema:Person
    162 N0dafeaf992314fa8a07193762dde3337 rdf:first N1ab6d60b13bf4adfa42306cbd64b57b6
    163 rdf:rest N02f18706cc2943a98256165fb42b7484
    164 N1ab6d60b13bf4adfa42306cbd64b57b6 schema:name Parviz Keshtbod
    165 rdf:type schema:Person
    166 N434b8373f0734b0286ea9d989abb8b17 schema:name Springer Nature - SN SciGraph project
    167 rdf:type schema:Organization
    168 N49ecc483788340baa136d4673e525c0b rdf:first Nd8d32b9f161f4d7486cb38958f21ffc6
    169 rdf:rest Nc79331b7260b44619caeed816db2d21a
    170 Na7283eabf81c421b9a25f25946fdd2bd rdf:first Nc0cbf66dfbec49439be74810922cc6d3
    171 rdf:rest N0dafeaf992314fa8a07193762dde3337
    172 Nc0cbf66dfbec49439be74810922cc6d3 schema:name Jing Zhang
    173 rdf:type schema:Person
    174 Nc54ae853c4f74cc4af1308c0fe659e6a schema:name Rajiv Yadav Ranjan
    175 rdf:type schema:Person
    176 Nc79331b7260b44619caeed816db2d21a rdf:first N03ce26f90d4a4447873df4e458609af8
    177 rdf:rest Na7283eabf81c421b9a25f25946fdd2bd
    178 Nd8d32b9f161f4d7486cb38958f21ffc6 schema:name Roger Klas Malmhall
    179 rdf:type schema:Person
    180 anzsrc-for:2447 schema:inDefinedTermSet anzsrc-for:
    181 rdf:type schema:DefinedTerm
    182 sg:pub.10.1007/s11664-002-0033-7 schema:sameAs https://app.dimensions.ai/details/publication/pub.1008827522
    183 https://doi.org/10.1007/s11664-002-0033-7
    184 rdf:type schema:CreativeWork
    185 sg:pub.10.1007/s11664-997-0076-x schema:sameAs https://app.dimensions.ai/details/publication/pub.1016839367
    186 https://doi.org/10.1007/s11664-997-0076-x
    187 rdf:type schema:CreativeWork
    188 sg:pub.10.1038/nature03009 schema:sameAs https://app.dimensions.ai/details/publication/pub.1028432339
    189 https://doi.org/10.1038/nature03009
    190 rdf:type schema:CreativeWork
    191 sg:pub.10.1038/nature04035 schema:sameAs https://app.dimensions.ai/details/publication/pub.1022805974
    192 https://doi.org/10.1038/nature04035
    193 rdf:type schema:CreativeWork
    194 sg:pub.10.1038/nature04036 schema:sameAs https://app.dimensions.ai/details/publication/pub.1032484610
    195 https://doi.org/10.1038/nature04036
    196 rdf:type schema:CreativeWork
    197 sg:pub.10.1038/nature05093 schema:sameAs https://app.dimensions.ai/details/publication/pub.1044280391
    198 https://doi.org/10.1038/nature05093
    199 rdf:type schema:CreativeWork
    200 sg:pub.10.1038/nmat1120 schema:sameAs https://app.dimensions.ai/details/publication/pub.1039970430
    201 https://doi.org/10.1038/nmat1120
    202 rdf:type schema:CreativeWork
    203 sg:pub.10.1038/nmat1256 schema:sameAs https://app.dimensions.ai/details/publication/pub.1053403072
    204 https://doi.org/10.1038/nmat1256
    205 rdf:type schema:CreativeWork
    206 sg:pub.10.1038/nmat1257 schema:sameAs https://app.dimensions.ai/details/publication/pub.1047761572
    207 https://doi.org/10.1038/nmat1257
    208 rdf:type schema:CreativeWork
    209 sg:pub.10.1038/nmat1595 schema:sameAs https://app.dimensions.ai/details/publication/pub.1042288684
    210 https://doi.org/10.1038/nmat1595
    211 rdf:type schema:CreativeWork
    212 sg:pub.10.1038/nmat1905 schema:sameAs https://app.dimensions.ai/details/publication/pub.1010406824
    213 https://doi.org/10.1038/nmat1905
    214 rdf:type schema:CreativeWork
    215 sg:pub.10.1038/nmat1917 schema:sameAs https://app.dimensions.ai/details/publication/pub.1013488732
    216 https://doi.org/10.1038/nmat1917
    217 rdf:type schema:CreativeWork
    218 sg:pub.10.1038/nphys618 schema:sameAs https://app.dimensions.ai/details/publication/pub.1027549338
    219 https://doi.org/10.1038/nphys618
    220 rdf:type schema:CreativeWork
    221 sg:pub.10.1038/nphys619 schema:sameAs https://app.dimensions.ai/details/publication/pub.1045332202
    222 https://doi.org/10.1038/nphys619
    223 rdf:type schema:CreativeWork
    224 https://doi.org/10.1016/j.jcrysgro.2004.07.021 schema:sameAs https://app.dimensions.ai/details/publication/pub.1039661187
    225 rdf:type schema:CreativeWork
    226 https://doi.org/10.1016/j.jmmm.2005.04.005 schema:sameAs https://app.dimensions.ai/details/publication/pub.1033377077
