Metal complex compositions and methods for making metal-containing films


Ontology type: sgo:Patent     


Patent Info

DATE

N/A

AUTHORS

Gregory S. Girolami , Do Young Kim , John R. Abelson , Navneet KUMAR , Yu Yang , Scott Daly

ABSTRACT

The present invention provides compositions of matter useful as deposition agents for making structures, including thin film structures and hard coatings, on substrates and features of substrates. In an embodiment, for example, the present invention provides metal complexes having one or more diboranamide or diboranaphosphide ligands that are useful as chemical vapor deposition (CVD) and/or atomic layer deposition (ALD) precusors for making thin film structures and coatings. Metal complex CVD precursors are provided that possess volitilities sufficiently high so as to provide dense, smooth and homogenous thin films and coatings. More... »

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The present invention provides compositions of matter useful as deposition agents for making structures, including thin film structures and hard coatings, on substrates and features of substrates. In an embodiment, for example, the present invention provides metal complexes having one or more diboranamide or diboranaphosphide ligands that are useful as chemical vapor deposition (CVD) and/or atomic layer deposition (ALD) precusors for making thin film structures and coatings. Metal complex CVD precursors are provided that possess volitilities sufficiently high so as to provide dense, smooth and homogenous thin films and coatings.

", "id": "sg:patent.US-8362220-B2", "keywords": [ "complex composition", "method", "Motion Picture as Topic", "invention", "composition", "deposition", "thin film structure", "hard coating", "substrate", "feature", "embodiment", "metal complex", "ligand", "chemical vapor deposition", "atomic layer deposition", "coating", "thin film" ], "name": "Metal complex compositions and methods for making metal-containing films", "recipient": [ { "id": "https://www.grid.ac/institutes/grid.411030.7", "type": "Organization" } ], "sameAs": [ "https://app.dimensions.ai/details/patent/US-8362220-B2" ], "sdDataset": "patents", "sdDatePublished": "2019-03-07T15:35", "sdLicense": "https://scigraph.springernature.com/explorer/license/", "sdPublisher": { "name": "Springer Nature - SN SciGraph project", "type": "Organization" }, "sdSource": "s3://com.uberresearch.data.dev.patents-pipeline/full_run_10/sn-export/5eb3e5a348d7f117b22cc85fb0b02730/0000100128-0000348334/json_export_b65d5aab.jsonl", "type": "Patent" } ]
 

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