Methods of manufacturing large-area sputtering targets by cold spray


Ontology type: sgo:Patent     


Patent Info

DATE

N/A

AUTHORS

Steven A. Miller , Francois-Charles Dary , Mark Gaydos , Gary Rozak

ABSTRACT

In various embodiments, a joined sputtering target is formed by filling at least a portion of a gap between two discrete sputtering-target tiles with a gap-fill material, spray-depositing a spray material to form a partial joint, removing at least a portion of the gap-fill material, and, thereafter, spray-depositing the spray material to join the tiles. More... »

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