    227 rdf:type schema:CreativeWork
    228 https://doi.org/10.1016/j.jmmm.2006.10.507 schema:sameAs https://app.dimensions.ai/details/publication/pub.1024750224
    229 rdf:type schema:CreativeWork
    230 https://doi.org/10.1016/j.jmmm.2007.03.164 schema:sameAs https://app.dimensions.ai/details/publication/pub.1052965812
    231 rdf:type schema:CreativeWork
    232 https://doi.org/10.1016/j.physleta.2006.01.091 schema:sameAs https://app.dimensions.ai/details/publication/pub.1023293958
    233 rdf:type schema:CreativeWork
    234 https://doi.org/10.1016/s0304-8853(02)00898-3 schema:sameAs https://app.dimensions.ai/details/publication/pub.1024214014
    235 rdf:type schema:CreativeWork
    236 https://doi.org/10.1063/1.1330562 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057695558
    237 rdf:type schema:CreativeWork
    238 https://doi.org/10.1063/1.1374230 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057700290
    239 rdf:type schema:CreativeWork
    240 https://doi.org/10.1063/1.1389522 schema:sameAs https://app.dimensions.ai/details/publication/pub.1004873237
    241 rdf:type schema:CreativeWork
    242 https://doi.org/10.1063/1.1447498 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057707208
    243 rdf:type schema:CreativeWork
    244 https://doi.org/10.1063/1.1447533 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057707242
    245 rdf:type schema:CreativeWork
    246 https://doi.org/10.1063/1.1453328 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057708108
    247 rdf:type schema:CreativeWork
    248 https://doi.org/10.1063/1.1476706 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057710427
    249 rdf:type schema:CreativeWork
    250 https://doi.org/10.1063/1.1507820 schema:sameAs https://app.dimensions.ai/details/publication/pub.1052777383
    251 rdf:type schema:CreativeWork
    252 https://doi.org/10.1063/1.1555771 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057719217
    253 rdf:type schema:CreativeWork
    254 https://doi.org/10.1063/1.1556168 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057719364
    255 rdf:type schema:CreativeWork
    256 https://doi.org/10.1063/1.1556982 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057719553
    257 rdf:type schema:CreativeWork
    258 https://doi.org/10.1063/1.1586478 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057723057
    259 rdf:type schema:CreativeWork
    260 https://doi.org/10.1063/1.1586479 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057723058
    261 rdf:type schema:CreativeWork
    262 https://doi.org/10.1063/1.1629150 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057727578
    263 rdf:type schema:CreativeWork
    264 https://doi.org/10.1063/1.1629155 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057727583
    265 rdf:type schema:CreativeWork
    266 https://doi.org/10.1063/1.1667413 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057744989
    267 rdf:type schema:CreativeWork
    268 https://doi.org/10.1063/1.1688535 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057763066
    269 rdf:type schema:CreativeWork
    270 https://doi.org/10.1063/1.1707228 schema:sameAs https://app.dimensions.ai/details/publication/pub.1026652974
    271 rdf:type schema:CreativeWork
    272 https://doi.org/10.1063/1.1757638 schema:sameAs https://app.dimensions.ai/details/publication/pub.1014262225
    273 rdf:type schema:CreativeWork
    274 https://doi.org/10.1063/1.1769605 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057818317
    275 rdf:type schema:CreativeWork
    276 https://doi.org/10.1063/1.1829140 schema:sameAs https://app.dimensions.ai/details/publication/pub.1057825282
    277 rdf:type schema:CreativeWork
    278 https://doi.org/10.1080/14786430500380142 schema:sameAs https://app.dimensions.ai/details/publication/pub.1040630496
    279 rdf:type schema:CreativeWork
    280 https://doi.org/10.1088/0022-3727/40/10/021 schema:sameAs https://app.dimensions.ai/details/publication/pub.1029461898
    281 rdf:type schema:CreativeWork
