Methods of manufacturing high-strength large-area sputtering targets


Ontology type: sgo:Patent     


Patent Info

DATE

N/A

AUTHORS

Scott Jeffrey VOLCHKO , Stefan Zimmermann , Steven A. Miller , Michael Thomas Stawovy

ABSTRACT

A joined sputtering target comprising a sputtering material is formed by disposing two discrete sputtering-target tiles comprising the sputtering material proximate each other, thereby forming an interface between the tiles, the interface comprising at least one of an interlocking joint therein or a recess in a top surface thereof, and spray-depositing a spray material over at least a portion of the interface, thereby joining the tiles to form the joined sputtering target. More... »

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