Surface preparation for thin film growth by enhanced nucleation


Ontology type: sgo:Patent     


Patent Info

DATE

2012-02-07T00:00

AUTHORS

Navneet KUMAR , Angel YANGUAS-GIL , Gregory S. Girolami , John R. Abelson

ABSTRACT

Various processes and related systems are provided for making structures on substrate surfaces. Disclosed are methods of making a structure supported by a substrate by providing a substrate having a receiving surface and exposing at least a portion of the receiving surface to output from a remote plasma of an inert gas. The remote plasma has an energy low enough to substantially avoid etching or sputtering of the receiving surface but sufficient to generate a treated receiving surface. The treated surface is contacted with a deposition gas, thereby making the structure supported by the substrate. More... »

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