    282 https://doi.org/10.1088/0022-3727/40/10/031 schema:sameAs https://app.dimensions.ai/details/publication/pub.1014889797
    283 rdf:type schema:CreativeWork
    284 https://doi.org/10.1088/0022-3727/40/10/s02 schema:sameAs https://app.dimensions.ai/details/publication/pub.1040896349
    285 rdf:type schema:CreativeWork
    286 https://doi.org/10.1088/0022-3727/40/10/s03 schema:sameAs https://app.dimensions.ai/details/publication/pub.1020105724
    287 rdf:type schema:CreativeWork
    288 https://doi.org/10.1088/0022-3727/40/13/012 schema:sameAs https://app.dimensions.ai/details/publication/pub.1011326133
    289 rdf:type schema:CreativeWork
    290 https://doi.org/10.1088/0022-3727/40/5/s03 schema:sameAs https://app.dimensions.ai/details/publication/pub.1001882959
    291 rdf:type schema:CreativeWork
    292 https://doi.org/10.1088/0022-3727/40/5/s06 schema:sameAs https://app.dimensions.ai/details/publication/pub.1001456059
    293 rdf:type schema:CreativeWork
    294 https://doi.org/10.1088/0957-4484/16/6/062 schema:sameAs https://app.dimensions.ai/details/publication/pub.1041941330
    295 rdf:type schema:CreativeWork
    296 https://doi.org/10.1088/1742-6596/61/1/022 schema:sameAs https://app.dimensions.ai/details/publication/pub.1029375830
    297 rdf:type schema:CreativeWork
    298 https://doi.org/10.1103/physrevb.39.6995 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060549900
    299 rdf:type schema:CreativeWork
    300 https://doi.org/10.1103/physrevb.54.9353 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060582968
    301 rdf:type schema:CreativeWork
    302 https://doi.org/10.1103/physrevb.60.6137 schema:sameAs https://app.dimensions.ai/details/publication/pub.1023870634
    303 rdf:type schema:CreativeWork
    304 https://doi.org/10.1103/physrevb.62.12317 schema:sameAs https://app.dimensions.ai/details/publication/pub.1014278815
    305 rdf:type schema:CreativeWork
    306 https://doi.org/10.1103/physrevlett.66.1918 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060802304
    307 rdf:type schema:CreativeWork
    308 https://doi.org/10.1103/physrevlett.80.4281 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060817457
    309 rdf:type schema:CreativeWork
    310 https://doi.org/10.1103/physrevlett.82.616 schema:sameAs https://app.dimensions.ai/details/publication/pub.1060819713
    311 rdf:type schema:CreativeWork
    312 https://doi.org/10.1103/physrevlett.84.3149 schema:sameAs https://app.dimensions.ai/details/publication/pub.1002331710
    313 rdf:type schema:CreativeWork
    314 https://doi.org/10.1103/revmodphys.76.323 schema:sameAs https://app.dimensions.ai/details/publication/pub.1007326605
    315 rdf:type schema:CreativeWork
    316 https://doi.org/10.1109/16.661228 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061095878
    317 rdf:type schema:CreativeWork
    318 https://doi.org/10.1109/20.800991 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061118199
    319 rdf:type schema:CreativeWork
    320 https://doi.org/10.1109/20.800992 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061118200
    321 rdf:type schema:CreativeWork
    322 https://doi.org/10.1109/jssc.2003.810048 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061328493
    323 rdf:type schema:CreativeWork
    324 https://doi.org/10.1109/jssc.2005.859315 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061329319
    325 rdf:type schema:CreativeWork
    326 https://doi.org/10.1109/jssc.2007.914328 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061329927
    327 rdf:type schema:CreativeWork
    328 https://doi.org/10.1109/jssc.2008.917502 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061330145
    329 rdf:type schema:CreativeWork
    330 https://doi.org/10.1109/ted.2007.894365 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061592453
    331 rdf:type schema:CreativeWork
    332 https://doi.org/10.1109/ted.2007.894366 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061592454
    333 rdf:type schema:CreativeWork
    334 https://doi.org/10.1109/ted.2007.894370 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061592455
