Method of manufacturing magnetic tunnel junction device and apparatus for manufacturing the same


Ontology type: sgo:Patent     


Patent Info

DATE

N/A

AUTHORS

Young-Suk Choi

ABSTRACT

A method of manufacturing a magnetic tunnel junction device includes a barrier layer forming step of forming a tunnel barrier layer. The barrier layer forming step comprises a step of depositing a first metal layer, an oxygen surfactant layer forming step of forming an oxygen surfactant layer on the first metal layer, a step of deposing a second metal layer above the first oxygen surfactant layer, and an oxidation step of oxidizing the first metal layer and the second metal layer to form a metal oxide layer. More... »

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