    335 rdf:type schema:CreativeWork
    336 https://doi.org/10.1109/ted.2007.894371 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061592456
    337 rdf:type schema:CreativeWork
    338 https://doi.org/10.1109/ted.2007.894373 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061592458
    339 rdf:type schema:CreativeWork
    340 https://doi.org/10.1109/ted.2007.894374 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061592459
    341 rdf:type schema:CreativeWork
    342 https://doi.org/10.1109/ted.2007.894375 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061592460
    343 rdf:type schema:CreativeWork
    344 https://doi.org/10.1109/ted.2007.894376 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061592461
    345 rdf:type schema:CreativeWork
    346 https://doi.org/10.1109/ted.2007.894617 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061592474
    347 rdf:type schema:CreativeWork
    348 https://doi.org/10.1109/ted.2007.894938 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061592477
    349 rdf:type schema:CreativeWork
    350 https://doi.org/10.1109/tmag.2002.1017774 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061674823
    351 rdf:type schema:CreativeWork
    352 https://doi.org/10.1109/tmag.2002.802434 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061675037
    353 rdf:type schema:CreativeWork
    354 https://doi.org/10.1109/tmag.2004.838075 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061677127
    355 rdf:type schema:CreativeWork
    356 https://doi.org/10.1109/tmag.2004.840847 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061677253
    357 rdf:type schema:CreativeWork
    358 https://doi.org/10.1109/tmag.2005.854666 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061677629
    359 rdf:type schema:CreativeWork
    360 https://doi.org/10.1109/tmag.2005.855295 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678094
    361 rdf:type schema:CreativeWork
    362 https://doi.org/10.1109/tmag.2005.855348 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678145
    363 rdf:type schema:CreativeWork
    364 https://doi.org/10.1109/tmag.2005.861742 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678222
    365 rdf:type schema:CreativeWork
    366 https://doi.org/10.1109/tmag.2005.861782 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678241
    367 rdf:type schema:CreativeWork
    368 https://doi.org/10.1109/tmag.2005.861786 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678244
    369 rdf:type schema:CreativeWork
    370 https://doi.org/10.1109/tmag.2005.861788 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678245
    371 rdf:type schema:CreativeWork
    372 https://doi.org/10.1109/tmag.2006.877743 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678600
    373 rdf:type schema:CreativeWork
    374 https://doi.org/10.1109/tmag.2006.878637 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678665
    375 rdf:type schema:CreativeWork
    376 https://doi.org/10.1109/tmag.2006.878658 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678686
    377 rdf:type schema:CreativeWork
    378 https://doi.org/10.1109/tmag.2006.878659 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678687
    379 rdf:type schema:CreativeWork
    380 https://doi.org/10.1109/tmag.2006.878817 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678728
    381 rdf:type schema:CreativeWork
    382 https://doi.org/10.1109/tmag.2006.878853 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678739
    383 rdf:type schema:CreativeWork
    384 https://doi.org/10.1109/tmag.2006.878855 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678741
    385 rdf:type schema:CreativeWork
    386 https://doi.org/10.1109/tmag.2006.878858 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678744
    387 rdf:type schema:CreativeWork
    388 https://doi.org/10.1109/tmag.2006.878859 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678745
    389 rdf:type schema:CreativeWork
    390 https://doi.org/10.1109/tmag.2006.878861 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678747
    391 rdf:type schema:CreativeWork
    392 https://doi.org/10.1109/tmag.2006.878862 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678748
    393 rdf:type schema:CreativeWork
    394 https://doi.org/10.1109/tmag.2006.878865 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678750
    395 rdf:type schema:CreativeWork
    396 https://doi.org/10.1109/tmag.2006.879572 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678839
    397 rdf:type schema:CreativeWork
    398 https://doi.org/10.1109/tmag.2006.879721 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678883
    399 rdf:type schema:CreativeWork
    400 https://doi.org/10.1109/tmag.2006.879732 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678894
    401 rdf:type schema:CreativeWork
    402 https://doi.org/10.1109/tmag.2006.879733 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678895
    403 rdf:type schema:CreativeWork
    404 https://doi.org/10.1109/tmag.2006.879736 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678898
    405 rdf:type schema:CreativeWork
    406 https://doi.org/10.1109/tmag.2006.879737 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678899
    407 rdf:type schema:CreativeWork
    408 https://doi.org/10.1109/tmag.2006.879739 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678901
    409 rdf:type schema:CreativeWork
    410 https://doi.org/10.1109/tmag.2006.880081 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061678972
    411 rdf:type schema:CreativeWork
    412 https://doi.org/10.1109/tmag.2006.884833 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061679108
    413 rdf:type schema:CreativeWork
    414 https://doi.org/10.1109/tmag.2006.888507 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061679299
    415 rdf:type schema:CreativeWork
    416 https://doi.org/10.1109/tmag.2007.892329 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061679484
    417 rdf:type schema:CreativeWork
    418 https://doi.org/10.1109/tmag.2007.892330 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061679485
    419 rdf:type schema:CreativeWork
    420 https://doi.org/10.1109/tmag.2007.892587 schema:sameAs https://app.dimensions.ai/details/publication/pub.1061679564
    421 rdf:type schema:CreativeWork
    422 https://doi.org/10.1126/science.285.5429.867 schema:sameAs https://app.dimensions.ai/details/publication/pub.1062566192
    423 rdf:type schema:CreativeWork
    424 https://doi.org/10.1143/jjap.45.5542 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063077192
    425 rdf:type schema:CreativeWork
    426 https://doi.org/10.1147/rd.501.0025 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063182881
    427 rdf:type schema:CreativeWork
    428 https://doi.org/10.1147/rd.501.0041 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063182882
    429 rdf:type schema:CreativeWork
    430 https://doi.org/10.1147/rd.501.0055 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063182883
    431 rdf:type schema:CreativeWork
    432 https://doi.org/10.1147/rd.501.0069 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063182884
    433 rdf:type schema:CreativeWork
    434 https://doi.org/10.1147/rd.501.0081 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063182885
    435 rdf:type schema:CreativeWork
    436 https://doi.org/10.1147/rd.501.0101 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063182886
    437 rdf:type schema:CreativeWork
    438 https://doi.org/10.1147/rd.501.0111 schema:sameAs https://app.dimensions.ai/details/publication/pub.1063182887
    439 rdf:type schema:CreativeWork
    440 https://doi.org/10.1209/epl/i2004-10452-6 schema:sameAs https://app.dimensions.ai/details/publication/pub.1021678993
    441 rdf:type schema:CreativeWork
    442 https://doi.org/10.1557/mrs2007.62 schema:sameAs https://app.dimensions.ai/details/publication/pub.1067969359
    443 rdf:type schema:CreativeWork
    444 https://doi.org/10.1557/mrs2007.63 schema:sameAs https://app.dimensions.ai/details/publication/pub.1067969360
    445 rdf:type schema:CreativeWork
     




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